BMott High Purity Fiber mott corporation Designed for Low Pressure Drop Applications High Flow Rate/Low Pressure Drop ■ High Temperature Tolerance (up to 450°C) ■ Maximum Inlet Pressure up to 2500 PSIG ■ 100% 316L Stainless Steel Construction ■ Ideal for Low Vapor Pressure Gases from Liquid Source Volatile Precursors ■ 1 x 10 9 atm cc/sec Helium Leak Rate ■ Cleaned and Packaged in Class 100 Clean Room ■ High Flow with Low Pressure Drop - Hook-Up Applications Q high purity products

Available Configurations Media Material Stainless Steel Stainless Steel Stainless Steel Mott High Purity FLP Series Filters Mott FLP515 Flow Rate vs. Differential Pressure Typical Flow Curves as a Function of System Pressures Atmospheric Outlet 30 psig (207 kPa) Inlet 60 psig (414 kPa) Inlet 90 psig (621 kPa) Inlet Differential Pressure (psid) Nitrogen Flow Rate (slpm) mott corporation 84 Spring Lane, Farmington, CT 06032-3159 | 860-747-6333 Fax 860-747-6739 www.mottcorp.com | email: [email protected] ISO 9001:2008 CERTIFIED