M100
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Flow Measurement & Control ECONOMICAL, RANGE ADJUSTABLE MASS-FLO® CONTROLLER/METER The economical M100B Mass Flow Controller and M10MB Mass Flow Meter are designed to control and measure gas flows in a wide variety of analytical, experimental and industrial applications. The instruments are available with Full Scale ranges of 10 sccm to 20 slm (N2 equivalent). The M100B can also be used as a pressure controller when connected to an MKS pressure transducer. The M100B and M10MB utilize industry standard 3-inch footprint and comes with a variety of fittings enabling the instruments to drop into existing gas lines without modification. The instruments are constructed of 316L stainless steel and offer a choice of elastomer seals for use with a wide variety of gases. Features & Benefits Accurate • Patented1 bypass and electronics provide excellent linearity over a wide range of operating conditions • Typical 1% F.S. accuracy for flows from 10 sccm to 5 slm Robust • Electronics design MTBF of over 100 years and STRIFE tested to ensure long term performance • Elastomer sealed, 316L stainless steel Compatible • Standard three inch footprint with a selection of fittings for ease of installation • Class 100 cleanroom manufactured and tested • CE Mark compliant — meets requirements for European Union • Compatible with earlier MKS MFC’s and power supply readout modules

A robust 15-pin “D” electrical connector is provided with MKS standard pinouts. Power required for the M100B controller is minimal: the nominal ±15 VDC consumes only 100 mA during operation. The M10MB meter uses even less. These instruments are compatible with MKS power supply and display electronics. The MKS Type M100B utilizes the latest thermal sensor design for mass flow measurement with a unique and patented re-rangeable bypass. Both the M100B and M10MB can often be re-ranged through simple changing of the sensor section bypass that is accessible through the inlet of the device....

Full Scale Ranges (N2 equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential (with atmospheric pressure at the MFC outlet) 10 to 5000 sccm 10 to 40 psid 10000 to 20000 sccm 15 to 40 psid Control Range 2% to 100% of F.S. Accuracy (Calibration gas, including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C) 5000 sccm 10 to ± 1% of F.S. 10000 to 20000 sccm ± 1.5% of F.S. Repeatability ± 0.2% of F.S. Resolution 0.1% of F.S. Temperature Coefficients Zero < 0.10% of F.S./°C...

Ordering Inf ormation Ordering Code Example: M100B00411CR1BV SEMI Gas Codes Semi Gas Code Flow Rate Carbon Dioxide Sulfur HexaFluoride SPF: Consult factory to obtain part number for devices with maximum full scale flow rate. Model Code Controller Meter Gas To Be Calibrated For: (SEMI Gas Code) See table for Helium Argon Hydrogen Nitrogen Oxygen Flow Rate To Be Calibrated for SCCM (Maximum 50000 SCCM N2 Equivalent) 10 11C 20 21C 50 51C 100 12C 200 22C 11C 500 52C 1000 13C 2000 23C 5000 53C 10000 14C 20000 24C Fittings (compatible with) Swagelok 4 VCR male R Swagelok 4 VCO male G 1/4”...