MKS Calibration Product Line

Product catalog summary

Calibration Standards
There are two main types of calibration standards: Primary and Transfer Standards. Primary standards use fundamental components like mass, length, and time, and are typically maintained by metrology labs. Transfer standards are secondary devices traceable to national laboratories like NIST and are used in both lab and production settings.

CalStand® Products
MKS Instruments offers products and services for implementing quality calibration programs, including in situ calibration instruments. Options include laboratory-based or portable equipment, or services from MKS Calibration Service Centers.

Portable Pressure Verifier
The PBTS1A Portable Baratron® Transfer Standard is a high-accuracy pressure standard for in situ applications, suitable for pressure measurements from 10^-5 to 25,000 Torr. It includes a pressure sensor, signal conditioner/display, and power supply in a portable caddy.

Portable Vacuum Calibrator
The PVS6E Series offers manual and semi-automatic calibrators for NIST-traceable calibrations over 10^-5 to 1000 mmHg. It can calibrate various gauges and transmitters, including capacitance manometers and ionization gauges.

High Vacuum Transfer Standard
The Spinning Rotor Gauge (SRG) is used for calibrating high-vacuum gauge sensors with an accuracy of 1% over 1 x 10^-2 Torr to 5 x 10^-7 Torr. It includes an electronics control unit with RS232 and USB interfaces.

In Situ Flow Verification
The Tru-Flo® Mass Flow Verifier provides in situ verification of mass flow controller performance, measuring pressure rate-of-rise to determine mass flow within ±1% accuracy. The GBROR® In Situ Flow Verifier enhances throughput by diagnosing MFC performance during maintenance.

Contact Information
MKS Calibration & Service is located in Wilmington, MA, with global headquarters in Andover, MA. Contact numbers and the website are provided for further inquiries.

Catalog excerpts

Calibration & Service CALIBRATION STANDARDS PRESSURE AND FLOW RATE CALIBRATION

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Calibration Standards — There are two different types of calibration standards; a Primary Standard and a Transfer Standard. A primary standard measurement is made using fundamental components (mass, length, time, etc.). Primary standard calibration devices are typically used and maintained by the metrology or calibration laboratory within an organization. The lab can then either directly calibrate the production instruments or calibrate instruments that will be used as transfer standards for calibration of the production instruments. A transfer standard is a secondary device that is traceable...

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Portable Vacuum Calibrator — The PVS6E Series is a family of manual and semi-automatic, portable calibrators for NIST-traceable calibrations over pressure ranges from 10-5 to 1000 mmHg. The PVS6E can be used to calibrate capacitance manometers, thermocouple gauges, Pirani gauges, convection-enhanced Pirani gauges, transmitters and mechanical/dial gauges. Hot or cold cathode ionization gauges can be calibrated over the upper end of their range. High Vacuum Transfer Standard — The Spinning Rotor Gauge (SRG) is a high-vacuum gauge commonly used for calibration and metrology of other high-vacuum...

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MKS Calibration & Service 90 Industrial Way Wilmington, MA 01887-4610 Tel: 978.284.4000 Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 800.227.8766 (in USA) Web: www.mksinst.com Cal&Service Line Card - 1/2013 Specifications are subject to change without notice. © 2013 MKS Instruments, Inc. All rights reserved. MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. mksinst™ is a trademark and Baratron®, CalStand®, GBROR®, and Tru-Flo® are registered trademarks of MKS Instruments, Inc. DeviceNet™ is a...

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