Process Solutions Process Solutions CUSTOM PRODUCT INTEGRATION STAINLESS STEEL VACUUM FITTINGS MOLDED AND MANTLE HEATERS EFFLUENT MANAGEMENT SUBSYSTEMS™

Stainless Steel Vacuum Fittings — MKS offers a wide variety of fittings and components including tees, crosses, elbows, tubes, flanges, end caps, reducers, and seals in standard sizes and configurations. They are offered in Series 23 ButtWeld, Series 31 ISO-KF, Series 76 ISO-Universal, and Series 88 CF components. Custom Product Integration — MKS specializes in the manufacture and customization of precision mechanical assemblies that include gauge trees and complete vacuum forelines. These integrated systems, comprised of isolation valves, stainless steel manifolds, vacuum components and heater...

Custom Process Traps and Virtual Wall™ — MKS’ patented line of traps are highly efficient and compact. Designed for specific processes in industrial and semiconductor manufacturing, byproducts are efficiently contained, protecting the process chamber, pumps, gauging, and anything that can be damaged or negatively impacted by process chemistries. When used in conjunction with our heated products, the results include increased uptime, longer pump life, safer cleaning and byproduct disposal, and higher process yields. MKS’ unique Virtual Wall™ is a patented device that creates a nitrogen boundary...

MKS Process Solutions 5330 Sterling Drive Boulder, CO 80301 Tel: 303.449.9861 800.345.1967 (in USA) Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 800.227.8766 (in USA) Web: www.mksinst.com Process Solutions Line Card - 2/2015 Specifications are subject to change without notice. ©2015 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. mksinst™, Effluent Management Subsystems™ and Virtual Wall™ are trademarks of MKS Instruments, Inc.