ProcessSolutionsT1

Product catalog summary

Innovative Process Solutions
MKS Instruments provides a range of innovative process solutions, focusing on stainless steel vacuum fittings, custom manifolds, heaters, custom product integration, process traps, and effluent management subsystems.

Stainless Steel Vacuum Fittings
MKS offers a variety of fittings and components such as tees, crosses, elbows, tubes, flanges, end caps, reducers, and seals. These are available in Series 23 ButtWeld, Series 31 ISO-KF, Series 76 ISO-Universal, and Series 88 CF components.

Custom Manifolds
MKS specializes in manufacturing manifold assemblies tailored to customer specifications, emphasizing quality, cleanliness, and leak integrity. Components are cleaned using an automated process adhering to strict industry standards.

Heaters
MKS provides heater jackets for stainless steel tubing, components, and valves, optimizing thermal transfer while keeping the exterior cool. Two heater technologies are available: silicon molded heaters and fiberglass mantle heaters, supporting temperatures from ambient to over 250°C. Options include digital control and parameter communication.

Custom Product Integration
MKS manufactures and customizes precision mechanical assemblies, including gauge trees and vacuum forelines. These systems, featuring isolation valves, stainless steel manifolds, vacuum components, and heater jackets, are designed to enhance vacuum system performance and cost-effectiveness.

Custom Process Traps and Virtual Wall™
MKS offers patented traps designed for industrial and semiconductor processes, efficiently containing byproducts and protecting equipment. The Virtual Wall™ creates a nitrogen boundary layer in vacuum lines, improving uptime and reducing maintenance.

Effluent Management Subsystems™
These subsystems are tailored for specific processes, combining heating, traps, and valves to prevent byproduct clogging. MKS provides solutions for corrosive processes like LPCVD-Silicon Nitride and Metal Etch, leveraging detailed process understanding and customizable components.

Biopharmaceutical Solutions
MKS offers biopharmaceutical products with superior cleanability and thermal control, including stainless steel filter housings and NEMA-rated heaters. Custom solutions are available, adhering to ASME standards.

Contact Information
MKS Process Solutions is located in Boulder, CO, with global headquarters in Andover, MA. Contact details and further information are available on their website.

Catalog excerpts

Process Solutions Process Solutions CUSTOM PRODUCT INTEGRATION STAINLESS STEEL VACUUM FITTINGS MOLDED AND MANTLE HEATERS EFFLUENT MANAGEMENT SUBSYSTEMS™

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Stainless Steel Vacuum Fittings — MKS offers a wide variety of fittings and components including tees, crosses, elbows, tubes, flanges, end caps, reducers, and seals in standard sizes and configurations. They are offered in Series 23 ButtWeld, Series 31 ISO-KF, Series 76 ISO-Universal, and Series 88 CF components. Custom Product Integration — MKS specializes in the manufacture and customization of precision mechanical assemblies that include gauge trees and complete vacuum forelines. These integrated systems, comprised of isolation valves, stainless steel manifolds, vacuum components and heater...

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Custom Process Traps and Virtual Wall™ — MKS’ patented line of traps are highly efficient and compact. Designed for specific processes in industrial and semiconductor manufacturing, byproducts are efficiently contained, protecting the process chamber, pumps, gauging, and anything that can be damaged or negatively impacted by process chemistries. When used in conjunction with our heated products, the results include increased uptime, longer pump life, safer cleaning and byproduct disposal, and higher process yields. MKS’ unique Virtual Wall™ is a patented device that creates a nitrogen boundary...

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MKS Process Solutions 5330 Sterling Drive Boulder, CO 80301 Tel: 303.449.9861 800.345.1967 (in USA) Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 800.227.8766 (in USA) Web: www.mksinst.com Process Solutions Line Card - 2/2015 Specifications are subject to change without notice. ©2015 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. mksinst™, Effluent Management Subsystems™ and Virtual Wall™ are trademarks of MKS Instruments, Inc.

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