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MICRO-CONTROLE / Spectra-Physics
Objective NanoFocusing Stages

Objective NanoFocusing Stages

Product catalog summary

Overview: The NPO Series Objective NanoFocusing stages are high-speed, piezo-driven devices designed for fast focusing and scanning over travel ranges up to 250 µm. They are compatible with most microscopes and objective lenses, making them suitable for applications such as surface profilometry, high-resolution imaging, auto-focusing, scanning interferometry, and confocal microscopy.

Specifications: The stages feature multi-layer, low-voltage piezoelectric transducer (PZT) stacks optimized for high-duty cycle operations. They minimize image shifts and tilt through a precision EDM-cut parallelogram, solid-state flexure, ensuring straight motion and high stiffness for superior focus stability. The stages are maintenance-free and wear-resistant.

Control Options: NPO stages are available in open-loop (no position feedback) and closed-loop versions with integrated position feedback. Open-loop systems have resolution limited by control electronics noise, while closed-loop systems (models ending in SG) use strain-gauge position sensors for accurate and repeatable motion, compensating for actuator creep.

Compatibility and Installation: The stages mount between the turret and the microscope objective, adding only 11.5 mm to the optical path length. They are compatible with standard and inverted microscopes, with a standard thread size of W0.8x1/36” compatible with Newport objective lenses. For other thread sizes, contact Newport.

Performance Metrics: The NPO140 and NPO250 models offer open-loop travel of 140 µm and 250 µm, respectively, with closed-loop travel slightly reduced. Open-loop resolution is 0.3 nm and 0.5 nm, while closed-loop resolution is 3 nm and 5 nm. The stages support a maximum lens weight of 500 g and exhibit minimal tilt during full travel.

Ordering Information: Models include NPO140 and NPO250 for open-loop, and NPO140SG and NPO250SG for closed-loop with strain gauge sensors. Installation involves screwing the adapter into the microscope, clamping the NPO stage on the adapter, and attaching the microscope objective to the NPO stage.

Catalog excerpts

The NPO Series Objective NanoFocusing stages are highspeed, piezo-driven devices. They provide fast focusing and scanning over long travel ranges of up to 250 ìm and are compatible with most microscopes and objective lenses. Typical applications include surface profilometry, high-resolution imaging, auto-focusing, scanning interferometry, and confocal microscopy. NPO stages feature highly reliable, multi-layer, lowvoltage, piezoelectric transducer (PZT) stacks, which are optimized for high-duty cycle operations. Image shifts and tilt are minimized by an FEA-modeled and precision EDM-cut parallelogram, solid-state flexure that ensures perfectly straight motion. The sophisticated guide also provides the highest possible stiffness for superior focus stability, higher frequency auto-focusing, shorter settling times and faster scans. NPO stages are maintenance-free and are not subject to wear. NPO NanoFocusing stages are available as open-loop (no position feedback) or closed-loop versions with integrated position feedback. In open-loop, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material. The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion. Also, the position feedback compensates for actuator creep. For highest position stability and highest temperature-insensitive performance, the sensors are assembled in a full Wheatstone bridge design. The closed-loop devices can be operated in open or closed-loop control. The NPO NanoFocusing stages mount between the turret and the microscope objective and add only 11.5 mm to the optical path length. All models can be used for standard and inverted microscopes. The standard thread size is W0.8x1/36” and is compatible with all Newport objective lenses. For other thread sizes, please contact Newport. Phone: 1-800-222-6440 • Fax: 1-949-253-1680 • Email: [email protected] • Web: newport.com Objective NanoFocusing Stages • Sub-nm resolution focusing for objectives with RMS thread • Up to 250 ìm focusing range • High resonant frequency for highly dynamic applications • Precision parallelogram design minimizes beam offsets NPO Series 1) Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range). 2) Applies to devices with ending SG in closed-loop control only. 3) Equal to rms noise value measured with NPC3 and NPC3SG controller. Specifications NPO140 NPO140SG NPO250 NPO250SG Open loop travel (± 10%), (ìm) (1) 140 250 Closed loop travel (ìm) (1, 2) 100 200 Open loop resolution (nm) (3) 0.3 0.5 Closed loop resolution (nm) (2) 3 5 Typ. Repeatability (nm) (2) 30 46 Capacitance (± 20%) (ìF) 3.4 10.2 Resonant frequency, unloaded (Hz) 370 310 With 80 g load (Hz) 300 270 With 105 g load (Hz) 270 250 With 300 g load (Hz) 210 155 Axial stiffness (N/ìm) 1.4 0.4 Max lens weight (g) 500 500 Typ. Tilt, full travel (ìrad) <4 <10 Weight (g) 150 255

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