mott corporation High Purity Products High Purity Porous Metal Flow Restrictors.

High Purity Porous Metal Flow Restrictors. For reliable, affordable flow control, without the drawbacks of mass flow controllers, needle valves and calibrated orifices. Whatever your priorities in flow control – whether you want low cost, consistent performance, or resistance to clogging – there’s one alternative that will satisfy on all counts: Mott High Purity Porous Metal Flow Restrictors. Featuring Mott’s unique porous metal media developed specifically for semiconductor manufacturing, Mott Flow Restrictors provide compact, long-lasting flow control coupled with: • A cost-effective design...

Typical flow characteristics of three standard Mott Flow Restrictors. 100 SCCM @ 30 psi N2 Restrictor N2 Air Flow - SCCM How to determine the flows of other gases. The flows of gases not yet tested with Mott Flow Restrictors can be estimated by adjusting for the viscosity relative to nitrogen. Ratios of some common process gases are shown in the table below. To make the correction between nitrogen and the target gas, use the following formula: Nitrogen flow = (target gas flow) target gas viscosity N2 viscosity Example: 418 SCCM of N2 = 500 SCCM HCl (148/177) Degrees Celsius Flow - SCCM Flow -...

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