Optics
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Sensors & Applications Optics More Precision

                         ...

(p£) MICRO-EPSILON Micro-Epsilon is a globally active company and leader in industrial measurement technology. For more than 50 years, Micro-Epsilon has developed innovations providing unsurpassed solutions for precise measurement and inspection tasks. The product portfolio ranges from sensors for displacement and distance measurements over infrared temperature measurement and color recognition to systems for dimensional measurements and defect inspection. For the semiconductor and optics industries, MicroEpsilon offers sensor solutions of highest precision. www.micro-epsilon.com OPTOCRAFT...

Displacement & Position measurement SHSLab ' Shack-Hartmann wavefront sensor for measurement of the alignment of optical systems (transmitted wavefront) ' High Tilt measurement range: +/-10° Measurement of strongly curved wavefronts (defocus and aberrations) Measurement at different wavelengths Excellent accuracy Excellent wavefront resolution and stability ' Capacitive multi-channel measuring system for machine position monitoring Non-contact displacement and distance measurement with measuring ranges from 0.05 mm to 10 mm Nanometer resolution High bandwidth for dynamic measurements Ideal...

Positioning of lens systems Highly dynamic, inductive displacement sensors (eddy current) measure the position of lens elements in order to achieve the highest possible imaging accuracy. Sensor: eddyNCDT The transmitted wavefront allows precise alignment of single subgroups of a lens assembly. Additionally, the optical performance of the lens assembly can be measured. Positioning of precision stages Non-contact displacement sensors from Micro-Epsilon are used for position monitoring in the wafer stage where they measure highly dynamic XYZ movements. Capacitive and inductive (eddy current)...

Quality inspection Wavefront testing applications: orld leading confocal-chromatic sensor system for W distance, thickness and roughness Measurement on-axis and at field points Measurement of - transmitted wavefront, PSF, MTF - focal length (EFL, BFL) - field curvature - chromatic aberrations - polarization effects etection of finest structures with a lateral resolution D from 3 µm igh numerical aperture (NA) ensures highest precision H Compact sensors, designs with 90° beam path Vacuum suitability Sensor: SHSLab, SHSInspect RL module, SHSInspect

Multi-functional optics testing Distance measurement on AR coated glass After the coating process, glass with anti-reflective coatings is inspected using blue laser sensors in order to determine undulations and torsion. The planarity of the coated glass surface is measured in several tracks. Based on the patented Blue Laser Technology, optoNCDT 2300-2DR sensors provide high easurement acm curacies on coated glass surfaces. Curvature measurement of optical glass In order to meet production tolerances, the contour of optical lenses such as eyeglass lenses or objectives is measured using...

Sensors and measurement devices for 3D measurement technology for non-contact temperature measurement dimensional testing and surface SHSInspect RL module Optical measurement module for integration into customer set-ups, OEM, inline testing, etc. ■ High accuracy ■ Versatile application ■ Wavefront, Zernike, PSF, MTF ■ Adjustment, quality test ■ Surface and radius of curvature SHSLab ■ High speed, single-shot measurements ■ Excellent accuracy ■ Extreme dynamics and broad spectral range ■ Excellent wavefront resolution and stability ■ Powerful, customizable evaluation software ■ Versatile and...