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Flow Restrictors

Flow Restrictors

Product catalog summary

Overview: Mott Corporation's High Purity Porous Metal Flow Restrictors offer a reliable and cost-effective solution for flow control in semiconductor manufacturing. These restrictors provide consistent performance and resistance to clogging, overcoming the limitations of mass flow controllers, needle valves, and calibrated orifices.

Key Features:

Cost-Effective Design: The flow restrictors consist of a porous metal element within a standard fitting, ensuring strength and reliability at a low cost.
Fixed Performance: The restrictors deliver specified downstream flow for their entire lifespan without adjustments or moving parts.
Clog-Free Operation: The porous metal element allows gases to pass through microchannels, maintaining smooth and constant flow without clogging.

Additional Benefits:

All-Metal Construction: Made from stainless steel, nickel, or Hastelloy®, these restrictors are free from elastomers or non-metallic materials.
High Temperature and Pressure Tolerance: They can withstand temperatures up to 450°C and pressures up to 1500 psig.
Wide Range of Flow Rates: Capable of handling flows from 100 SLPM to less than 1x10-6 SCCM.
Clean Room Prepared: Cleaned and bagged in a Class 100 clean room for optimal performance.
Calibrated for Various Gases: Compatible with all process gases, including oxygen, and calibrated to nitrogen and hydrogen flow curves.

Advantages Over Calibrated Orifices:

Flow Distribution: Reduces flow burden by distributing it over the entire insert.
Prevents Plugging: Ensures uniform gas movement through the porous element.

Technical Specifications:

Materials: 316L Stainless Steel with options for other media.
Configurations: Available in various configurations with specific surface finishes and lengths.

Flow Characteristics: The document includes graphs showing flow characteristics for different gases and pressures, highlighting the performance of Mott Flow Restrictors compared to standard orifices.

Viscosity and Flow Estimation: Provides a table of gas viscosities and a formula to estimate flows for gases not tested with Mott Flow Restrictors.

Contact Information: For custom flow restrictor requests, contact Mott Corporation with specific application details.

Catalog excerpts

mott corporation High Purity Products High Purity Porous Metal Flow Restrictors.

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High Purity Porous Metal Flow Restrictors. For reliable, affordable flow control, without the drawbacks of mass flow controllers, needle valves and calibrated orifices. Whatever your priorities in flow control – whether you want low cost, consistent performance, or resistance to clogging – there’s one alternative that will satisfy on all counts: Mott High Purity Porous Metal Flow Restrictors. Featuring Mott’s unique porous metal media developed specifically for semiconductor manufacturing, Mott Flow Restrictors provide compact, long-lasting flow control coupled with: • A cost-effective design...

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Typical flow characteristics of three standard Mott Flow Restrictors. 100 SCCM @ 30 psi N2 Restrictor N2 Air Flow - SCCM How to determine the flows of other gases. The flows of gases not yet tested with Mott Flow Restrictors can be estimated by adjusting for the viscosity relative to nitrogen. Ratios of some common process gases are shown in the table below. To make the correction between nitrogen and the target gas, use the following formula: Nitrogen flow = (target gas flow) target gas viscosity N2 viscosity Example: 418 SCCM of N2 = 500 SCCM HCl (148/177) Degrees Celsius Flow - SCCM Flow -...

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mott corporation 84 Spring Lane, Farmington, CT 06032-3159 www.mottcorp.com, email: [email protected] 860-747-6333 Fax 860-747-6739

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