| confocalDT // Confocal chromatic sensor system

■ Confocal chromatic displacement and thickness measurements Highest precision in confocal chromatic Largest sensor portfolio displacement and thickness measurements for precise measurements The confocalDT sensor range stands for the highest precision and dynamics in confocal chromatic measurement technology. A large number of sensors and different interfaces can be used in versatile measurement tasks, e.g., in the semiconductor industry, glass industry, medical engineering and machine building. The right sensor for every application. Whether for use at high temperatures up to 200 °C, in confined...

Introduction Measuring principle and special features Absolute distance measurement / precise thickness measurement Application examples New products Confocal chromatic sensors Measuring ranges (mm) Light direction Measurement mode confocalDT IFS2402confocalDT IFS2403confocalDT IFS2404confocalDT IFS2405confocalDT IFS2406confocalDTIFS2407-xHT/VACconfocalDT IFS2407 Miniature sensors Hybrid sensors Compact sensors and sensors for series applications Precise universal sensors Sensors for special requirements High temperature sensors for environments up to 200 °C High precision sensors Confocal chromatic...

Measuring principle and special features confocalDT The confocal chromatic measuring principle Polychromatic white light is focused onto the target surface by a multi-lens optical system. The special lens arrangement splits the white light into monochromatic wavelengths by controlled chromatic aberration. To each wavelength, a specific distance is assigned by factory calibration. Only the wavelength that is focused exactly on the target is used for the measurement. An optical arrangement images the light reflected onto a light-sensitive sensor element. This sensor element detects the corresponding...

1 nm resolution < 1.5 µm lateral resolution ±40 nm linearity Miniature light spot for high lateral resolution The confocalDT sensors are available with different aperture angles. A large aperture angle with a high numerical aperture (NA number) enables a small light spot (X-Y resolution) as well as a high Z-axis resolution, allowing the smallest details to be detected with high precision. The size of the light spot remains almost constant over Miniature focal point for very small details and the finest structures the entire measuring range. Large measuring angle – ideal for curved and structured...

Absolute distance measurement confocalDT High-precision displacement and distance measurements on almost all types of surface The confocal sensor systems from Micro-Epsilon are used for high-resolution displacement and distance measurements. Due to the innovative technology, measurements can be performed on both diffuse and specular surfaces with high stability. The high measuring rate also enables reliable monitoring of highspeed processes. Distance measurement on transparent objects High-precision distance measurement is required for contour measurement or positioning of glass lenses. The confocalDT...

Precise thickness measurement confocalDT 5 layers with just one sensor Thickness measurement signal Signal with multi-layer thickness measurements (max. 6 peaks) Micron precision in thickness measurements of transparent objects The confocalDT sensors enable the thickness measurement of transparent materials. A sensor detects the material thickness with micrometer precision. The integrated multi-layer measurement allows for the thickness of multi-layered objects, such as laminated glass, to be evaluated. In this process, the appropriate material can be selected to ensure precise thickness measurements...

Applications confocalDT Distance measurement in wafer manufacturing Positioning of glass masks During wafer manufacturing, the numerous production steps generate Confocal chromatic sensors monitor the gap between the mask and mechanical stresses that can cause the wafer to warp or deform. the glass. Thanks to the 90° design, the sensors can be integrated in This deformation is measured without contact and with maximum an extremely space-saving manner. Measurement of lens profiles during the grinding process Polishing/grinding lenses A confocal chromatic sensor is used to measure the lens profile...

Automatic assembly of printed circuit boards Coordinate measuring machines The IFS2404 sensor models are ideal for real-time position, The compact confocalDT 2410 / 2415 models have an integrated orientation, and height monitoring in the automated placement of controller. Since no optical fiber is required, the space-saving sensor SMD components. This results in an efficient, automated process that is particularly suitable for dynamic applications such as in measuring delivers high quality with minimal rework. Thickness measurement of displays and flat glass Confined installation space Glass...

Applications confocalDT Measurement of the arm height position in vacuum Thickness measurement of medical container glass In vacuum process systems (e.g., semiconductor manufacturing), The wall and bottom thickness are crucial quality criteria for medical the Z-axis position (arm/gripper height) of handling or transfer arms container glass. In order to determine the glass thickness of the must be precisely monitored to prevent collisions, maintain defined bottom, confocal chromatic sensors from Micro-Epsilon are used. The distances, and ensure repeatable positioning. The confocal chromatic thickness...

Displacement and distance in 3D printing machines The compact controllers of the confocalDT 2411 series are used for Confocal sensors can also be used for the measurement of hot glass. distance control in industrial printers. The sensor system impresses The large offset distance allows for the sensor to be mounted from a with a measuring rate of up to 8 kHz and a resolution of up to 12 nm. safe distance to the hot glass. Due to their compact design, the controllers can be integrated easily into the control cabinet. Recommended sensors: IFC2411 with IFS2404 Compact Thickness measurement on the...