More Precision interferoMETER // High precision absolute interferometers

High-precision absolute interferometers interferoMETER The measurements set a benchmark in high-precision distance and thickness measurements. These sensors enable stable measurement results with sub-nanometer resolution, offering a comparatively large measuring range and offset distance. This results in advantages for the measurement: Absolute measurements with highest precision, even with moving targets Wide range of applications: distance measurement, multi-peak measurement of several layers and thickness measurement of thin layers as well Interferometers from Micro-Epsilon work differently...

General information Unmatched precision for industrial series applications Possible applications - the right system for every application Application examples For stable wafer thickness measurement in inline processes Connection options / Accessories Page Connection possibilities Optional accessories

Absolute measurements for unmatched precision The advantages of absolute measurement While Micro-Epsilon white light interferometers provide absolute measurement values, common laser interferometers are based on the principle of relative measurements. The IMS white light interferometers provide stable and absolute measurements without prior referencing. This is particularly favorable in the event of signal interruptions caused by steps, holes, false reflections or structured surfaces, for example. After the signal interruption, you directly receive a measurement value, whereas laser interferometers...

Precise and stable down to the last nanometer Greatest possible precision with large offset distance 30 pm resolution 5 µm lateral resolution ±10 nm linearity and measuring range Small light spot for detecting small details, e.g. structures on semiconductors and miniature electronic components. Vacuum-compatible sensors, ideal for the semiconductor industry Structured wafer profile The IMS5600-DS offers highest precision in distance measurements. The absolute measurement allows for profiles of moving objects to be detected as well. Fast measurements on many surfaces Films / coatings User-friendly...

Patented pilot laser for exact visualization of the measuring point ■ Visualization of the measuring position with a patented pilot laser ■ In addition to the measuring position, the pilot laser also provides feedback on the distance: Measuring object in the measuring range: constant illumination of the pilot laser Measuring object outside the measuring range: pilot laser flashes. ■ Robust and compact sensors for industrial measurement tasks ■ UHV sensors for use in the semiconductor industry - Metal housing - DIN rails (enables easy installation in control cabinets) ■ Active temperature compensation...

The right system for every application The interferoMETER controllers can be combined with numerous sensors. The sensor and controller are matched and calibrated at the factory. This enables nanometer-precise positioning tasks, distance measurements and layer thickness measurements, including in clean room environments and vacuum. The interferoMETERs are supplied with individual calibration reports documenting the precision achieved. interferoMETER 5400-DSinterferoMETER 5600-DS ■ Absolute interferometer for distance measurements with nanometer resolution ■ Compact and robust sensors: sensors...

Applications interferoMETER Wafer tilt measurement Thickness measurement of plastic films Absolute interferometers are used to measure the tilt angle of wafers IMS5400-TH absolute interferometers are used for inline thickness during the infeed. The interferometers provide absolute distance monitoring of films. The thickness values are detected with values at subnanometer resolution. The measurement ensures the submicrometer accuracy at a high measuring rate, even if the film greatest possible positional accuracy when wafers are picked up and Multi-layer thickness measurement of display glass...

Checking the mask position High-precision thickness measurement of transparent layers Absolute interferometers are used to align photomasks. The IMS5400-TH absolute interferometers are used to test the thickness of interferometers provide absolute measurement values in the coatings. Thanks to the large working range, no exact z-positioning is subnanometer range and enable high-precision positioning of the required. The thickness values are detected with micrometer accuracy mask. They can also be used in a vacuum. at a high measuring rate. Thickness measurement of electrode coatings Precise thickness...

Absolute distance measurements with nanometer resolution 3^ Absolute measurement with nanometer ^ resolution Flexible industrial integration Absolute distance measurements with nanometer resolution The IMS5400-DS absolute interferometer opens up new perspectives in industrial distance measurements. The controller has an intelligent evaluation feature and enables absolute measurements with nanometer resolution at a relatively large offset distance. Compared to other absolute measuring optical systems, the IMS5400-DS offers an unsurpassed combination of accuracy, measuring range and offset distance....

[1] All data at constant ambient temperature (24 ±2 °C). Measuring rate 0.5 kHz, moving average over 64 values, measured differentially between the front and back of a thin glass plate in the mid of the measuring range (2 sigma) [2] Maximum deviation from reference system over the entire measuring range, measured on front surface of ND filter [3] Optional connection via interface module (see accessories)

Absolute distance measurements with subnanometer resolution interferoMETER 5600 Distance measurement with subnanometer precision Best-in-Class: Resolution < 30 picometers Absolute measurement, suitable for step profiles Compact and robust sensors with large offset distance Measuring rate up to 6 kHz for high speed measurements Ethernet / EtherCAT / RS422 / PROFINET / EtherNet/IP Flexible industrial integration Designed for high-resolution distance measurements Absolute distance measurements with a large in clean rooms & vacuums measuring range and offset distance The IMS5600-DS absolute interferometer...