MultiTherm 1000

MultiTherm 1000

MultiTherm 1000

Product catalog summary
Introduction
The MultiTherm 1000 is a multi-zone temperature controller designed for applications requiring precise temperature management. It is part of the MKS control platform family and supports ModbusTCP and EtherCAT® for high-speed data exchange.

Features & Benefits
  • 16 sensor input channels compatible with RTDs and thermocouples.
  • 16 heater output channels with built-in solid-state relays (SSRs).
  • Optional PWM output for external SSRs.
  • Connectivity via EtherCAT and Modbus TCP.
  • PID control with auto-tuning and optional Model Based Control (MBC).
  • Diagnostics for sensors and heaters.
  • Front panel LEDs for status indication.
  • Safety interlocks at hardware and software levels.
  • Quiet, fanless operation with a compact, DIN rail mountable design.

Applications
  • Semiconductor, solar, and LED/MOCVD manufacturing tools.
  • Furnaces and environmental chambers requiring multi-zone control.
  • Plastic injection molding and extrusion systems.
  • Medical, biomedical, and life sciences applications.
  • Packaging, food, and beverage industries.

Specifications
  • Connectivity: EtherCAT Slave and ModbusTCP.
  • Temperature Range: 0 - 850°C.
  • Input Channels: 16, supporting T/Cs (J & K) and RTDs (PT100, 3-wire).
  • Output Channels: 16 SSR output channels supporting up to 2A.
  • Input Accuracy: ± 0.8°C for T/Cs, ± 0.1°C for RTDs.
  • Sensor Acquisition Time: Configurable between 10 – 625 ms.
  • Temperature Resolution: 0.01°C.
  • Output Power: 2A @ 110VAC or 220VAC using internal SSRs.
  • Heater Control Method: Zero Crossing & Phase Fire.
  • Isolation: 1.5kV rms.
  • Safety Interlocks: User-defined inputs and programmable software interlock.
  • Calibration Intervals: 12 months typical.
  • Environmental: Operating temperature 0 to +50°C, 0-85% RH.
  • Mounting: DIN rail and wall mount options.
  • Compliance: RoHS, CE.
  • Dimensions: 4.72''H x 6.5''W x 8.2''D.

Ordering Information
  • Part Number: AS01170G-01.
  • Consult factory for sensor & heater connectors, MBC control software options, and calibration service.

Contact Information
  • Global Headquarters: 2 Tech Drive, Suite 201, Andover, MA 01810.
  • Tel: 978.645.5500 / 800.227.8766 (USA).
  • Website: www.mksinst.com.

MKS products are subject to US Export Regulations. Specifications may change without notice.
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Catalog excerpts

MultiTherm 1000-1

Control Systems MultiTherm 1000 TEMPERATURE CONTROLLER Introducing the MultiTherm 1000 for multi-zone temperature control applications. MultiTherm 1000 is the first in the MultiTherm line and latest addition to the MKS control platform family. The controller is offered with ModbusTCP and EtherCAT® connectivity for high-speed data exchange with seamless integration into an EtherCAT system. The MultiTherm 1000 features 16 precision sensor channels accepting RTDs and thermocouples, and 16 output channels with built-in solid-state relays. The output for each zone can be controlled independently using PID or modeled based control for precision and very dynamic responses. Each output channel is supplemented with heater diagnostics to detect heater failures or degradation to reduce possibility of costly process damage. Safety interlocks at HW & SW levels allow integration of over-temperature and EMO switches into the system. The heater power routing with internal fusing is a cost saving feature that eliminates the need for external hardware. The MultiTherm 1000 features front panel LED indicators for individual sensor channels, outputs, Interlocks and alarms. The unit is offered in a compact, DIN rail mountable package with quiet fanless operation. The MultiTherm 1000 provides an all-in-one solution for multizone temperature control while minimizing system cost, complexity and space. Features & Benefits • 16 sensor input channels RTDs and thermocouples • 16 heater output channels with built-in SSRs • Optional PWM output for external SSRs • EtherCAT and Modbus TCP connectivity • PID control with auto-tuning, MBC (optional) • Sensor and heater diagnostics • Front panel LED’s for sensors, heaters and diagnostics • Safety interlocks - HW and SW based • Quiet fanless operation • Metal casing with DIN rail mount ability • Semiconductors, Solar, and LED/MOCVD manufacturing tools • Furnaces and environmental chambers requiring multi-zone control • Plastic injection molding and extrusion systems • Medical, Biomed, and Life Sciences • Packaging, Food and Beverage

 Open the catalog to page 1
MultiTherm 1000-2

Specifications and Ordering Inf ormation EtherCAT Slave – Supporting PDO and Mailbox (CoE and FoE) TCP/IP – Supporting ModbusTCP Temperature Range Input Channels Output Channels 16 SSR output channels supporting up to 2A built-in Input Accuracy ± 0.8°C for T/Cs - typical excluding sensor accuracy ± 0.1°C for RTDs - typical excluding sensor accuracy Sensor Acquisition Time Temperature Resolution Input Repeatability Better than 0.1°C depending on sensor type and range Output Power 2A @ 110VAC or 220VAC using internal SSRs Higher power handling using optional external drivers Heater Control Method...

 Open the catalog to page 2

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