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NanoPositioning Linear Stages

NanoPositioning Linear Stages
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The NPX Series is a family of compact, long travel piezobased linear stages providing nanometer resolution motion in one, two or three axis. These versatile stages are ideally suited for nm-precise positioning of small components such as mirrors, fibers, laser diodes, microoptics, sensors, or cellular samples. Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others. NPX stages feature highly reliable, multi-layer, lowvoltage piezoelectric transducer (PZT) stacks for highduty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 ìm travel range. Due to the frictionless guide principle, NPX stages are maintenance-free and are not subject to wear. Furthermore, the output motion sensitivity is not affected by mechanical friction. One of the advantages of the NPX piezo-based linear stages over traditional screw driven stages is the rapid response and fast settling performance. This allows them to be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning. NPX linear stages are available as X, XY, and XYZ motion systems. The multi-axis XY and XYZ devices utilize an advanced parallel motion principle, meaning all actuators act directly on the moving platform. Smaller form factor and lower inertia for faster motion can be achieved as opposed to other PZT systems with serial kinematics such as stacks of individual stages. In addition, the NPXY100 and NPXY200 models feature a large central aperture which makes them particularly suitable for microscopy applications. All NPX linear stages are available as open-loop (no position feedback) or closed-loop devices with integrated position feedback. In open-loop, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material. The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion. The position feedback compensates also for actuator creep. For highest position stability and most temperature insensitive performance, the sensors are built in a full Wheatstone bridge design. The closed-loop devices can be operated in either open or closed-loop control. Fastening is accomplished by a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP. Like with all piezo flexure devices, excessive moment loads and side forces acting between the top plate and the housing should be avoided during fastening. These external forces could damage the stage. Phone: 1-800-222-6440 • Fax: 1-949-253-1680 • Email: sales@newport.com • Web: newport.com NanoPositioning Linear Stages • Sub-nm resolution piezoelectric motion in X, XY, or XYZ • Up to 400 ìm travel range per axis • Precision parallelogram design for accurate linear displacements • High resonant frequency for highly dynamic applications NPX Series

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Phone: 1-800-222-6440 • Fax: 1-949-253-1680 • Email: sales@newport.com • Web: newport.com Specifications NPX200 NPX200SG NPX400 NPX400SG NPXY100 NPXY100SG NPXY200 NPXY200SG NPXYZ100 NPXYZ100SG Axes X X X, Y X, Y X, Y, Z Open loop travel per axis (± 10%), (ìm) (1) 200 400 100 200 100 Closed loop travel per axis (ìm) (1, 2) 160 320 80 160 80 Open loop resolution (nm) (3) 0.4 0.8 0.2 0.4 0.2 Closed loop resolution (nm) (2) 4 8 2 4 2 Typ. Repeatability (nm) (2) 36 75 36 45 30 Capacitance (± 20%) (ìF) 1.8 5.2 1.8 5.2 1.8 Resonant frequency, unloaded (Hz) 177 200 380/480 350/350 500/550/480...

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Phone: 1-800-222-6440 • Fax: 1-949-253-1680 • Email: sales@newport.com • Web: newport.com NPXY200 and NPXY200SG SQR 2.76 (70) 1.57 (40) .87 (22) 2.48 (63) ø1.10 THRU (28) ø3.15 (80) DIMENSIONS IN INCHES (AND MILLIMETERS) BOTH SIDES: 4 HOLES M5 THD USABLE DEPTH: .16 (4) BOTH SIDES: 8 HOLES M3 THD USABLE DEPTH: .16 (4) BOTH SIDE: CABLE AND SUB-D15 CONNECTOR CABLE LENGTH NPXY200: 3.3 FT (1 M) NPXY200SG: 3.9 FT (1.2 M) – TOP PLATE – 1.18 (30) 1.02 (26) 1.02 (26) 2.48 (63) NPXY100SG SQR 1.97 (50) SQR 2.36 (60) .83 (21) SQR 1.26 (32) SQR .79 ø.35 (9) (20) X Y .12 (3) MOTIONS 4 HOLES M3 THD USABLE...

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PHONE EMAIL Belgium +32-(0)0800-11 257 belgium@newport.com China +86-10-6267-0065 china@newport.com France +33-(0)1-60-91-68-68 france@newport.com Japan +81-3-3794-5511 spectra-physics@splasers.co.jp Taiwan +886 -(0)2-2508-4977 sales@newport.com.tw PHONE EMAIL Mtn. View, USA +1-800-775-5273 sales@spectra-physics.com Netherlands +31-(0)30 6592111 netherlands@newport.com United Kingdom +44-1235-432-710 uk@newport.com Germany / Austria / Switzerland +49-(0)6151-708-0 germany@newport.com Newport Corporation, Irvine, California; Mountain View, California; Tucson, Arizona; Evry and...

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NanoPositioning Linear Stages 4Pages

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NanoPositioning Linear Stages
4Pages