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XM Series Ultra-Precision Linear Motor Stages

XM Series Ultra-Precision Linear Motor Stages
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XM Series Ultra-Precision Linear Motor Stages - 1

779 Email: sales@newport.com • Web: newport.com M o t o r i z e d P o s i t i o n i n g TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS XM Series Ultra-Precision Linear Motor Stages • Non-contact, direct-drive system ensures ultraprecision motion with high dynamics and reliability • Sub-nm, high precision glass scale encoder provides accurate position feedback with 80 nm repeatability • Extra-large, ironless, high-efficiency linear motor minimizes heat generation • Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration The XM is the ultimate solution for the most demanding manufacturing and test and measurement applications. It meets ultra-precision motion requirements with high dynamics and reliability for 24/7 production environments. Typical applications include semiconductor wafer inspection, sensor test and calibration, laser machining and ultra-precision assembly. Unlike screw driven stages, the XM employs a center-driven, ironless linear motor as the driving element. Since the linear motor is a frictionless direct drive device, there is no backlash or hysteresis, wind-up or stiction limiting the motion performance. The linear motor drive also offers the advantage of higher speed, acceleration and system responsiveness with no wear to motor brushes or drive screws. The extra-large, ironless motor coil ensures zero cogging for ultra smooth velocity control and provides higher efficiency compared to alternative stage designs. This results in significantly less heat generation, which is generally the main limit for ultra-precision motion applications. To further improve thermal management and its effect on stage performance, the XM also has the benefit of a sophisticated length decoupling of the magnetic track from the stage carriage. XM stages are machined from stress-relieved 7075 aluminum, ensuring long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under strict temperature and quality control to further improve overall performance and accuracy. The T-shaped carriage used on the XM provides the optimum solution for precision XY assemblies without impacting the stage preload. It also more robust and is more tolerant to non-ideal mounting conditions than stages with a C-shaped carriage design. To ensure the most accurate trajectory control, XM stages feature best-in-class matched pairs of anti-creep crossed roller bearings. The absence of recirculating elements in the XM leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers on these bearings prevent bearing cage migration, which can occur with other linear bearings. Precision position feedback is supplied by a high accuracy LIF 481 Heidenhain Linear Scale. The precision alignment and mounting of this low thermal expansion scale in the center of the stage minimizes the impact of temperature changes on stage repeatability and accuracy. The encoder signals are interpolated by Newport’s XPS motion controller with sub-nm Accuracy of an XMS50 stage with linear error compensation and positioner mapping. The data was taken one day after the calibration and at different positions. The plot shows error readings over five cycles of back and forth motion. The accuracy is 0.3 ìm p-p. XM stages are capable of performing very small incremental steps with high accuracy and stability suitable for the most demanding test and assembly applications. resolution and less than 10 nm noise for outstanding position sensitivity and stability. Absolute home position and limit signals are incorporated on the same scale without any further electronics or mechanics for improved reliability and accuracy. In general, all electronics are attached to the stationary base, so there are no moving cables inside the stage. This results in an extremely compact design with exceptional reliability and safety. Need Accuracy to 1 ìm? Contact Newport to learn about our micropositioning calibration services needed for critical positioning applications. Upon request, we will create, implement and verify an electronic compensation routine to improve the absolute position accuracy of XM stages to 1 ìm/100mm when used with our XPS advanced motion control system. A certificate of calibration along with measured error maps is included. Interferometer Current Position Stage Setpoint Position 0 Time (s) Position (nm) 0.5 1 1.5 2 2.5 3 3.5 4 0 50 100

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XM Series Ultra-Precision Linear Motor Stages - 2

780 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS Position (mm) Straightness (ìm) -1.5 -1 -0.5 0 0.5 1 1.5 -25 -15 -5 5 15 25 XM stages deliver ripple-free motion as required by many precision scanning and wafer inspection processes. Shown is the straightness of an XMS50 during one forward and return cycle, measured with an interferometer. 0 Position (mm) 99.80 Speed (mm/s) 4 8 12 16 20 24 28 32 36 40 44...

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XM Series Ultra-Precision Linear Motor Stages - 3

M o t o r i z e d P o s i t i o n i n g 781 Email: sales@newport.com • Web: newport.com TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS A typical assembly using XML210, XMS50 and GTS30V Ordering Information Model Description XMS50 XMS linear motor stage, 50mm travel XMS100 XMS linear motor stage, 100mm travel XMS160 XMS linear motor stage, 160mm travel XML210 XML linear motor stage, 210mm travel XML350 XML linear motor stage, 350mm travel Recommended Motion Controller: XPS (see page 844) A1...

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