Sensors & Applications Vacuum More Precision.

Micro-Epsilon sensors in a vacuum ■ Vacuum areas ■ Measuring from outside onto the vacuum

The high-performance and robust sensors from Micro-Epsilon can be used up to ultra-high vacuum (UHV). Pressure ranges Pa mbar Low vacuum Medium vacuum High vacuum Ultra-high vacuum 1) Source: iTeh STANDARD PREVIEW, 2019. Complies with ISO 3529-1:

Typical industries Welding technology Coating technology

The vacuum-compatible and robust sensors from Micro-Epsilon withstand the high demands of a vacuum environment. The lower the desired pressure, the higher the demands on the materials in the vacuum. High and ultra-high vacuums place particularly high demands on the components used and therefore also on the measurement technology. Micro-Epsilon offers customized sensors according to individual customer specifications. The high-performance and robust vacuum sensors from Micro-Epsilon are manufactured in an ISO 6 class clean room. Regular checks using TENAX and particle probes, for example, enable...

Measurement variations Measuring in a vacuum In this application, part of the system is in a vacuum. Variant 1: Both the sensor and the vacuum-compatible cable are fed into the vacuum chamber via a vacuum feedthrough. Variant 2 (customized sensor): Only the sensor is in a vacuum. The sensor acts as a vacuum feedthrough and can also be developed according to customer requirements. Stringent requirements must be met when measuring in a vacuum. In the first two variants, the controller is always located outside the system. Measuring from outside onto vacuumed environment Here, the sensor, the cable,...

Measuring in a vacuum Subsystem in a vacuum // Optical sensors optoNCDT ■ Compact laser triangulation displacement sensor for fast and precise measurements ■ Non-contact displacement and distance measurement with large measuring ranges ■ High accuracy on numerous surfaces ■ Compact design and easy mounting The optoNCDT laser sensors are extremely compact and have a fully integrated controller. This makes mounting and wiring quick and easy. These laser sensors can therefore be easily integrated even in confined installation spaces. [1] FSO = Full Scale Output; the specified data apply to white,...

Additive manufacturing Research and development Laser welding in a vacuum Semiconductor technology Honing and lapping of wafers

Measuring in a vacuumSubsystem in a vacuum // Optical sensors confocalDT ■ Distance and thickness measurement ■ Ultra-small light spot ■ Large tilt angle ■ Suitable up to ultra-high vacuum The confocalDT sensors are designed with passive components and therefore do not emit any heat into the environment. Micro-Epsilon offers sensors, cables, and accessories especially for use in a vacuum and suitable for the respective specification (clean room, vacuum, ultra-high vacuum UHV). Vacuum-compatible sensors are available with various measuring ranges, both with axial and radial beam paths. Static...

Wafer production Mask positioning Display production

Measuring in a vacuum Subsystem in a vacuum // Optical sensors ■ Absolute distance measurement with nanometer accuracy ■ Multi-peak distance measurement and multi-layer thickness measurement ■ Precise thickness measurements, regardless of the distance of the sensor ■ High signal stability ■ Suitable up to ultra-high vacuum The industrial-grade white light interferometer consists of a robust sensor, a highly flexible sensor cable, and a controller in an aluminum housing that can be attached to a DIN rail. Due to its robust design, the interferometer can also be integrated in industrial environments....

Wafer production Mask positioning in lithography

Measuring in a vacuum Subsystem in a vacuum // Electromagnetic sensors ■ Inductive sensors (eddy current) for displacement, distance, position ■ Non-contact displacement and distance measurement ■ High frequency response for dynamic measurements ■ Temperature-stable, ideal for harsh environmental conditions ■ Catalog sensors up to medium vacuum, OEM products up to ultra-high vacuum The eddyNCDT displacement sensors are designed for non-contact detection of displacement, distance, position, oscillation, and vibration. Eddy current sensors from Micro-Epsilon are considered to be particularly robust...

Applications IIS Vibration measurement wmmm Positioning tasks for wafers or webs MM! HR asms Lithography Coating technologies Aerospace

Measuring in a vacuumSubsystem in a vacuum // Electromagnetic sensorscapaNCDT ■ Capacitive displacement sensors for industrial measuring tasks ■ Highly precise even with temperature fluctuations ■ Ideal for long-term stable measurements ■ Suitable up to ultra-high vacuum Capacitive displacement sensors are often used in vacuum environments or in clean rooms. In a particle-free environment, the capacitive sensors from Micro-Epsilon achieve a resolution in the sub-nanometer range. The capaNCDT sensors are used for distance and thickness measurement on conductive objects. They are therefore ideally...

Lenses / Optics adjustment Wafer production Cathode alignment on the electron accelerator Wave impact measurement in a vacuum Set-up tool for bonding processes / Position between two prismatic bodies E-motor test bench Expansion measurement Alignment of satellite equipment 3D printing / laser sin

mainSENSOR ■ Robust sensor design ■ Flexible sensor concept ■ Suitable up to high vacuum Magneto-inductive sensors measure the distance on permanent magnets and are therefore able to measure through non-ferromagnetic materials, especially metals such as aluminum and stainless steel. This is a decisive advantage for applications in closed systems or housings, as the sensor and magnet can be housed separately. For example, the magnet can be mounted in a harsh environment and the sensor in a safe area. Start of measuring range 1 ... 5 mm 1 mm 1.5 mm Temperature stability < 250 ppm FSO/K < 500 ppm...

Expansion measurement in autoclaves Displacement measurement in compressors