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MTM Series Long-Travel Steel Linear Stages

MTM Series Long-Travel Steel Linear Stages
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MTM Series Long-Travel Steel Linear Stages - 1

801 Email: sales@newport.com • Web: newport.com M o t o r i z e d P o s i t i o n i n g TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS MTM Series Long-Travel Steel Linear Stages • All-steel construction combines high stiffness and thermal stability with a low profile design • Precision ground lead screw allows for high axial loads up to 200 N • Geared versions offer 0.1 ìm resolution with high position stability • Vacuum compatible versions down to 10-6 Torr The MTM Series linear stages feature an all-steel construction and combine high stiffness and thermal stability with a low profile design. Recommended for up to 250 mm travel, MTM stages can bear up to 100 kg with an exceptional high axial load capacity up to 200 N. For durable, linear motion, opposing single-row bearing surfaces are precision-ground from tool steel. Smooth motion is provided by a diamond-corrected lead screw and a matched, precision-lapped nut. The nut design includes anti-backlash preloading and a sophisticated decoupling system that prevents lead screw eccentricity errors from affecting stage movement. All MTM stages include a center home position switch, supplemented by an index pulse signal from the encoder for precise origin location. The home position may also be set to either end of the stage’s travel via an external switch on the stage body. Motor Drive Versions Stepper-motor-driven stages are offered in four versions. Two mini-step drive versions with resolutions of 1 ìm (PP1) and 0.1 ìm (PP.1). These combine high speed positioning and smooth displacement from 1/10-step per encoder count driving mode. For ultra-smooth low-speed positioning, micro-stepping up to 250x is possible using Newport Motion Controllers. Two full-step versions with resolutions of 1 ìm (PE1) and 0.1 ìm (PE.1). These are primarily designed for applications requiring the position to be maintained within the stage’s resolution when power is switched off, such as operation in a vacuum. Two DC-motor-driven configurations are available with resolutions of 1 ìm (CC1) and 0.1 ìm (CC.1). These feature a built-in tachometer to provide superior speed stability. Design Details Base Material Stainless Steel Bearings Linear ball bearings Drive Mechanism Backlash-compensated leadscrew Drive Screw Pitch (mm) CC: 4 PP, PE: 2 Reduction Gear 10:1 on all versions with 0.1 ìm resolution additional motor mounted gear 10:1 on all PE versions Feedback CC: 4,000 pts/rev. rotary encoder with index pulse PP, PE: 2,000 pts/rev. rotary encoder with index pulse Limit Switches Mechanical Origin Centered, can be set to left or right travel limit via external switch Cable 3 m long cable included Protection Bellows Vacuum Compatibility Vacuum compatible versions are available up to 10-6 hPa using full-step motor (PE1 and PE.1) Specifications MTM (M-MTM) PP1, PE1, CC1 PP.1, PE.1, CC.1 Typical Guaranteed Typical Guaranteed Travel Range (mm) 100, 150, 200 and 250 Resolution (ìm) 1 0.1 Uni-directional Repeatability (ìm) 0.7 1.5 0.7 1.5 Reversal Value (Hysteresis) (ìm) 0.6 1.5 1 2 On-Axis Accuracy (1) (ìm) 3 5 3 5 Maximum Speed (mm/s) 40(2) (CC1), 20 (PP1), 2(3) (PE1) 4 (CC.1), 2 (PP.1), 0.2(3) (PE.1) áy Pitch (1) (ìrad) 25 40 25 40 áz Yaw (1) (ìrad) 20 35 20 35 Weight [lb (kg)] MTM100CC1 (M-MTM100CC1): 22 (10), MTM150CC1 (M-MTM150CC1): 25.4 (11.5), MTM200CC1 (M-MTM200CC1): 28.7 (13), MTM250CC1 (M-MTM250CC1): 32 (14.5) (1) For 100 mm travel (2) 20 mm/s for vertical usage with maximum Cx (3) With V6 versions the maximum speed is reduced by a factor of two See the Motion Control Metrology Primer section (see page 775) for more information on typical and guaranteed specifications Load Characteristics — Cx + Cx káy káx Z Q D Y Cz X Cz, Normal center load capacity on bearings 1000 N +Cx, Direct load capacity on X axis 200 N (PE1, PE.1, PP.1) 150 N (PP1, CC.1) 100 N (CC1) -Cx, Inverse load capacity on X axis 50 N káx, Compliance in roll 5 ìrad/Nm káy, Compliance in pitch 10 ìrad/Nm Q, Off-center load QCz / (1 + D/100) D, Cantilever distance in mm

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MTM Series Long-Travel Steel Linear Stages - 2

802 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS Ordering Information Model Description MTM100CC.1 (M-MTM100CC.1) MTM linear stage, 100 mm travel, 0.1 ìm resolution, DC drive MTM100CC1 (M-MTM100CC1) MTM linear stage, 100 mm travel, 1 ìm resolution, DC drive MTM100PE.1 (M-MTM100PE.1) MTM linear stage, 100 mm travel, 0.1 ìm resolution, full-step drive MTM100PE1 (M-MTM100PE1) MTM linear stage, 100 mm travel,...

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MTM Series Long-Travel Steel Linear Stages - 3

M o t o r i z e d P o s i t i o n i n g 803 Email: sales@newport.com • Web: newport.com TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS Stacking MTM Series stages either together or with other Newport stages is easily accomplished using optional Captive Screws (M-CAP-M61). Shown here are the assembly patterns used. These interfaces are accessed by removing the upper and lower plates of the stages. For assemblies requiring precise orthogonality (<50 ìrad), please consult a Newport...

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