Features • Measured range: -100kPa~700kPa...2MPa • MEMS technology • Gauge or vacuum measurement • SOP or DIP package • For non-corrosive gas • Pressurize from back side • Voltage and current supply optional • Pin direction optional Applications • Air pump, electric control fields • Automotive electronics fields • Pressure instruments fields Introduction MPM161 is a piezo-resistive pressure sensor for fields such as automotive electronics, air engine and pneumatic component etc. The core is a pressure sensing die processed by MEMS technology. The pressure sensing die is composed of a springy diaphragm and four resistors integrated in the diaphragm. Four piezo-resistors form a Wheatstone bridge structure. When the springy diaphragm is pressured, Wheatstone bridge will output linear proportional voltage signal with the pressure on. MPM161 is an OEM sensing element packaged with standard SOP6 and DIP6, which is easy for users to install by surface mounting or Dual-In-Line. With good repeatability, linearity, stability and sensibility, MPM161 is also easy for users to adjust output, thermal drift and make temperature compensation using operational amplifier or integrated circuit. Construction Sensing die: silicon Leading wire: gold wire Packaging housing: PPS material Pin: silver plated copper Net weight: around 0.4g MICRO SENSOR CO.,LTD Electronic Performance Power supply: <15V DC or <3.0mA DC Insulation resistor: 100MQ,100VDC http://www.microsensor.cn Add: No.18, Yingda Road Baoji, P.R. China, 721006

MPM161 Pressure Sensor (V1.0) Items Overpressure: 2 times FS Basic Condition Media: air Media temp.: (25±1)°C Environment temp.: (25±1)C Shock: 0.1g(1m/s2)(Max) Humidity: (50%±10%)RH Power supply: (5±0.005)VDC Specifications MICRO SENSOR CO.,LTD http://www.microsensor.cn Add: No.18, Yingda Road Baoji, P.R. China, 721006 Tel: +86 917 3600739/3600832 Fax: 3609977

Equivalent Circuit Diagram MICRO SENSOR CO.,LTD http://www.microsensor.cn Add: No.18, Yingda Road Baoji, P.R. China, 721006 Tel: +86 917 3600739/3600832 Fax: 3609977

MPM161 Piezo-resistive pressure sensor Measured range -100kPa~700kPa -100kPa~1000kPa -100kPa~1.5MPa -100kPa~2MPa Code Packaging S SOP Code Power Supply A Constant Current Code Others (Only for DIP packing) R F D A R the whole spec. Notes 1. For more technical specification or any questions, please contact us. 2. If customers have special requirements for specifications and functions, please contact us. http://www.microsensor.cn Add: No.18, Yingda Road Baoji, P.R. China, 721006 Tel: +86 917 3600739/3600832 Fax: 3609977 MICRO SENSOR CO.,LTD -4-