GBROR®
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GAS BOX RATE-OF-RISE IN SITU FLOW VERIFIER W W W . M K S I N S T . C O M Flow Measurement & Control

Description Shutting down a process tool to open a gas line to replace a suspect flow controller not only wastes valuable production time, but increases the risk of gas line contamination. More often than not, no trouble is found with the flow controller — the actual problem is determined to be elsewhere. Tool cost of ownership is improved by having a way to validate the integrity of the MFC on the tool in situ, eliminating loss of valuable process time. Some process tools provide ways to validate MFC performance either by the use of a “golden MFC”, or a rate-of-rise technique that requires...

Dimensional Drawing (cont’d) Dimensional Drawing — GBR1B (50 slm F.S.) Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

Dimensional Drawings Dimensional Drawing — GBR2B (2000 sccm F.S.) Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawing — GBR1B (2000 sccm F.S.) Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).

The Electronic Controller The GBROR half-rack controller can be operated locally using the buttons on the faceplate or can be completely operated by a host controller through the RS-232 communications interface. Local faceplate controls can also be locked out using a key switch to prohibit changes after initial setup. This controller has software/firmware to support the pressure and temperature measurements, operate the pneumatic shut-off valves, and the following operation controls: Verify Flow Rate — reports the gas flow in sccm of actual gas used. External Volume Calculation — measures...

The Gas Stick The GBROR gas stick is specially designed with accuracy, cleanliness and compact size in mind. In addition to having a small gas chamber, solenoid valves and VCR fittings, the GBROR gas stick contains a specially-designed (patent pending) MKS Baratron® capacitance manometer. The Baratron capacitance manometer’s proven accuracy and stability enables this ROR measurement to deliver better than 1.0% of reading accuracy. The diagram below illustrates the basic principle of the pressure rate-of-rise method. Flow (in units of standard condition volumetric flow such as sccm) can be...

Specifications Range 2 sccm to 2000 sccm 100 sccm to 20 slm 100 sccm to 50 slm Measurement Accuracy Time to Verify (typical) Power Input I/O Connections GBR1B: Transducer (female) 15-pin Type “D” Solenoid (female) 37-pin Type “D” RS232 Communications (male) Type “D” 9-pin GBR2B: Transducer (female) 15-pin Type “D” Solenoid (female) 37-pin Type “D” RS232 Communications (male) 9-pin Type “D” Dimensions Electronic Controller 9.0” (228.6 mm) L x 9.45” (240 mm) W x 3.47” (88.1 mm) H Mechanical Assembly See outline drawings Wetted Materials Inconel®, 316L S.S., Kel-F®, Elgiloy® Surface Finish...

Ordering Inf ormation Ordering Code Example: GBR1B23CR1 Gas Box Rate-of-Rise without enclosure Flow Range Full Scale (sccm of N2) 2 sccm to 2000 sccm 100 sccm to 20 slm 100 sccm to 50 slm Fittings (inlet/outlet) ¼” VCR male/¼” VCR female (2 sccm to 2000 sccm) ¼” VCR male/½” VCR female (100 sccm to 20 slm) ½” VCR male/½” VCR female (100 sccm to 50 slm) Controller Type Half-rack display (2 slm & 20 slm) Half-rack display (50 slm) Cables: (2 required for operation) When ordering the GBROR, it is necessary to order interface cables. For cable lengths and connector options, please contact...