mott corporation High Purity Products IGS Porous Metal Filters and Flow Restrictors.

IGS Porous Metal Filters and Flow Restrictors. Integrating the best of high flow rates, material range and configuration options. High-precision, high-flow, all-metal filtration engineered specifically for Integrated Gas System (IGS) assemblies. Mott High Purity – who for years has provided the highest quality porous metal filters and flow restrictors for semiconductor manufacturing – also offers these same products in IGS-compatible designs. So now you can combine the ease of installation, stick component accessibility, ease of maintenance, reduced assembly time and compatibility between components...

Mott IGS Filter Configurations. Mott offers a full line of filters and flow restrictors to support the integrated systems solutions for process tool gas systems and facility-wide gas distribution systems (including valve manifold boxes, gas interface boxes, modular gas sticks and purge panels). 1.125" designs • Available in C-Seal and W-Seal configurations • Flow passages equivalent to 1/4" tubing • Standard flow rates up to 50 slpm • Compatible with most popular compact modular substrate systems 1.125" filters (W-Seal shown; C-Seal also available). 1.5" footprint • Available in C-Seal and W-Seal...

Typical Flow Curves for Mott 1.125" and 1.5" IGS Filters. Typical Differential Pressure vs. Flow 12 W-Seal PENTA Nickel 10 Liter Filter @ 90 psig Percent of Rated Flow Differential Pressure (PSID) 50 Liter Filter @ 90 psig Differential Pressure (PSID) 10 Liter Filter @ 30 psig 50 Liter Filter @ 30 psig Percent of Rated Flow 75 Liter Filter @ 30 psig 10 Liter Filter @ 30 psig 75 Liter Filter @ 90 psig 10 Liter Filter @ 90 psig

Typical Differential Pressure vs. Flow 12 C-Seal PENTA Nickel 10 Liter Filter @ 90 psig Percent of Rated Flow Differential Pressure (PSID) 50 Liter Filter @ 90 psig Differential Pressure (PSID) 10 Liter Filter @ 30 psig 50 Liter Filter @ 30 psig Percent of Rated Flow 75 Liter Filter @ 30 psig 10 Liter Filter @ 30 psig 75 Liter Filter @ 90 psig 10 Liter Filter @ 90 psig

IGS Filters. Mott IGS filters are available in the following standard configurations. Other configurations may be available on special order. Consult the factory. Catalog Number for Standard Configurations Computer Part Number (CPN*) Maximum Rated Flow (slpm) Overall Height (inches) Filter Element Material Housing Material Seal Configuration

High Purity Porous Metal Flow Restrictors for Surface Mount Systems. Porous metal restrictors for 1.125" surface mount applications. Mott Corporation supports the 1.125" and 1.5" high-flow C-Seal configuration of integrated gas systems with a full line of porous metal flow restrictors. These products use the same sealing specifications as described in SEMI PR 3.1 and provide the same high-quality flow restriction presently available in our 5140 series restrictors with traditional face seal design. All GSMR restrictor products are assembled and tested in a class 100 clean room environment. For...

Limited Warranty Mott Corporation (“Mott”) warrants its IGS gas filter will meet the specified retention and media integrity standards for a period of five years from the date of purchase, providing the filter is properly installed and used in accordance with the specified flow, pressure, temperature, and chemical compatibility as published by Mott. Mott will replace or grant a purchase price refund for any IGS filter which proves defective under the terms of this Limited Warranty. No other remedies apply. Mott disclaims all other warranties, either expressed or implied, including any warranty...