Series 150/160 and V-100 Valves

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Series 150/160 and V-100 Valves

Product catalog summary

Features and Benefits

Available in manual, pneumatic, or electropneumatic actuation.
Offered in angle and inline body styles with port sizes from 0.75" to 6".
Compatible with ISO-KF, ISO-Universal, CF flanges, and weld stubs.
Constructed from Type 304 stainless steel for corrosion resistance.
Formed bellows made of 321 stainless steel for durability and resistance to particulate damage.
Can be installed in any position with visual valve position indication.
Optional limit switches for remote open/closed position indication.

Applications

The HPS® Series 150/160 and V-100 valves are designed for reliability in semiconductor manufacturing, plasma physics research, and nuclear accelerators. They feature interchangeable parts and are inspected at every step.

Description

The valves use formed bellows to ensure consistency and reliability, avoiding stress concentration and fatigue failure. An elastomer stem seal isolates cylinder actuating pressure from the bellows region, venting externally to prevent air leakage. The valves are designed to fail closed upon control voltage or pneumatic supply failure.

Specifications

Pressure range: 15 psig to 10^-9 Torr.
Helium leak rate: 1.0 x 10^-9 std cc/sec.
Maximum bakeout temperature: 150°C for the body, 70°C for the cylinder.
Materials: Type 304 stainless steel body, Type 321 stainless steel bellows, Viton® seals.
Pneumatic connection: 1/8” NPT-F for sizes up to 3”, 1/4” NPT-F for 4” and 6”.

Ordering Information

Valves are available in various configurations including manual, pneumatic, and electropneumatic options, with or without limit switches and solenoid valves. Part numbers and pricing vary based on configuration and size.

Specifications

The document lists various valve sizes and corresponding part numbers, including solenoid voltage and frequency options. Sizes range from 0.75” to 16.0” with part numbers like 161-0016T and 163-1080T. Solenoid voltage options include 24 VDC, 24 VAC 50-60 Hz, 208 VAC 50-60 Hz, and others.

Ordering Information

For electropneumatic valves, the complete part number includes the base part number plus the solenoid voltage and frequency extension. Sample part numbers are provided, such as 163-0016K-24VDC.

Valve Configuration

The V-100 valve series offers various configurations, including body configuration, actuator type, limit switch, seal type, and pneumatic solenoid voltage. Options include normally closed (SR), manual (MR), with or without limit switch, and seal types like Viton, Buna, Kalrez, and Chemraz.

Dimensions

Dimensions for NW 100 Angle and Inline configurations are provided in inches and millimeters.

Spare Parts

Spare parts for 150/160 manual and pneumatic valves are listed, including knob seal sets, internal assembly kits, and replacement solenoid valves. Part numbers and prices are provided for each component.

Replacement Solenoid Valves

Details for replacement solenoid valves for Series 150/160 and V-100 are included, with voltage, frequency, and wattage specifications.

Contact Information

MKS Instruments, Inc. provides contact details for their headquarters and product support, including phone numbers and email addresses.

Catalog excerpts

HIGH VACUUM BELLOWS SEALED VALVES Series 150/160 and V-100 Valves W W W . M K S I N S T . C O M Vacuum Technology

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Features and Benefits • Choice of manual, pneumatic or electropneumatic actuation • Angle and Inline body styles • Available in port sizes from .75" to 6" • Choice of ISO-KF, ISO-Universal, and CF flanges, and weld stubs • Type 304 stainless steel body insures freedom from corrosion • Formed bellows made of 321 stainless steel for a long life and resistance to particulate damage • Installs in any position • Cylinder pressure isolated from bellows, extending bellows life • Visual indication of valve position • Optional limit switches for remote indication of open and closed positions Applications...

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Specifications Specifications for Series 150/160 Valves Nominal Port Size in. (mm) Vacuum Conductance ** (ltr / sec) Cylinder Air Pressure psig (N/m2 abs) Cylinder Volume ft3 (m3) Actuation Time in Seconds opening (closing) Blow-By Pressure1 psia (N/m2 abs) Max. Internal Closing Pressure psia (N/m2 abs) Solenoid Vent Thread Angle In-Line Min. Max. .75 (16) 1.00 (25) 1.50 (40) 2.00 (50) 2.50 (63) 3.00 (80) 4.00 (100)* 6.00 (160)* 6 13 33 75 120 190 390 1040 5 11 30 60 90 160 50 (4.5 x 105) 50 (4.5 x 105) 50 (4.5 x 105) 50 (4.5 x 105) 60 (5.2 x 105) 60 (5.2 x 105) 55 (4.8 x 105) 50 (4.5 x 105)...

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Series 160 Inline Valve Ordering Information 160 Inline Valves with ISO Flanges - ISO-KF (.75” - 2.0”) / ISO-Universal (2.5”-3.0”) ISO Flange Size (Port Size) Shipping Weight lbs. (kg) Manual Pneumatic Pneumatic w/ Limit Switches Pneumatic w/ Solenoid Valve * Pneumatic w/ Solenoid Valve * & Limit Switches Part Number Price Part Number Price Part Number Price Part Number Price Part Number Price NW16 (.75”) NW25 (1.0”) NW40 (1.5”) NW50 (2.0”) NW63 (2.5”) NW80 (3.0”) 3.0 (1.4) 3.5 (1.6) 4.5 (2.0) 8.0 (3.6) 9.0 (4.1) 16.0 (7.3) 161-0016K 161-0025K 161-0040K 161-0050K 161-0063P 161-0080P 162-0016K...

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NW 100 Angle Dimensions in./(mm) NW 100 Inline Dimensions in./(mm) V-100 Valve Ordering Information V-100 Valve Ordering Information Body Configuration V-100-XX Actuator Type -XR Limit Switch -X Seal Type X Pneumatic Solenoid Voltage -XXX Select 1 Price Select 1 Price Select 1 Price Select 1 Price Select 1 Price or leave blank V-100-AM MF 100 Angle V-100-IM MF 100 Inline V-100-AC CF 6” Angle V-100-IC CF 6” Inline V-100-AK KF 100 Angle V-100-IK KF 100 Inline V-100-AT 4” Tube Angle V-100-IT 4” Tube Inline SR Normally Closed MR Manual L w/ Limit Switch N w/o Limit Switch V Viton® B Buna K Kalrez...

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Due to continuous development, specifications and prices are subject to change without notice. Copyright © 2006 by MKS Instruments, Inc. All rights reserved. HPS® is a registered trademark of MKS Instruments, Inc. MKS Vacuum Technology HPS® Products 5330 Sterling Drive Boulder, CO 80301 Tel: (303) 449.9861 Tel: (800) 345.1967 (in USA) Bulletin 01/08 - 150/160 Valves © 2008 MKS Instruments, Inc. All rights reserved. MKS Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: (978) 645.5500 Tel: (800) 227.8766 (in USA) Web: www.mksinst.com Email: [email protected] Ordering Information...

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