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White light interferometers for non-contact distance and thickness measurements
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White light interferometers for non-contact distance and thickness measurements - 1

More Precision. interferoMETER // Ultra-precise white light interferometers

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White light interferometers for non-contact distance and thickness measurements - 2

High precision white light interferometers interferoMETER The innovative white light interferometers from Micro-Epsilon set a This results in advantages for the measurement: benchmark in high-precision distance and thickness measurements. bsolute measurements with highest precision, even with moving A These sensors enable stable measurement results with subnanometer resolution, offering a comparatively large measuring range and offset distance. targets ide range of applications: Distance measurement, multi-peak W measurement of several layers and thickness measurement of thin layers as well...

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White light interferometers for non-contact distance and thickness measurements - 3

General information Unmatched precision for industrial series applications Possible applications - the right system for every application Application examples System type Purpose Resolution Page Dimensions / Accessories

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White light interferometers for non-contact distance and thickness measurements - 4

Unmatched precision in distance and thickness measurements interferoMETER The advantages of absolute measurement While Micro-Epsilon white-light interferometers provide absolute measurement values, common laser interferometers are based on the principle of relative measurements. Accordingly, the Reference required, loses position after IMS white light interferometers are known for stable and absolute measurements without signal interruption prior referencing. This is particularly favorable in the case of signal interruptions caused, for example, by steps, holes or structured surfaces. After...

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White light interferometers for non-contact distance and thickness measurements - 5

The interferoMETERs are equipped with individual calibration protocols, documenting the precision achieved. ■ Multi-peak models ■ Intelligent signal processing ■ Robust aluminum housing and durable SLED ■ Extremely high temperature stability due to passive cooling ■ Highest resolution < 30 pm ■ Simple parameter set up via web interface ■ Replaceable controller (IMS5400) Technology Group Ethen 'et/IP User-friendly web interface for easy operation Due to a user-friendly web interface, no additional software is necessary to configure the controller and the sensors. The web interface is...

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White light interferometers for non-contact distance and thickness measurements - 6

Unmatched precision for industrial series applications interferoMETER Highest Z-axis resolution and small light spot 5 µm Light spot The sensors generate a small light spot that is almost constant over the entire measuring range. The light spot diameter allows the detection of small details such as structures on semiconductors and miniature electronic components. Pilot laser for exact visualization of the measuring point White light interferometers work with infrared, non-visible light (approx. 840 nm wavelength), which means that the measurement position cannot be seen directly. To...

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White light interferometers for non-contact distance and thickness measurements - 7

Possible applications - the right system for every application interferoMETER Measuring objects: transparent objects transparent objects Max. 14 distance values and thickness calculation Measuring objects: Optically dense as well as Multi-peak distance measurement Distance measurement Absolute distance measurement 14 distance values in a measuring range of 2.1 mm Stable thickness measurement Stable multi-layer thickness measurement Stable thickness measurement of a layer Maximum 5 thickness values of individual layers (and their combinations) Measuring objects: transparent measuring objects...

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White light interferometers for non-contact distance and thickness measurements - 8

Applications interferoMETER Wafer tilt measurement Thickness measurement of plastic films White light interferometers are used to measure the horizontal IMS5400-TH white light interferometers are used for inline thickness tilt of wafers when wafers are being fed in. The interferometers monitoring of films. The thickness values are detected with micrometer provide absolute distance values at subnanometer resolution. The resolution at a high measuring rate, even if the film flutters slightly. measurement ensures the greatest possible positional accuracy when wafers are picked up and removed....

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White light interferometers for non-contact distance and thickness measurements - 9

Checking the mask position Testing the concentricity of axes White light interferometers are used to align photomasks. The For optical scanning of precision axes, three IMS5400-DS are used to interferometers provide absolute measurement values in the measure onto the rotating part. Thanks to this arrangement, individual subnanometer range and enable high-precision positioning of the tracks can be detected in a short cycle time. mask. They can also be used in a vacuum. Thickness measurement of electrode coatings High-precision thickness measurement of transparent layers Two opposing white...

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White light interferometers for non-contact distance and thickness measurements - 10

Absolute distance measurement with nanometer resolution interferoMETER 5400-DS =- Absolute measurement with nanometer resolution Absolute distance measurements with nanometer resolution The IMS5400-DS white light interferometer opens up new perspectives in industrial distance measurement. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer resolution at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance....

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White light interferometers for non-contact distance and thickness measurements - 11

All data at constant ambient temperature (24 ±2 °C) 11 Measuring rate 0.5 kHz, moving average over 64 values, measured differentially between the front and back of a thin glass plate in the mid of the measuring range (2 sigma) 2) Maximum deviation from reference system over the entire measuring range, measured on front surface of ND filter 3) In the mid of the measuring range 4) Maximum sensor tilt angle that produces a usable signal on polished glass (n = 1.5) in the mid of the measuring range. The accuracy decreases when approaching the limit values. 5 Non-transparent materials require...

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White light interferometers for non-contact distance and thickness measurements - 12

■ Stable thickness measurement with submicrometer resolution interferoMETER 5400-TH Stable thickness measurement with varying distances The IMS5400-TH white light interferometer opens up new perspectives in industrial thickness measurement. The interferometer is used for highly accurate thickness measurements from a relatively large distance. The large thickness measuring range allows the measurement of thin layers, flat glass and films. Since the white light interferometer works with an SLED in the near infrared range, it is possible to measure the thickness of optically non-dense objects...

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