SPS- 2600-VAC and SPS-2800-VAC Series Vacuum Probe Stations Data Sheet The SPS-2600-VAC and SPS-2800-VAC Series are MicroXact’s vacuum probe stations designed to support motorized or semi-automatic probing of up to 100mm or up to 200mm wafers in a vacuum or controlled gas atmosphere. System and precise, cost-efficient, low noise and convenient to use. These systems are built on a vibration-compensated, versatile platform capable of being configured to handle a wide range of probing applications. Ideal for icing-free testing down to 77K or for high temperature testing of devices and components that are prone to oxidation. Features Available with standard repeatability/resolution (+/-7m /1.5m ) and high repeatability/resolution (better than 2m/100nm) in X & Y. Z repeatability/resolution: better than 2m/100nm Available with manual or motorized theta stage Available with 4 or 6 probe arms. Optionally, the probe card adapter can be selected Microscope selection include 7:1, 12.5:1 and 16:1 digital zoom microscopes BNC, Triax, DC pin and RF probe arms and probes are available. Standard boom mount assembly for full-range XYZ positioning of microscope. High resolution micropositioners for micron-level positioning of probes are standard. Isolated, grounded, coaxial or triaxial wafer chucks are available. RF options available include customizable RF probes, RF biasable chuck, and shielding enclosures. Thermal chuck systems for 77K to 680K testing are available Software-controlled pressure control is available as an option The choice of roughing, or roughing/turbo pumps is available Automation software: XactT