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MEMS Pressure Sensor MPM180/MPM185

MEMS Pressure Sensor MPM180/MPM185

MEMS Pressure Sensor MPM180/MPM185

Product catalog summary
Features
  • Pressure range from 0 to 20kPa up to 1MPa.
  • Available in gauge, absolute, and differential pressure types.
  • Operates with a constant current power supply.
  • Suitable for non-conductive, non-corrosive gases or liquids.
  • Compact TO-8 packaging for PCB installation.
  • Optional accuracy classes available.
  • 3/16 inch port size.
  • Low cost and compact size.
Applications
  • Air pressure control.
  • Physiology monitoring.
  • Medical equipment, such as blood-pressure meters.
  • Pressure calibration.
  • Aerospace and communication systems.
Introduction

The MPM180/MPM185 sensors utilize advanced ion implantation and micro-mechanical processing to create a silicon die with Wheatstone Bridges. The pressure is directly transmitted to the silicon die, converting it into an output voltage signal. Laser trimming is used for temperature compensation, making it suitable for PCB or small space applications to measure various pressure types in gases or liquids.

Electric Performance
  • Power supply: ≤2.0mADC.
  • Electric connection: 6-pin Kovar, TO-8 packing.
  • Common mode voltage output: 50% of input (typical).
  • Input impedance: 3kΩ to 8kΩ.
  • Output impedance: 3.5kΩ to 6kΩ.
  • Response time: <1ms.
  • Insulation resistance: 100MΩ at 100VDC.
  • Overpressure: 1.5 times FS or ≤200psi.
Construction
  • Pressure port made of stainless steel.
  • Sensor materials include gold, aluminum, silicon, and Pyrex.
  • Pin material: Kovar.
  • Net weight: ~4g.
Environmental Conditions
  • Orientation tolerance: zero change ≤ 0.05%FS when deviated 90°.
  • Shock resistance: no change at 10gRMS, (20-2000)Hz.
  • Impact resistance: 100g, 11ms.
  • Media compatibility: Top compatible with Nickel, stainless steel, and silicon glue; Bottom compatible with silicon, Pyrex, RTV, and gold.
Basic Conditions
  • Media temperature: 25±1℃.
  • Environment temperature: 25±1℃.
  • Shock: 0.1g (1m/s²) max.
  • Humidity: 50%±10% RH.
  • Environment pressure: 86-106kPa.
  • Power supply: 1.5±0.0015mADC.
Basic Specifications
SpecificationABCUnits
Non-linearity±0.15±0.25±0.5%FS, BFSL
Repeatability±0.05±0.05±0.10%FS
Hysteresis±0.05±0.05±0.10%FS
Zero output±2 mVDC
FS output≥50 mVDC
Zero thermal error±0.75±1.0±1.5%FS, @25℃
Span thermal error±0.75±1.0±2.0%FS, @25℃
Thermal hysteresis (typ.)±0.1 %FS
Long-term stability (typ.)±0.2 %FS/year
Compensated temp. range0-50 ℃
Working temp. range-40-125 ℃
Storage temp. range-40-125 ℃
Ordering Guide

Pressure range codes and types are available for different applications, with options for gauge, absolute, and differential pressure types. Power supply options include constant current, and temperature compensation can be achieved through laser trimming or compensated resistors. Accuracy classes range from ±0.15% to ±0.50% BFSL.

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Catalog excerpts

MEMS Pressure Sensor MPM180/MPM185-1

MPM180/MPM185 TO-8 Housing Piezoresistive Pressure Sensor MPM180/MPM185 TO-8 Housing Piezoresistive Pressure Sensor Features ·Pressure range 020kPa…1MPa ·Gauge, absolute and differential pressure ·Constant current power supply ·Measure non-conductive, non-corrosive gas or liquid ·TO-8 packing, enable for PCB installation ·Accuracy class optional ·3/16 inch port ·Low cost, compact size Application ·Air pressure control ·Physiology guarding ·Medical equipment, blood-pressure meter ·Pressure calibrator ·Communication system Introduction MPM180/MPM185 TO-8 housing piezoresistive pressure sensor uses advanced ion implantation and micro-mechanical processing technology to produce silicon die which has Wheatstone Bridges and precise mechanical structure, packing sensor as TO-8 type. The measured pressure is transimitted onto the silicon die through pressure port directly. And the pressure value can be transformed into output voltage signal by linearity relationship. Laser trimming compensates sensor temperature performance. The sensor could be used on PCB or small space fields to measure gauge, absolute or differential pressure for the gas or liquid. Electric Performance Power supply: ≤2.0mADC Electric connection: ,6-pin Kovar, Φ0.45×22mm, TO-8 packing Common mode voltage output: 50% of input (typ.) Input impedance: 3kΩ8kΩ Output impedance: 3.5kΩ6kΩ Response (10%90%): <1ms Insulation resistor: 100MΩ, 100VDC Overpressure: 1.5 times FS or ≤200psi, min. value is valid Construction Pressure port: stainless steel http: //www.microsensor.cn Add: No.18,Yingda Road Baoji,P.R.China, 721006 Tel: +86 917 3600739/3600832

 Open the catalog to page 1
MEMS Pressure Sensor MPM180/MPM185-2

MPM180/MPM185 TO-8 Housing Piezoresistive Pressure Sensor Sensor: gold, aluminum, silicon, Pyrex Pin: Kovar Net weight: ~4g Environment Condition Orientation: deviate 90° from any direction, zero change ≤ 0.05%FS Shock: no change at 10gRMS, (202000)Hz condition Impact: 100g, 11ms Media compatibility: Top: the non-corrosive and non-conductive gas or liquid which is compatible with Nickel, stainless steel and silicon glue; Bottom: the gas or liquid which is compatible with silicon, Pyrex, RTV and gold. Basic Condition Media temperature: 25±1℃ Environment temperature: 25±1℃ Shock: 0.1g (1m/s/s)...

 Open the catalog to page 2
MEMS Pressure Sensor MPM180/MPM185-3

MPM180/MPM185 TO-8 Housing Piezoresistive Pressure Sensor Outline Construction (Units: mm) Electric Connection gauge vented tube Laser trimming Electric connection Other pins useless 4 No laser trimming http: //www.microsensor.cn

 Open the catalog to page 3
MEMS Pressure Sensor MPM180/MPM185-4

MPM180/MPM185 TO-8 Housing Piezoresistive Pressure Sensor TO-8 Housing Piezoresistive Pressure Sensor Range code Range code Pressure range TO-8 Housing Piezoresistive Pressure Sensor Range code Pressure range Range code Pressure range Pressure type Differential pressure Code Power supply Constant current Pressure connection Temperature compensated method Laser trimming Providing compensated resistors value Code Accuracy class A B http: //www.microsensor.cn Add: No.18,Yingda Road Baoji,P.R.China, 721006 Tel: +86 917 3600739/3600832

 Open the catalog to page 4

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.