Analog 600 Series Selection Guide BARATRON® ABSOLUTE CAPACITANCE MANOMETERS Pressure Measurement & Control W W W . M K S I N S T . C O M

• Full-scale pressure/vacuum ranges as low as 0.02 Torr (mm Hg) allow for accurate measurement of vacuum as low as 2 x 10-4 Torr (1.5 x 10-4 mbar) • All products are specified in percent of reading for best accuracy and improved process yield • Complete line of absolute manometers including products operating at internal temperatures of up to 200°C. Widest product range and applications experience available anywhere • Direct measurement of chamber total pressure independent of gas type or composition, eliminating need for lookup tables and conversion factors • Best-available long-term output...

Baratron Chart A very partial list of applications for the 600 series of products include: • All semiconductor thin-film processes such as etching and ashing, chemical vapor deposition, physical vapor deposition, oxidation, diffusion, and implantation. • Production of electronic displays such as LCDs, plasma displays, and CRTs. • Manufacturing of advanced ceramics and metals for aerospace and transportation. • Automated leak test systems for industrial and scientific use. • Sterilization and freeze-drying of biopharmaceuticals, foods, medical implants, and surgical instruments. • Analytical and...

Types 622B, 623B, and 626B Ambient-Temperature Baratrons The Types 622B, 623B, and 626B Baratrons are unheated, and thus are the most economical of all of the 600-series family of products. They are available in full-scale pressure/ vacuum ranges from 0.1 to 1000 Torr (and metric equivalents) and are suited for many industrial, electronic, and research applications. The 622B has a terminal block electrical connector without relays, the 626B uses a 15-pin D-subminiature electrical connector without relays, and the Type 623B product adds two (2) independently-adjustable trip relays to control external...

Capacitance Manometers Type 631C High Temperature Baratron The Type 631C is a high-temperature capacitance manometer, operating at either 150°C or 200°C. It was specifically designed for the most difficult semiconductor and biopharmaceutical applications known today, such as nitride CVD and DI-steam sterilization. It is completely selfcontained, requiring only ±15VDC input power and providing a 0-10VDC analog output signal that is linear with pressure. It is about 40% smaller in its physical size and draws 40% less electrical power than earlier products, making it an ideal choice to upgrade existing...

*24VDC input power available for some models; contact MKS Applications for assistance. **Not all fittings available for all pressure ranges; contact MKS Applications for assistance. Type 622B Type 623B Type 626B Type 627D Type 628D Type 629D Type 624D Ambient, Terminal Block Connector Ambient, Terminal Block Connector, Relays Ambient, 15-pin D-connector Heated to 45oC, 15-pin D-connector Heated to 100oC, 15-pin D-connector 45oC or 100oC, 9-pin D-connector Heated to 45oC, 15-pin D-connector, Relays Full Scale Pressure Ranges - Torr (mbar) 1, 2, 10, 20, 100, 500 and 1000 (1.33 to 1333) 10, 20,...

Specifications Type 625D Type 631C Type E27D Type E28D Type E29D Type D24D Type D25D Type D27D Type D28D Heated to 100oC, 15-pin D-connector, Relays 150oC or 200oC, 15-pin D-connector, Relays Optional Etch Sensor, 45oC, 15- pin D-connector Etch Sensor, 100oC, 15- pin D-connector Etch Sensor, 45oC or 100oC, 9-pin D-connector Dual Range, 45oC, 15-pin D-connector, Relays Dual Range, 100oC, 15- pin D-connector, Relays Dual Range, 45oC, 15-pin D-connector Dual Range, 100oC, 15- pin D-connector 1, 10, 20, 100, 500, 1000, 2000, 5000, 10000, 15000, and 20000 (1.33 to 26315) 1, 2, 10, 100, and 1000 (1.33...

Type 146C Multi-Gauge Controller The Type 146C vacuum gauge controller has the ability to power from one to four (4) Baratrons of different configurations via its plug-in function cards – or it can operate any combination of up to four (4) Baratrons, mass flow controllers, high-vacuum gauges, indirect vacuum gauges, and pressure control valves all from one instrument. Its large LCD display provides a high-resolution digital display of the pressure or vacuum, and it can accommodate Baratron capacitance manometers with a total current draw of up to 2.0 amps at ±15VDC input power. Two (2) electro-mechanical...

600-Series Baratron Displays and Power Supplies Power Supplies/ Digital Readouts *Subject to total power consumption of connected instrument(s) and PR4000 options Type 146C Type PR4000 Type PDR2000 Type 660B Multi-gauge controller for use in complex vacuum systems and experiments Econom ical single/dual channel digital readout Standard series two-channel digital readout Single-channel digital readout with m ultip le set poin ts Display Type Custom LED screen with multip le numeric displays Dig ital, 4½ -p lace LCD Digital, 4 -place Red LED Digital, 4½-place LED Number of Channels 1 to 4 1 Type...

Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Type 623B Type 624D and 625D Type D24D and D25D Type 622B Type 626B

Dimensional Drawings Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Type CV7627 Type 627D and 628D Type E27B and E28D Type D27D and D28D Type 629D Type E29D Type 631C

Type 660B Type PR4000 Type PDR2000 Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). FUSES 115V 1.25ASB 230V .63ASB RS232 D POWER ON OFF 1 3 2 3 1 2 EXP ZERO SPAN DUAL 5 LEAD ON 4 4 POINT SET DEGAS MODE DISPLAY 8 6 7 GAIN CANCEL OFF QUIET 0 ENTER 9 MODE CONTROL C 8.00 (203.2) 12.09 (307.1) 0.50 (12.7) 3.47 (88.1) 3.38 (85.7) 9.45 (240.0) 8.80 (223.5) 8.25 (209.6) 0.38 (9.7) 4 PLACES 0.25 (6.4) 4 PLACES ALARMS A B C D VACUUM GAUGE MEASUREMENT AND CONTROL SYSTEM TYPE 146 CHANNELS 1 2 3 4 ALARMS CHANNELS TUNING TUNING Type 146C