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SRG-3 Spinning Rotor Vacuum Gauge System

SRG-3 Spinning Rotor Vacuum Gauge System
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SRG-3 Spinning Rotor Vacuum Gauge System - 1

Pressure Measurement & Control SRG-3 SPINNING ROTOR GAUGE SYSTEM The MKS Spinning Rotor Gauge (SRG) line is well established with users around the world as a stable, high accuracy ransfer standard for high vacuum pressure measurements. t We continue to be at the forefront of SRG development with the introduction of the SRG-3 Spinning Rotor Gauge System. The complete SRG-3 system is comprised of a microprocessor-based electronics unit, a measuring head and a ball/flange assembly. The measuring head easily decouples from the ball/flange assembly, allowing several permanently mounted ball/flange assemblies to be used with one measuring head and electronics unit. This facilitates taking measurements from multiple locations when continuous readings are not necessary. Features & Benefits Traceability • German Calibration Service, DKD traceable • Ensures absolute consistency • Satisfies ISO9000 requirements • Recognized transfer standard Accuracy • Guaranteed precision from 5x10-7 to 1x10-2 mbar (Torr) • Overall measuring range extends to 1 mbar (Torr) • No thermal or ionization effects Stability • Superior long term stability • Wetted surfaces are stainless steel • Assures chamber-to-chamber consistency

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SRG-3 Spinning Rotor Vacuum Gauge System - 2

Principle of a Spinning Rotor Gauge The sensing element of the SRG is a magnetically levitated stainless steel ball that resides in a tube connected to the vacuum system. The ball is suspended and rotated by the separable drive assembly. Once the ball reaches a certain rotational speed, the ball is allowed to free spin. Collisions of the gas molecules with the surface of the ball impart a drag which decelerates the ball. Pickup coils measure the deceleration. The electronics unit then uses an algorithm based on the sampling time, physical parameters and gas characteristics to accurately...

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SRG-3 Spinning Rotor Vacuum Gauge System - 3

Measuring Range Accuracy up to 1 Pa 1% of measuring value + U; U expresses the residual drag variation 1 to 100 Pa increasing up to 10% of measured value (typical) Long-Term Stability Better than 1% per year Pressure Display Pa, mbar, or Torr; user selectable Display Format Scientific notation Analog Output 0-10 VDC, into 2kW min. load, linear or logarithmic Switching Points 2 SPDT relays, adjustable, nominal switching capacity (resistive load): 1A 30VDC, 0.5A 25VAC eff Digital Interface Measuring Flange 2¾ CF, made of stainless steel, bakeable up to 450°C (without measuring head) Stainless...

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SRG-3 Spinning Rotor Vacuum Gauge System - 4

Ordering Inf ormation Type SRG-3 Spinning Rotor Gauge SRG3-EL SRG-SH700-V3 SRG-BF-CAL SRG-BF Electronic Control Unit Measuring head with 3m long cable Ball/Flange Assembly, calibrated Ball/Flange Assembly, not calibrated The sense/drive head and ball/flange assembly of the SRG-3 are compatible with the former Spinning Rotor Gauge Types SRG-2 and SRG-2CE. Accessories 001-8483 External printer option 095-103390 Printer cable Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in U.S.A.) Web: www.mksinst.com SRG3 - 8/12 © 2009 MKS Instruments,...

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