More Precision capaNCDT // Capacitive sensors for displacement, distance & gap

■ High-precision sensors for industry and high-tech Capacitive sensors for industrial applications Capacitive sensors are designed for non-contact measurement of displacement, distance, position and thickness. Their high signal stability and excellent resolution impress in numerous industries. These versatile and robust sensors offer an optimal solution for industrial measurement tasks from machine control to process monitoring. Capacitive sensors from Micro-Epsilon are ideal for nanometer measurements in controlled environments, e.g., laboratories, cleanrooms, vacuum chambers and clean production...

from page 4 Measuring principle and applications Product portfolio and advantages Capacitive system design Capacitive sensors for OEM Application examples Sensors Cylindrical standard sensors (socket) Measuring ranges: 0.05 mm to 10 mm Cylindrical sensors in very compact design (socket) Measuring ranges: 0.1 mm to 3 mm Cylindrical sensors with thread (socket) Measuring ranges: 0.5 mm to 3 mm High-precision cylindrical sensors (integrated cable) Measuring ranges: 0.2 mm to 2 mm Flat sensors (integrated cable) Measuring ranges: 0.2 mm to 3 mm Gap sensors (integrated cable & socket) Measuring ranges:...

■ More precision - Capacitive sensors from Micro-Epsilon Advantages of the measuring principle ■ Wear-free and non-contact measurement ■ Distance and thickness measurements on conductive and non-conductive objects ■ Unmatched accuracy and stability ■ High frequency response for fast measurements ■ Ideal for industrial environments with high and low temperatures, magnetic fields and vacuum Low-noise technology for maximum precision The capaNCDT sensors are based on the principle of the ideal plate capacitor. Two plate electrodes are represented by the sensor and the measuring object. If a constant...

Wide range of applications Measurement of distance, thickness and gaps with highest precision Distance measurement on electrically conductive objects Thickness measurement of electrically conductive materials Measurement of the gap between electrically conductive surfaces The capaNCDT system measures To measure the thickness of electrically conductive materials, two sensors are distance between two electrically capacitor, which varies proportionally with mounted on opposite sides. Each sensor conductive materials. The sensor measures the distance to the surface of measures the distance from one...

■ Extensive variety. Advanced technology. Globally leading. ■ Easy operation via powerful web interface with calculation functions ■ Modular systems with 1 to 8 channels ■ Supports synchronization and calculation ■ Non-contact grounding of the target object possible Controller capaNCDT 6100 Compact single-channel system capaNCDT 6200 Modular multi-channel system capaNCDT 6500 Multi-channel system for highest resolution Coating thickness measurement of films and batteries Active sensors for drag chains and long paths Testing system for film thickness

■ Sensors, cables and controllers are compatible with each other ■ Sensor replacement without re-calibration ■ Optional linearity calibration (LC) for even greater precision ■ Particle-free, low-outgassing materials for cleanroom and vacuum applications ■ Non-magnetic materials such as titanium and stainless steel for environments with strong magnetic fields ■ Robust, temperature-resistant materials: mechanically stable for use at high and low temperatures ■ Max. cable length: 40 m Standard 1.4 m / 2.8 m - Crush-resistant with protective metal tubing - Models for drag chain ■ Cables for vacuum...

■ More precision and stability 0 Maximum signal stability Triaxial sensor design with active sensor cable 0 Unmatched precision Nanometer precision with subnanometer resolution capaNCDT sensor Common capacitive sensor with triaxial design (coaxial) ■ Triaxial sensor design: measurement electrode, guard ring electrode and grounding ■ Guard ring electrode ensures a homogeneous measuring field for precise measurements with highest signal stability ■ Particularly low noise: electrically shielded sensor cable ■ Highly precise - even when multiple sensors are arranged very close together ■ Sensors...

Takes up very little space at the measuring point Passive and highly particle-free sensors ■ No offset, measuring range starts directly at the sensor ■ Integration in confined installation spaces with minimum effort ■ Smallest diameters available with cylindrical sensors ■ Extremely flat sensors available ■ No interactions between the sensor and the environment (e.g., force or heat transfer) ■ Particle-free sensors and clean-room cables ■ Special sensor design prevents virtual leaks ■ Low-outgassing sensors (residual-gas analysis) ■ Large selection of vacuum-compatible sensors, cables and feedthroughs...

■ Flexible solutions from standard to OEM ■ Sensor with socket/sensor with integrated cable Controller (consisting of oscillator, microcontroller and demodulator) ■ Preamplifier, e.g. for long cable routes Vacuum feedthrough Power supply cable Controller External preamplifier External preamplifier standard measurements measurements The full compatibility of all system components enables numerous combinations: 10

Specific sensors for OEM When standard solutions reach their limits, we tailor our sensors and controllers to your specific requirements. Frequently asked modifications include: Adapted design Target-specific adaptation Mounting options Individual cable lengths Modified measuring ranges Sensors with pre-installed controller Output types and interfaces OEM controller for customer-specific rack Measuring device to check the inner diameter of extruder bore holes (2 sensors in one axis) Customer-specific sensor design (clamp fastening) Dual sensor with 2 capacitive sensors in one housing Customer-specific...

Application examples capaNCDT Wafer stage positioning Capacitive sensors measure the position of the stage at various points, which is required in particular for fine alignment. Thanks to their triaxial design, the sensors are insensitive to electromagnetic fields and achieve a resolution in the nanometer range. They also achieve extremely high long-term stability. The sensors are designed for vacuum applications and can be used up to ultra-high vacuum. Measuring system: capaNCDT 6200 with CSH/SE-sensors Air gap in generators and electric motors Capacitive sensors measure the air gap between...