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Mott
POU Filters

POU Filters

Product catalog summary

Overview: Mott Corporation offers high-purity point-of-use (POU) gas filters designed for the semiconductor industry. These filters are available in various materials, including Hastelloy C-22 and nickel, to accommodate different gas applications and flow rates.

Specifications:

Filters are available in Hastelloy C-22 for corrosive gases like HCI, HBr, and WF6, and nickel for higher flow rates.
GasShield GasketFilter™ fits inside 1/4” face seal fittings and offers true 0.003µm filtration.
Maximum operating temperature is 450°C for inert gases, with a maximum differential pressure of 1000 psid at 20°C.

Performance:

Achieves a 9 log reduction value, removing over 99.9999999% of particles down to 0.003µm.
Withstands operating temperatures up to 450°C and differential pressures up to 1000 psi at 20°C.
All units are helium leak-tested to a maximum of 1 x 10-9 atm cc/sec.

Construction:

Features a 5 Ra surface finish on internal components and sintered media without binders.
All-welded construction minimizes out-gassing, enhancing purity and reliability.

Materials:

Standard filters use 316L stainless steel porous metal media with 316L VAR/electropolished stainless steel or nickel housings.

Ordering Information:

Filters are available in various configurations, with options for different materials and connection types.

Warranty: Mott Corporation provides a five-year limited warranty on GasShield filters, ensuring retention and media integrity standards are met when used as specified.

Catalog excerpts

mott corporation High Purity Products Mott GasShiekT

Open the catalog to page 1

For maximum filtration efficiency, strength and reliability, the GasShield POU filter line is the industry’s first and still largest collection of all-metal filters. Which means Mott offers the greatest assurance of having the precise filter you require – whether it’s Hastelloy® C-22 to withstand corrosive gases, or Mott PENTA® Nickel to offer ∆Ps comparable to Teflon®. Key GasShield POU features include: 9 log reduction value. • Greater than 99.9999999% removal of all particles down to 0.003µm; confirmed at the most penetrating particle size of 0.1µm. High-performance operation. • Mott also...

Open the catalog to page 2

Ordering Information. Mott GasShield POU filters are available in the following standard configurations. Other configurations may be available on special order. Consult the factory. Computer Maximum Filter Catalog Part No. Rated Flow Element Housing Number (CPN*) (slpm) Material Material Maximum Maximum Standard Inlet Pressure Differential Overall Inlet/Outlet (psig/bar) Pressure Length Connection** at20°C (psid/bar) (Inches/mm) STAINLESS STEEL 316L SS/VAR 1/4" Male Face Seal 3750/258.6 1/4" Male Face Seal 3750/258.6 316L SS/VAR 1/4" Male Face Seal 2500/172.4 316L SS/VAR 1/4" Male Face Seal 2500/172.4...

Open the catalog to page 3

Limited Warranty Mott Corporation (“Mott”) warrants its GasShield ® gas filter will meet the specified retention and media integrity standards for a period of five years from the date of purchase, providing the filter is properly installed and used in accordance with the specified flow, pressure, temperature, and chemical compatibility as published by Mott. Mott will replace or grant a purchase price refund for any GasShield filter which proves defective under the terms of this Limited Warranty. No other remedies apply. Mott disclaims all other warranties, either expressed or implied, including...

Open the catalog to page 4

POU Filters

POU Filters

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