Series 150/160 and V-100 Valves
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HIGH VACUUM BELLOWS SEALED VALVES Series 150/160 and V-100 Valves W W W . M K S I N S T . C O M Vacuum Technology

Features and Benefits • Choice of manual, pneumatic or electropneumatic actuation • Angle and Inline body styles • Available in port sizes from .75" to 6" • Choice of ISO-KF, ISO-Universal, and CF flanges, and weld stubs • Type 304 stainless steel body insures freedom from corrosion • Formed bellows made of 321 stainless steel for a long life and resistance to particulate damage • Installs in any position • Cylinder pressure isolated from bellows, extending bellows life • Visual indication of valve position • Optional limit switches for remote indication of open and closed positions...

Specifications Specifications for Series 150/160 Valves Nominal Port Size in. (mm) Vacuum Conductance ** (ltr / sec) Cylinder Air Pressure psig (N/m2 abs) Cylinder Volume ft3 (m3) Actuation Time in Seconds opening (closing) Blow-By Pressure1 psia (N/m2 abs) Max. Internal Closing Pressure psia (N/m2 abs) Solenoid Vent Thread Angle In-Line Min. Max. .75 (16) 1.00 (25) 1.50 (40) 2.00 (50) 2.50 (63) 3.00 (80) 4.00 (100)* 6.00 (160)* 6 13 33 75 120 190 390 1040 5 11 30 60 90 160 50 (4.5 x 105) 50 (4.5 x 105) 50 (4.5 x 105) 50 (4.5 x 105) 60 (5.2 x 105) 60 (5.2 x 105) 55 (4.8 x 105) 50 (4.5 x...

Series 160 Inline Valve Ordering Information 160 Inline Valves with ISO Flanges - ISO-KF (.75” - 2.0”) / ISO-Universal (2.5”-3.0”) ISO Flange Size (Port Size) Shipping Weight lbs. (kg) Manual Pneumatic Pneumatic w/ Limit Switches Pneumatic w/ Solenoid Valve * Pneumatic w/ Solenoid Valve * & Limit Switches Part Number Price Part Number Price Part Number Price Part Number Price Part Number Price NW16 (.75”) NW25 (1.0”) NW40 (1.5”) NW50 (2.0”) NW63 (2.5”) NW80 (3.0”) 3.0 (1.4) 3.5 (1.6) 4.5 (2.0) 8.0 (3.6) 9.0 (4.1) 16.0 (7.3) 161-0016K 161-0025K 161-0040K 161-0050K 161-0063P 161-0080P...

NW 100 Angle Dimensions in./(mm) NW 100 Inline Dimensions in./(mm) V-100 Valve Ordering Information V-100 Valve Ordering Information Body Configuration V-100-XX Actuator Type -XR Limit Switch -X Seal Type X Pneumatic Solenoid Voltage -XXX Select 1 Price Select 1 Price Select 1 Price Select 1 Price Select 1 Price or leave blank V-100-AM MF 100 Angle V-100-IM MF 100 Inline V-100-AC CF 6” Angle V-100-IC CF 6” Inline V-100-AK KF 100 Angle V-100-IK KF 100 Inline V-100-AT 4” Tube Angle V-100-IT 4” Tube Inline SR Normally Closed MR Manual L w/ Limit Switch N w/o Limit Switch V Viton® B Buna K...

Due to continuous development, specifications and prices are subject to change without notice. Copyright © 2006 by MKS Instruments, Inc. All rights reserved. HPS® is a registered trademark of MKS Instruments, Inc. MKS Vacuum Technology HPS® Products 5330 Sterling Drive Boulder, CO 80301 Tel: (303) 449.9861 Tel: (800) 345.1967 (in USA) Bulletin 01/08 - 150/160 Valves © 2008 MKS Instruments, Inc. All rights reserved. MKS Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: (978) 645.5500 Tel: (800) 227.8766 (in USA) Web: www.mksinst.com Email: mks@mksinst.com Ordering...