P98-DS
4Pages

Flow Measurement & Control MFC - P9B PRESSURE INSENSITIVE, MULTI-GAS/MULTI-RANGE MASS FLOW CONTROLLER FOR FAST AND ACCURATE CONTROL OF CRITICAL PROCESS GASES The MKS, model P9B MFC, is the next generation of MKS pressure insensitive, multigas/multi-range MFC for critical process gas flow control. The device uses the latest in electronics and valve components enabling it to meet the most critical of process gas flow control requirements. The performance capabilities of the P9B are quickly apparent where short process steps are required given the sub 750 millisecond control times and accuracy to within 1% of setpoint. This performance extends over the range of process gases, whether “light” gases such as helium or “heavy” gases like SF6. The P9B is a true multi-range/multi-gas MFC that enables the user to have confidence in this device’s capability and minimize MFC inventory requirements. Utilization of the multi-gas/multi-range capability is made simple through the device’s embedded software and standard Ethernet interface that requires no special software, only a standard web browser and a PC. Already stored on the device are critical gas parameters for most of the gases in use today by the semiconductor industry. It is a simple matter of selecting the gas and specifying the range to configure the device. Through this interface the user can also perform device monitoring diagnostics while the device is operating. Features & Benefits Superior Perf ormance • Fast response to setpoint reduces flow stabilization time for short process steps and process control • Tightly controlled flow accuracy of process gas enables improved chamber process matching • Insensitive to upstream and downstream pressure disturbances — Accurate flow control without the need for additional dedicated pressure regulators Reduces Overall Costs • Reduces MFC inventory through its multi-gas/multi-range capability Accurate flow control over a wide dynamic range, even when down ranged, reduces need for an additional low range MFC Easy to Integrate and Operate • Embedded configuration and diagnostics software that allows the user to check MFC functionality without device removal from the tool • Uses a standard web browser; no special software required • Easy viewing of flow rate, gas type and full scale flow with its bright, self orienting LED display

Performance Full Scale Flow Ranges (N2 equivalent) 5 - 50000 sccm (consult factory for available flow ranges) Maximum Inlet Pressure 150 psig (cannot exceed pressure differential requirement across MFC) Normal Operating Pressure Differential (N2 F.S.) 10 to 5000 sccm; 10 to 40 psid (with atmospheric pressure at the MFC outlet) 10000 to 20000 sccm; 15 to 40 psid 30000 to 50000 sccm; 25 to 40 psid Proof Pressure 1000 psig Burst Pressure 1500 psig Control Range 2% to 100% of F.S. (range on mech.) Typical Accuracy ± 1% of setpoint for 20 to 100% F.S. ± 0.2% of F.S. for 2 to 20% F.S....

Specifications (cont’d) Digital I/O CE Compliant to EMC Directive 2004/108/EC Digital I/O Input Power Required +11 to +25 VDC per DeviceNet specification (@ <3.5 watts) Data Rate Switch 4 positions: 125, 250, 500K (Default), PGM (programmable over the network) Data Rate/Network Length Data Rate (User Selectable) 125 Kbps, 500 meters (1,640 feet) 250 Kbps, 250 meters (820 feet) 500 Kbps, 100 meters (328 feet) Data Rate (User Selectable) 9.6 Kbps, 1200 meters (4,000 feet) 19.2 Kbps, 1200 meters (4,000 feet) 38.4 Kbps, 1200 meters (4,000 feet) 2 switches, 10 positions; 0,0 to 6,3 are 2...

Ordering Inf ormation Ordering Code Example: P9B013502C6T0AA Code Configuration P9B Type MFC Mass Flow Controller (Pressure insensitive, multigas, multi-range), P9B P9B Gas (Per Semi Standard E52-0703) For example: 013 = Nitrogen = N2 013 013 029 = Ammonia = NH3 029 110 = Sulfur Hexafluoride = SF6 110 Flow Range Full Scale* 5 sccm 10 sccm 20 sccm 50 sccm 100 sccm 200 sccm 500 sccm 1000 sccm 2000 sccm 5000 sccm 10000 sccm 20000 sccm 30000 sccm 50000 sccm Fittings (compatible with) Swagelok 4 VCR C-seal (1.125”) W-seal (1.125”) W-seal (1.5”) Connector DeviceNet RS485 (uses 9 pin connector) 15...