FOR CHEMICAL MECHANICAL POLISHING (CMP) AND GRINDING, WAFER HANDLING AND APPLICATIONS IN VACUUM ENVIRONMENT

ROTARY UNIONS RELIABLE SINGLE CHANNEL SOLUTION ROTODISK S unions are fitted with extremely wear-resistant hydrostatically relieved silicon carbide mechanical seals to ensure low frictional torque and minimal wear, accordingly. An automatic self-alignment system ensures that the axial face seals always have full surface contact. Media: DI water, air, low vacuum LEAKAGE-FREE AND WEAR-RESISTANT The elastic sealing systems developed in-house and the special coatings of the shaft ensure minimal wear and smooth operation without leakage of the ROTOPACK rotary unions – despite the contacting seal. Media:...

EXAMPLE FOR CHEMICAL MECHANICAL POLISHING MACHINES ROTOPACK OR ROTOSTAT E Wafer carrier 8 channels air / 1.5 bar 0.5 bar abs. (vacuum) Speed: 200 rpm ROTODISK S Pad conditioner 1 channel de-ionized (DI) water / 3 bar Speed: 1,500 rpm SLIP RING ROTOFLUX OR COMBINED SYSTEM ROTOKOMBI Turntable/platen 2 channels water-glycol / 10 bar 8 poles for signals and power Speed: 200 rpm COMBINED SYSTEMS ROTOKOMBI Moog GAT is a technology leader in the design and production of media rotary unions and electrical slip rings. We are a single-source supplier for standard solutions as well as custom-made products,...

SLIP RINGS FOR POWER, SIGNALS AND DATA The proven gold/gold technology of our ROTOFLUX slip rings provides a reliable transmission of power, signals and data, such as Ethernet. This combination of gold spring wires and gold-plated slip tracks ensures maximum contact quality. OPTICAL COMMUNICATION Our slip rings can be optionally equipped with our fiber optical rotary union ROTORAY. Visit our website to find the Moog office nearest you, www.gat-mbh.de For product information, visit www.gat-mbh.de/en/applications/semiconductors For service information, visit www.gat-mbh.de/en/contact/service Moog...