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VP-25X Precision Compact Linear Stages

VP-25X Precision Compact Linear Stages
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VP-25X Precision Compact Linear Stages - 1

786 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS VP-25X Precision Compact Linear Stages • Precise 25 mm travel in a very small envelope • Positioning to 10 nm of minimum incremental motion • Integrated linear encoder for backlash free, highly repeatable, and accurate motion • Innovative, fixed reading-head design avoids any moving cables • Low friction ballscrew drive provides 20,000 hours MTBF The VP-25X stages address multi-axis, high precision positioning requirements in fiber optics, bio-medical, semiconductor, and test and measurement applications. Features including its ultra-compact size and high reliability make the VP-25X stages appropriate for device testing, microassembly, micro-machining, and manipulation of small, lightweight parts such as fiber optical devices, micro-optics, MEMS, cell probes, or semiconductor devices. Based on a high precision low-friction ball screw and recirculating ball bearings, the VP-25X stages deliver highly reliable positioning performance at a maximum speed of 25 mm/s. Compared to alternative direct-drive technologies, the ball screw drive provides greater thrust for higher load capacity, higher efficiency resulting in less heat induced position drift and minimum tuning efforts. Furthermore, the self-locking feature at power-off considerably enhances operational safety. Design Details Base Material Aluminum Bearings Recirculating ball bearings Drive Mechanism Backlash-free ball screw Drive Screw Pitch (mm) 1 Feedback Linear steel scale, 20 ìm signal period. VP-25XA: RS422 output with 0.1 ìm resolution; VP-25XL: 1 Vpp analog sine-cos output Limit Switches Optical Origin Optical, at center of travel, including mechanical zero signal Motor DC servo motor with Tachometer UE25CC Cable Length (m) 1.5 Specifications VP-25XA (M-VP-25XA) VP-25XL (M-VP-25XL) Travel Range (mm) 25 Resolution (ìm) 0.1 0.005(1) Minimum Incremental Motion (ìm) 0.1 0.01 Bi-directional Repeatability (ìm) 0.15 typical, 0.2 guaranteed 0.07 typical, 0.14 guaranteed On-Axis Accuracy (ìm) 1.0 typical, 2.0 guaranteed Maximum Speed (mm/s) 25 Pitch (ìrad) 50 typical, 100 guaranteed Yaw (ìrad) 50 typical, 100 guaranteed MTBF (h) 20,000 20,000 Weight [lb (kg)] 3.3 (1.5) 3.3 (1.5) 1) When used with XPS controllers Time (s) Position (nm) 2 -10 100 110 90 80 70 60 50 40 30 20 10 0 4 6 8 Encoder Position Interferometer Position Target Position 0 10 12 14 16 18 20 22 VP-XL Stages deliver 10 nm motion sensitivity with high reliability and position stability. The modular VP-25XA stages enables the assembly of compact multi-axes positioning systems. For example, combining three VP-25XA stages and a VP-BK bracket produces a versatile and compact 3 axis motion system, while maintaining the height of the horizontal mounting surface to as low as 4 in. (±0.5 in.). For applications requiring up to 6 axis of motion, the SR50 and PR50 rotation stages and GON series goniometers (see page 914) can be easily added to the system. This complete modular approach provides the greatest flexibility and customization, while taking advantage of high precision performance and ease-of-use. The VP-25X stages are available in two versions: The VP-25XA provides a RS422 standard encoder output with 0.1 ìm resolution, that is compatible with our popular ESP300 and other motion controllers. The VP-25XL provides a 1 Vpp analog encoder interface compatible with our XPS motion controller. These stages deliver a reliable 10 nm motion sensitivity, and better than 140 nm bi-directional repeatability.

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VP-25X Precision Compact Linear Stages - 2

M o t o r i z e d P o s i t i o n i n g 787 TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS Load Characteristics and Stiffness káy káx Z QH D Y Cz X –Cx +Cx káz Qv D 22.3 10.3 Cx Cz, Normal centered load capacity 60 N +Cx, -Cx, Axial load capacity 40 N káx, Compliance in roll 20 ìrad/N.m káy, Compliance in pitch 20 ìrad/N.m káz, Compliance in yaw 30 ìrad/N.m Q, Off-center load QH, QV Cz / (1+D/30) Where D = Cantilever distance in mm between the center of the mass of the load and the...

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VP-25X Precision Compact Linear Stages - 3

788 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS XYZ Assembly 105 ±12.7 147 138.45 max. 40.5 G K I H 8 holes Ø A thd, depth: 9, B spacing 2 x 4 holes Ø D thd, depth: 6 2 x 4 holes Ø D thd, depth: 6 9 holes Ø A thd, depth: 9, B spacing J F G H 110 129 42.5 161.3 max. 56 H N L 12.7 59 G P M 38.1 H 38.1 7 holes Ø C thd, depth: 6 2 x 2 holes Ø 1.6, 9.525 spacing G Dimensions (mm); Note: Dimensions in brackets...

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