LCS- 4000 Series Analytical Probe Station With Laser Cutting System Data Sheet The LCS-4000 Probe Station with Integrated Laser Cutting System gives the user maximum flexibility in semiconductor diagnostic cutting, failure analysis, trimming, marking and topside layer removal. All of these functions can be performed on a microscopic level, all on this one system which provides a high level of performance that is remarkably easy to use. The LCS-4000 is offered as a fully manual or semi-automated system and can easily be configured for a wide range of applications with a variety of design options and accessories available. Features System integrates the Laser Cutting System for selectively removing material and making high-precision cuts Designed for simultaneous DC and/or RF probing while trimming leads or removing defects from devices Fully motorized system allows user to remotely position the sample stage, the platen AND the microscope independently while the system is entirely contained in a light-tight enclosure for safe and easy operation of the system Standard configuration includes independent 100mm x 100mm range of motion for sample stage AND microscope (larger ranges available) Multi-axis dual joystick controller provides easy operation of all motion components and can be customized to include a variety of additional functions System can be upgraded to include semi-automated control of wafer probing Isolated feed-through terminals located on both sides of station for convenient connection to micropositioners can be customized for BNC, Triax or DC pin connections

Specifications Wafer Size XY Stage Travel Resolution Chuck Type Vacuum Flatness Breakdown Voltage Isolation Rotation Adjustment Rotation Resolution Platen Travel Adjustment Planarity Rigidity Material Microscope Type Travel Positioning resolution Number of Objectives Number of Tube Lenses Focusing Range Illuminating System 100mm standard Larger sizes available 100mm x100mm Larger range available Motorized, 1.5μm repeatability DC or RF available Multi-zone vacuum +/- 13μm At least 500 V At least 1GΩ Motorized, full 360° 0.01° resolution Laser Type Wavelengths Pulse Width Pulse Energy (High/Low)...

Illuminator Shutter Shutter system designed for the fiber optic ring light and halogen light source. System is integrated with the software for fully automated use. Makes automated testing of photosensitive devices easy while protecting halogen sources from the wear & tear of constant on/off switching. Vibration Isolation Table For high precision testing of the smallest features, vibration isolation is a necessity. We offer a full line of vibration isolation tables which we will customize for each probe station and application. Digital Camera Both the stereo zoom and Olympus BXFM microscopes...

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