PBMS2
4Pages

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Catalog excerpts

PBMS2 - 1

Calibration & Service Type PBMS2B TWO-CHANNEL PORTABLE BARATRON® MEASUREMENT SYSTEM Designed with the cleanroom in mind, the PBMS2B is a portable two-channel pressure standard that is designed for in situ applications. Equally at home on the bench as on the production floor, the unit may be used for any pressure measurement application in the range of 10-5 to 1000 Torr. The system includes one or two Type 627B Baratron capacitance manometers, a Type PDR2000 display and an uninterruptable power supply all housed in a rugged wheeled caddy with an extendible handle for easy towing. The caddy also includes an integral tilt stand which, when extended, places the unit at an angle of 15 degrees from the vertical, thereby improving visibility of the display when the unit is on the floor. Features & Benefits • Provides for in situ verification of process gauge accuracy and tool-to-tool consistency — Reduces downtime caused by removing the process gauge for calibration — Eliminates the unnecessary replacement of properly functioning instruments — Provides a diagnostic tool for trouble- shooting • Select from 8 ranges: 0.02 to 1000 Torr full scale • Temperature controlled Type 627B Baratron® Capacitance Manometer provides stable measurements at 0.12% to 0.25% of Reading accuracy • Inconel® and stainless steel wetted surfaces permit use with many corrosive gases • Second channel may be used for another standard manometer or may be used to monitor the device under test • Components are packaged in a convenient wheeled caddy which is readily moved about the production facility • No warm up delays: an uninterruptable power supply maintains power to the manometer for 1 hour during transit • The transducer is traceable to NIST which assists in compliance with government and industry regulations such as ISO9000 • Components are CE compliant

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PBMS2 - 2

Typical Application The illustration to the right (Figure 1) shows a typical set up for process set point verification. The PBMS2B’s Type 627 reference standard is removed from its storage drawer and placed in close proximity to the process tool’s manometer port. This connection is facilitated by using a combination isolation valve such as the HPS® IDA™ valve. With the transfer standard connected to the IDA valve’s access port via a short length of bellows tubing, the transfer standard can be used to verify the accuracy of the process gauge and check system set point pressures. Figure 1 —...

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PBMS2 - 3

Specifications Reference Manometer MKS Type 627B Absolute Sensor (NIST traceable), see 600 Series Selection Guide for other specifications Baratron® Transducer Accuracy Standard: ± 0.12% of Reading (all ranges except 0.15% for 0.05 and 0.1 Torr, ±0.25% for 0.02 (non-linearity, hysteresis, and Torr) non-repeatability) Resolution (of F.S.) 1 x 10-4 Fittings ½” tubulation, NW16KF or 8 VCR®, female Operating Temperature Range 15° to 40°C Readout Electronics MKS Type PDR2000, 4½-digit LCD Power Required 110 VAC, 60Hz; 220 VAC, 50Hz; 100 VAC, 50/60 Hz; 3A Warm-up Time/Start Time 4 hours. However,...

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PBMS2 - 4

Ordering Inf ormation Ordering Code Example: PBMS2B0101AU2 Type PBMS2B PBMS2B Portable Baratron Measurement System Range, Manometer 2 0.02 mmHg 0.05 0.1 1 10 100 1000 None Fittings ½” Diameter tubulation 8 VCR female NW16KF Input Power Standard USA & Canada input power 110 VAC, 60 Hz 220 VAC, 50 Hz 100 VAC, 50/60 Hz Interface RS-232 (standard) Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in U.S.A.) Web: www.mksinst.com PBMS2B - 8/12 © 2003 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US and other...

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