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Semiconductor Industry
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Catalog excerpts

Semiconductor Industry - 1

Sensors & Applications Semiconductor Industry

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Semiconductor Industry - 3

capaNCDT 6230 Measurement tasks in the semiconductor industry place high demands on the sensors used. Micro-Epsilon offers a wide product range containing high precision displacement sensors to address the needs of wafer processing for the chip industry and production of displays. Capacitive multi-channel measuring system for machine position monitoring Measuring displacement and distance without contact (measuring ranges from 0.05 mm to 10 mm) Nanometer resolution Modular design for up to 4 channels Sensor models and accessories for vacuum / UHV Micro-Epsilon sensors come into play where...

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Semiconductor Industry - 4

confocalDT ■ Confocal sensors for measuring displacement and thickness ■ Suitable for all surfaces: mat, reflective and rapidly changing surfaces ■ High repeatability ■ Fastest controller in the world, ideal for dynamic measurement tasks

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Semiconductor Industry - 5

World leading sensor range ■ Vacuum suitability ■ Detection of finest structures with a lateral resolution from 3 ■ Compact sensors, designs with 90° beam path ■ High numerical aperture (NA) ensures highest precision ■ Measuring distance, displacement and roughness Transparent layers & adhesive beading Confocal chromatic sensors are used for onesided layer thickness measurements. Multi-peak measurement enables even the finest of layers to be measured reliably. Bow and warp Confocal chromatic sensors scan the wafer surface to detect bow, warp and distortion. Cracks and breakage Confocal...

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Semiconductor Industry - 6

eddyNCDT ■ Capacitive multi-channel measuring system for machine position monitoring ■ Non-contact displacement and distance measurement with measuring ranges from 0.05 mm to 10 mm ■ Nanometer resolution ■ High bandwidth for dynamic measurements ■ Ideal for long-term stable measurements ■ High-performance inductive displacement measuring system ■ Non-contact displacement and distance measurements with measuring ranges from 0.4 mm to 80 mm ■ Nanometer resolution ■ High frequency response for dynamic measurement tasks ■ Customer-specific sensor designs

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Semiconductor Industry - 7

Positioning the wafer stage Non-contact sensors from Micro-Epsilon are used for position monitoring in the wafer stage where they measure highly dynamic XYZ movements. Capacitive and inductive (eddy current) sensors achieve nanometer resolution. Sensors: capaNCDT / eddyNCDT Mask positioning in lithography applications Lithography processes require high resolution and long-term stable measurement of machine movements in order to achieve maximum precision. Capacitive displacement sensors monitor this highly accurate mask positioning process. Sensor: capaNCDT Positioning the lens system in...

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Semiconductor Industry - 8

Sensors and Systems from Micro-Epsilon Sensors and measurement devices for non-contact temperature measurement Measuring and inspection systems for metal strips, plastics and rubber Optical micrometers and fiber optics, measuring and test amplifiers Color recognition sensors, LED analyzers and inline color spectrometers 3D measurement technology for dimensional testing and surface inspection More Precision Whether it is for quality assurance, predictive maintenance, process and machine monitoring, automation or R&D – sensors from Micro-Epsilon make a vital contribution to the improvement of...

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