SPS- 1000 Analytical Probe Station for up to 150mm wafer testing Data Sheet The SPS-1000 Series adapted for up to 150mm wafer testing is a scaled down, economical version of MicroXact’s manual probe stations that still keeps all relevant specifications of the higher priced systems. Small, ergonomic, and convenient to use, this system is ideal for laboratory testing and characterization of semiconductor devices and circuits. Features Fully manual stage assembly contains precision cross roller bearings with a 100mm x 100mm or 150mm x 150mm range of motion (or larger). Additional pre-load slide for easy loading and unloading of wafers or included samples Convenient manual control of platen with coarse and fine adjustments and range of 12.7mm, 25mm or 40mm Smooth magnetic steel platen holds up to 10 magnetic or vacuum-based positioners. High quality stereo zoom microscope with up to 200mm working distance and high-intensity LED lighting provide outstanding vision at magnifications ranging from 3.5X to 180X. Included camera port Isolated feed-through terminals located on both sides of the station for convenient connection to micropositioners can be customized for BNC, Triax, DC pin, or standard RF connections. Standard boom mount assembly for full-range XYZ positioning of microscope. XY range of 50mm x 50mm (higher range available) Available high resolution micropositioners with up to 100TPI screws for micron-level positioning of probes. Vacuum chucks offered with 3-zone adjustable vacuum with large number of vacuum zones available upon request. RF options available include customizable RF probes, RF biasable chuck, and shielding enclosures.

Specifications Wafer Size Up to 150mm standard, larger capacity available XY Stage Travel Resolution 100mmx100mm or 150mmx150mm standard, larger available 3µm standard, 2 µm optional Platen Travel Adjustment Planarity Rigidity 12.7 mm or more Coarse and fine control, better than +/-1.5μm repeatability <+/-12.7μm across 150 mm, <+/-5μm across 150 mm optional <5μm for 4.5 kg Chuck Vacuum Flatness Breakdown Voltage Isolation Adjustment Fie Z adjustment Three-zone vacuum +/- 13 μm standard, down to +/- 3 μm optional At least 500 V At Least 500V At least 1GΩ 360° coarse, +/-6° fine 10mm with 1m or...