Gauge Controller Selection Guide

Product catalog summary

Introduction
MKS Instruments offers a variety of gauge controllers that integrate multiple sensor technologies, suitable for applications in research, semiconductor manufacturing, vacuum coating systems, high energy physics, and analytical systems. These controllers cover a measurement range from 10^-11 to 10,000 Torr.

Multi-Channel Gauge Controllers

Series 937A Combination Gauge Controller: Operates up to five sensors simultaneously, supporting cold cathode, Pirani, thermocouple, Baratron, and Piezo sensors. Features include five adjustable set points and communication options like RS232, RS485, or Profibus.
Series 959 Hot Cathode Controller: Compact controller for fast pressure measurement with two adjustable set points and RS232 communication, supporting HPS Mini Ion Gauge and HPS Nude Tube sensors, measuring from 10^-2 to 10^-10 Torr.

Single Channel Gauge Controllers

Series 945 Pirani Gauge Controller: Measures from 10^-4 to 100 Torr, designed for rough to medium vacuum applications, with two adjustable set points.
Series 947 Convection-Enhanced Pirani Controller: Suitable for applications requiring accuracy above 100 Torr, with a range of 10^-3 to 10⁺³ Torr.
Series 943 Cold Cathode Gauge Controller: Ideal for high vacuum systems, providing pressure measurement from 10^-10 to 10^-2 Torr.
PDR900 Series 900 Controller: A single channel controller for Series 900 digital vacuum transducers, usable as a standalone unit or for system integration.

Controller Specifications

Series 937A: Supports multiple sensors, operates from 10^-11 to 10⁺⁴ Torr, with five set points and various communication options.
Series 959: Supports hot cathode sensors, operates from 10^-10 to 1,000 Torr, with two set points and RS232 communication.
Series 943, 945, 947: Each supports specific sensors with distinct measurement ranges and set point capabilities.

Sensors Specifications

Cold Cathode: Measurement range from 10^-11 to 10^-2 Torr, suitable for ultra-high vacuum applications.
Pirani and Convection Pirani: Cover ranges from 10^-4 Torr to atmospheric pressure, with enhanced accuracy for higher pressures.
Hot Cathode: Used for high vacuum measurements, compatible with Series 959 and 937A controllers.
Capacitance Manometer/Piezo: Offers precise measurements independent of gas type, used with Series 937A.

Overview
This document provides detailed specifications and ordering information for various series of controllers, sensors, and cables used in vacuum technology. It includes product codes, voltage and frequency options, measurement units, and compatibility details.

Controllers

Series 959: Hot Cathode/Pirani controllers available in Pascal units, 60 Hz.
Series 943: Controllers available in Torr, mbar, and Pascal units, with options for 50 Hz and 60 Hz, and voltage ranges of 100-120V and 220-240V.
Series 945: Digital Pirani controllers available in Torr, micron, Pascal, and mbar units, with voltage options of 120V and 220V.
Series 947: Digital Convection-Enhanced Pirani controllers available in similar units and voltage options as Series 945.

Cables

Cold Cathode Cables: Available in various lengths for 421 and 423 sensors.
Baratron Cables: Available for 626 and 722 models in different lengths.
Series 902 Cables: Transducer cables available in standard and custom lengths.
Mini Ion Gauge and Nude Tube Hot Cathode Cables: Available for Series 959 in various lengths.

Sensors

Cold Cathode Sensors: 421 and 423 models compatible with Series 937A and 943.
Pirani Sensors: Series 345 and 317 models, shielded and available with various fittings.
Nude Tube Hot Cathode and Mini Ion Gauge Sensors: Available for Series 959 with different coatings and fittings.

Ordering Information

Includes part numbers, descriptions, and pricing details for controllers, sensors, and cables.
Specific ordering codes for Baratron 722A and 626A models, detailing range, fittings, input/output, accuracy, and connector options.

Contact Information
MKS Instruments provides contact details for global headquarters and vacuum technology products division.

Catalog excerpts

- 1 - Gauge Controller Selection Guide W W W . M K S I N S T . C O M Vacuum Technology

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Multi-Channel Gauge Controllers Series 937A Combination Gauge Controller The Series 937A is a digital combination vacuum gauge system that will operate as many as five sensors simultaneously. Every controller is configured to the user's specifications regarding sensors, line voltage and frequency, units of measure and communication choice. The Series 937A combines the technologies of the cold cathode, standard Pirani, convection Pirani, thermocouple, Baratron capacitance manometer and absolute Piezo sensors to measure from ultra-high vacuum to above atmospheric pressure. Up to five independently...

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Vacuum Gauge Controllers Single Channel Gauge Controllers Series 945 Pirani Gauge Controller The Series 945 Pirani is a single-channel controller designed to be economical and user-friendly while providing fast, reliable pressure measurement. The 945 controller provides a pressure measurement range of 10-4 to 100 Torr and is ideal for rough to medium vacuum applications. Two independent, adjustable set points are standard. The 945 Pirani controller is used in conjunction with the Series 345 Pirani Sensor. The Series 345 Pirani sensor is a robust, dependable sensor with fast and stable pressure...

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Series 937A Series 959 Sensors Supported 421 & 423 Cold Cathode; 345 & 317 Pirani; 622, 626 & 722 Baratron; Series 902 Piezo 345 Pirani & 317 Convection Pirani; HPS Nude Tube (Bayard Alpert Hot Cathode); Mini Ion Gauge (Bayard Alpert Hot Cathode) Number of Channels 5 2 Measurement Range 10-11 to 10+4 Torr (dependent on sensor selection) 10-10 to 1,000 Torr (dependent on sensor selection) Set Point Range 2.0 x 10-10 to 9.5 x 10+3 Torr (dependent on sensor selection) 5.0 x 10-10 to 950 Torr (dependent on sensor selection) Operating Temperature 5° to 40° C (41° to 104°F) 5° to 40°C (41° to 104°F)...

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Sensors Specifications Cold Cathode Standard Pirani Convection Pirani Hot Cathode (Bayard Alpert) Capacitance Manometer / Piezo Sensor Models Series 421 Series 423 I-Mag® Series 345 (shielded) Series 317 (shielded) Nude Tube Mini Ion Gauge (MIG) 722 and 626 (Baratron) Series 902 (Piezo) Compatible Controllers Series 937A Series 943 Series 937A Series 959 Series 945 Series 937A Series 959 Series 947 Series 959 Series 937A Measurement Range 1.0x10-11 to 1.0x10-2 Torr 5.0x10-4 Torr to ATM 1.0x10-3 to 1.0x10+3 Torr 1.0x10-10 to 1.0x10-2 Torr Three decades of measurement below full scale Set Point...

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Controllers Series 959 Controllers 109590015 Series 959 Controller, Torr, 50 Hz, Hot Cathode Only 109590016 Series 959 Controller, Torr, 60 Hz, Hot Cathode Only 109590025 Series 959 Controller, mbar, 50 Hz, Hot Cathode Only 109590026 Series 959 Controller, mbar, 60 Hz, Hot Cathode Only 109590035 Series 959 Controller, Pascal, 50 Hz, Hot Cathode Only 109590036 Series 959 Controller, Pascal, 60 Hz, Hot Cathode Only 109590915 Series 959 Controller, Torr, 50 Hz, Hot Cathode/Pirani 109590916 Series 959 Controller, Torr, 60 Hz, Hot Cathode/Pirani 109590925 Series 959 Controller, mbar, 50 Hz, Hot Cathode/Pirani...

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Bulletin 06/07 - Gauge Controller Selection Guide © 2007 MKS Instruments All rights reserved MKS Global Headquarters 90 Industrial Way Wilmington, MA 01887 Tel: (978) 284.4000 Tel: (800) 227.8766 (in USA) Web: www.mksinst.com Email: [email protected] MKS Vacuum Technology HPS® Products 5330 Sterling Drive Boulder, CO 80301 Tel: (303) 449.9861 Tel: (800) 345.1967 (in USA) 1 VCR-compatible parts may be used. Due to continuous development, specifications and prices are subject to change without notice. HPS® and I-Mag® are registered trademarks and DualTrans™, MicroPirani™ and Quattro™ are trademarks...

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