W W W . M K S I N S T . C O M Vacuum Technology Enabling STAINLESS STEEL FITTINGS AND VACUUM VALVES VACUUM TRANSDUCERS AND GAUGE CONTROLLER SYSTEMS EFFLUENT MANAGEMENT SUBSYSTEMS™ Innovative Process Solutions

MKS — The world’s broadest source of control products for today’s advanced processes MKS Instruments is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, electrostatic charge management, yield management, control and information technology, power and reactive gas generation, and vacuum...

Stainless Steel Fittings and Vacuum Valves MKS HPS® Products manufactures a complete line of stainless steel components and vacuum valves in ISO-KF, ISO Universal, metal-sealed CF and ButtWeld versions, as well as process piping specifically designed for biopharmaceutical applications. This product line also includes safety shut-off valves, soft-start valves, and angle and in-line vacuum valves in heated or unheated configurations. All MKS process components and valves are manufactured to the highest industry cleanliness standards. In addition to its broad offering of standard components, MKS...

Vacuum Transducers and Gauge Controller Systems For vacuum measurement from 10-11 to 10,000 Torr, MKS offers a broad range of gauges, controllers and transducers, including Pirani, convection Pirani, piezo, hot cathode, cold cathode and new MEMS-based multi-sensor technology. The MKS line of vacuum gauges includes the Series 900 transducers that contain sensors and electronics combined into a single device, as well as the traditional, easy-to-operate gauge controller/sensor combinations. Multi-Gauge Controllers The MKS line of multi-gauge controllers operates a combination of sensor technologies...

Effluent Management Subsystems™ Minimizing the buildup of residue in vacuum pumping lines pays back in improved process yield and system uptime. MKS' HPS heaters keep reaction by-products in the vapor phase until they can be safely collected in an appropriate trap. Detailed process understanding by our engineers, along with a choice of heater temperatures and trap designs, allows MKS to provide the optimum Effluent Management Subsystem™ solution for many corrosive processes including: LPCVD-Silicon Nitride, LPCVD-TEOS, WCVD, SABPSG, and Metal Etch. Traps MKS' patented line of traps are highly-efficient...

Vacuum Technology Line Card - 3/08 HPS®, Baratron®, AUTO-SOFT®, and VACUUM SENTRY® are registered trademarks, and Cv™, IDA™, MicroPirani™, Effluent Management Subsystems™, and Virtual Wall™ are trademarks of MKS Instruments, Inc. © 2008 MKS Instruments, Inc. All rights reserved. MKS Vacuum Technology HPS® Products 5330 Sterling Drive Boulder, CO 80301 Tel: 303.449.9861 800.345.1967 (in USA) Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 800.227.8766 (in USA) Web: www.mksinst.com China France Germany Israel Italy Japan Korea Netherlands Singapore Taiwan United...