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RGV100BL High-Speed Precision Rotation Stage

RGV100BL High-Speed Precision Rotation Stage
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RGV100BL High-Speed Precision Rotation Stage - 1

812 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS RGV100BL High-Speed Precision Rotation Stage • Brushless direct-drive provides faster rotating speeds, high torque, superior reliability, and enhanced position sensitivity • Ultra-compact footprint – only 115 mm x 115 mm • Precision glass scale encoder ensures 0.0003° repeatability • 30 mm diameter through-hole for convenient cable routing The RGV100BL is a very compact direct-drive rotation stage that provides ultra-fast rotation with very high resolution and outstanding positioning performance. Applications include semiconductor wafer inspection, micro-robotics, and precision metrology. The direct-drive technology of the RGV100BL eliminates the worm gear of traditional rotation stages. The advantages are higher speeds, superior reliability, and enhanced position sensitivity. Speed, resolution, and repeatability are increased by a factor of up to ten times compared to worm-driven rotation stages of the same size. A high efficiency brushless DC torque motor with rare earth magnets supplies an optimum ratio of torque per inertia for high acceleration, with minimal stage heating. At maximum continuous torque, the temperature of the motor increases by only 30°C. This is significantly less than other stage designs and guarantees high performance and high reliability for the most demanding applications. Precision is ensured by a high-resolution glass scale with 15,000 line pairs per revolution that directly measures the Design Details Base Material Aluminum Bearings Large diameter steel ball bearings Motor High-torque brushless DC motor with rare earth magnets Motor Initialization Done by the XPS controller by a patented process that avoids major motion during initialization and that does not require Hall effect sensors Motor Commutation Done by the XPS controller on encoder signals Feedback Glass scale encoder with 15,000 line pairs per revolution, 1 Vpp, 32768-fold signal subdivision when used with XPS controller Limit Switches Two optical limit switches at approx. +/- 168°, Disabled by external switch Origin Optical, fixed at position 0°, including mechanical zero signal Cable Length (m) 5 Specifications Travel Range (°) 360 continuous Resolution (°) 0.00001* Uni-directional Repeatability, guaranteed (°) 0.0003 Reversal Value (Hysteresis), typical (°) 0.0001 Accuracy, guaranteed (°) 0.01 Maximum Speed (no load) (°/s) 720 Maximum Acceleration (°/s2) 1000 Maximum Torque (Nm) 0.42 @ 0°/s Inertia (no load) (kg.m2) 0.00116 Wobble, guaranteed (ìrad) 20 Eccentricity, guaranteed (ìm) 3 MTBF (h) 20,000 with 5 kg load, 720°/s speed and a duty cycle of 30% Weight [lb (kg)] 4.84 (2.6) * The resolution used internally by the XPS is below 0.01 arcsec. position of the rotating platen. The flat encoder is mounted on a precision ground reference surface and is perfectly aligned with the stage’s rotation axis to minimize position errors induced by eccentricity, wobble, or axial runout. The encoder signals are interpolated by the XPS motion controller with less than 0.1 arcsec resolution for outstanding position sensitivity and stability. The RGV100BL features a proprietary 4-point contact ball bearing. This unique, 2-piece design takes advantage of Newport’s excellent and proven capabilities in the design, manufacturing and assembly of precision mechanics and integrates multiple functions, like the bearing ways and the direct drive motor, minimizing the number of parts. The result is a more compact rotation stage with superior stiffness, high reliability and outstanding wobble and eccentricity specifications. A 30 mm diameter through-hole allows convenient routing of cables and vacuum lines through the stage. A once-per revolution index pulse permits precision homing to a unique home position. The RGV100BL also features two limit switches that can be enabled or disabled by an external switch. NEW

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RGV100BL High-Speed Precision Rotation Stage - 2

813 Email: sales@newport.com • Web: newport.com M o t o r i z e d P o s i t i o n i n g TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS Load Characteristics and Stiffness Mz Q D Cz ká Cz, Normal centered load capacity 100 N Ká, Transversal compliance 15 ìrad/Nm Mz, Maximum torque 0.42 Nm @ 0°/s Jz, Maximum Inertia 0.032 kgm2 Q, Off-center load Q Cz/(1+D/35) and Q(Jz-Jq)/D2 Where: D = Cantilever distance in mm; Jq = Inertia of payload Ordering Information Model Description RGV100BL RGV100BL...

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