Catalogs >
MKS Instruments >
MultiTherm 1000

MultiTherm 1000
1 / 2Pages

Catalog excerpts

Control Systems MultiTherm 1000 TEMPERATURE CONTROLLER Introducing the MultiTherm 1000 for multi-zone temperature control applications. MultiTherm 1000 is the first in the MultiTherm line and latest addition to the MKS control platform family. The controller is offered with ModbusTCP and EtherCAT® connectivity for high-speed data exchange with seamless integration into an EtherCAT system. The MultiTherm 1000 features 16 precision sensor channels accepting RTDs and thermocouples, and 16 output channels with built-in solid-state relays. The output for each zone can be controlled independently using PID or modeled based control for precision and very dynamic responses. Each output channel is supplemented with heater diagnostics to detect heater failures or degradation to reduce possibility of costly process damage. Safety interlocks at HW & SW levels allow integration of over-temperature and EMO switches into the system. The heater power routing with internal fusing is a cost saving feature that eliminates the need for external hardware. The MultiTherm 1000 features front panel LED indicators for individual sensor channels, outputs, Interlocks and alarms. The unit is offered in a compact, DIN rail mountable package with quiet fanless operation. The MultiTherm 1000 provides an all-in-one solution for multizone temperature control while minimizing system cost, complexity and space. Features & Benefits • 16 sensor input channels RTDs and thermocouples • 16 heater output channels with built-in SSRs • Optional PWM output for external SSRs • EtherCAT and Modbus TCP connectivity • PID control with auto-tuning, MBC (optional) • Sensor and heater diagnostics • Front panel LED’s for sensors, heaters and diagnostics • Safety interlocks - HW and SW based • Quiet fanless operation • Metal casing with DIN rail mount ability • Semiconductors, Solar, and LED/MOCVD manufacturing tools • Furnaces and environmental chambers requiring multi-zone control • Plastic injection molding and extrusion systems • Medical, Biomed, and Life Sciences • Packaging, Food and Beverage

Open the catalog to page 1

Specifications and Ordering Inf ormation EtherCAT Slave – Supporting PDO and Mailbox (CoE and FoE) TCP/IP – Supporting ModbusTCP Temperature Range Input Channels Output Channels 16 SSR output channels supporting up to 2A built-in Input Accuracy ± 0.8°C for T/Cs - typical excluding sensor accuracy ± 0.1°C for RTDs - typical excluding sensor accuracy Sensor Acquisition Time Temperature Resolution Input Repeatability Better than 0.1°C depending on sensor type and range Output Power 2A @ 110VAC or 220VAC using internal SSRs Higher power handling using optional external drivers Heater Control...

Open the catalog to page 2