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VP-5ZA Precision Vertical Linear Stages

VP-5ZA Precision Vertical Linear Stages
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VP-5ZA Precision Vertical Linear Stages - 1

M o t o r i z e d P o s i t i o n i n g 789 TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS VP-5ZA Precision Vertical Linear Stages • Unique inclined plane concept delivers 4.8 mm of precision vertical motion in an ultra-low profile design • Higher load capacity compared to vertically mounted linear stages • Unobstructed access to the moving platform from any side • Integrated linear encoder provides 0.02 ìm position feedback for highly repeatable and accurate motion • Cool running, high torque DC motor with ball screw drive ensures 20,000 hours MTBF reliability The VP-5ZA is an ultra-low profile, precision vertical translation stage ideally suited for semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. Based on the industry-proven technology used on our VP-25X linear stages, the VP-5ZA offers highly reliable motion with nanometer sensitivity, high responsiveness, and a perfectly straight trajectory. The ultra-low profile of the VP-5ZA is achieved by an inclinedplane design consisting of a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings. The encoder read head is also fixed, eliminating the need for cable carriers. To avoid any side motion, the upper wedge is constrained by 2 pairs of vertically mounted doublerow linear ball bearing slides resulting in pure vertical motion. A cool running, high torque DC motor with a precision preloaded, long-life ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours. A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or our ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be made using a flat screw driver. Design Details Base Material Aluminum Bearings Recirculating ball bearings, double-row linear ball bearings for vertical guidance Drive Mechanism Inclined plane design with transmission ratio of 5:1; Backlash-free ball screw Drive Screw Pitch (mm) 1 Feedback Linear steel scale, 20 ìm signal period, 0.1 ìm resolution Limit Switches Optical Origin Optical, at center of travel, including mechanical zero signal Motor DC servo motor with tachometer, UE25CC Cable Length (m) 1.5 Specifications Travel Range (mm) 4.8 Resolution (ìm) 0.02(1) Minimum Incremental Motion (ìm) 0.06 Uni-directional Repeatability (ìm) 0.17 typical, 0.3 guaranteed Reversal Value (Hysteresis) (ìm) 0.06 typical, 0.2 guaranteed On-Axis Accuracy (ìm) 1.4 typical, 3 guaranteed Maximum Speed (mm/s) 5 Pitch (ìrad) 80 typical, 100 guaranteed Roll (ìrad) 60 typical, 100 guaranteed MTBF (h) 20,000 Weight [lb (kg)] 5.28 (2.4) See the Motion Control Metrology Primer, see page 775 for more information on typical and guaranteed specifications. 1) Nominal; actual resolution specified with each individual stage Load Characteristics and Stiffness Cz, Normal centered load capacity 50 N káx, Compliance in roll 50 ìrad/N.m káy, Compliance in pitch 45 ìrad/N.m káz, Compliance in yaw 10 ìrad/N.m Q, Off-center load Qx, Qy Cz / (1+D/30) Where D = Cantilever distance in mm káz káy káx Z Qy D Y Cz X Email: sales@newport.com • Web: newport.com

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VP-5ZA Precision Vertical Linear Stages - 2

790 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages (see page 786) and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any side. A VP-5ZA stage mounted on top of an ILS (see page 798) linear stage (with optional...

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