SPS-2600
4Pages

SPS- 2600 and 2600-PLUS Series Analytical Probe Stations Data Sheet The SPS-2600 Series is MicroXact’s premier line of probe stations designed to be flexible and easy to use. Our systems provide a level of high performance and affordability that puts these stations in a class of their own. With a variety of options available, including heated/cooled wafer chucks, standard or digital microscopes, and programmable stage indexing, the flexibility of these probe stations is nearly limitless. Features Available in range of motion of 125mm x 125mm Also available with additional pre-load slide for easy loading and unloading of wafers or samples. Precision motor control of XY stage and platen. Upgradable to include fully automated control of wafer probing (SPS 2600 PLUS) Smooth powder-coated steel platen holds up to 10 magnetic or vacuum-based positioners. High quality stereo zoom microscope with up to 200mm working distance and high-intensity LED lighting provide outstanding vision at magnifications ranging from 3.5X to 180X. Includes camera port. Isolated feed-through terminals located on both sides of station for convenient connection to micropositioners can be customized for BNC, Triax, DC pin and other types of connections. Standard boom mount assembly for full-range XYZ positioning of microscope. Available high resolution micropositioners with 80TPI screws for micron-level positioning of probes. 100mm and 125mm vacuum chucks are offered with this system. Vacuum ports adjustable for samples as small as 2.5mm. RF options available include customizable RF probes, RF biasable chuck, and shielding enclosures.

Specifications Wafer Size XY Stage Travel Resolution Platen Travel Adjustment Planarity Rigidity 12.7 mm or more Dual coarse and fine control, better than 1.5μm repeatability <12.7μm across 150 mm <50μm for 4.5 kg Chuck Vacuum Flatness Breakdown Voltage Isolation Adjustment Multi-zone vacuum +/- 13 μm At least 500 V At Least 500V At least 1GΩ 360° coarse, +/-6° fine High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X System Terminals Dimensions Weight BNC, Triax, Banana plug and other 78cm wide x80cm deep x 58cm high 85kg to 95kg depending...

Illuminator Shutter Shutter system designed for the fiber optic ring light and halogen light source. System is integrated with the software for fully automated use. Makes automated testing of photosensitive devices easy while protecting halogen sources from the wear & tear of constant on/off switching. Vibration Isolation Table For high precision testing of the smallest features, vibration isolation is a necessity. We offer a full line of vibration isolation tables which we will customize for each probe station and application. Digital Camera Both the stereo zoom and Olympus BXFM...

Sales U.S. Sales Maine, New Hampshire, Vermont, Massachusetts, Rhode Island, Connecticut, and New York ViaTec Sales and Marketing, LLC Phone: 1-617-696-4461 Fax: 1-617-696-1841 Website: www.viatescales.com E-mail: info@ViaatecSales.com Texas, Oklahoma, Kansas, Louisiana, Arkansas, and Mississippi RJI Technical Sales Website: www.rijsales.com Email: bjemison@rijsales.com Phone and fax: 1-469-656-2022x1 International Sales Russian Federation, Ukraine, Belarus, Moldova, Armenia, Azerbaijan, Kazakhstan, Kyrgyzstan, Uzbekistan, Turkmenistan, Tajikistan Energoavangard Ltd. Website:...