32 Precision Motion Control SPECIAL BEAM MOTORIZED CONTROLLERS HEXAPODS MOTORIZED MOTORIZED MOTORIZED MOTORIZED COLLECTIONS MANAGEMENT OPTICAL MOUNTS AND DRIVERS LINEAR ACTUATORS ROTATION STAGES VERTICAL STAGES LINEAR STAGES Stage Selection Guide Motorized Linear Stages from Newport and New Focus are designed and built with over 50 years of experience in providing solutions to many markets including research and academia, industrial, semiconductor, aerospace and defense. Starting from the XM family of direct drive ultra-precision stages to the compact Agilis piezomotor linear stage, there are over 200 models of stages to choose from. Many more linear positioning solutions can be created by matching our popular manual stages with the wide selection of compatible motorized actuators. Linear motorized stages can be selected based on Travel, Minimum Incremental Motion, Repeatability, Accuracy, Speed, etc. To begin, use the selection guides below with more details in the following product family pages. Mid-Range Travel Linear Stage Selection GTS Series High-Precision Linear Stages see page 37 ILS Series High-Performance Mid-Range Travel Linear Motor Stages see page 39 FMS Series Linear Metrology Stages see page 54 MTN Series Mid-Travel Steel Linear Stages see page 56 UTS Series Mid-Travel Steel Linear Stages see page 58 FCL Series Intelligent Stepper Motor Linear Stages see page 62 One-XY Integrated XY Linear Stages see page 64 Minimum Bi-directional Travel Range Incremental Motion Repeatability Accuracy Maximum Centered Load Speed Capacity

Precision Motion Control 33 Minimum Bi-directional Travel Incremental Repeatability Accuracy Maximum Centered Load Speed Capacity Agilis™ Series Piezo Motor Driven Linear Stages see page 67 Linear Stages with Integrated Picomotors see page 70-76 Depends on actuators and stages used Picolis Integrated Picomotor Linear Stage see page 77 Depends on actuators and stages used Long-Range Travel Linear Stage Selection Series Minimum Bi-directional Travel Range Incremental Repeatability Accuracy Maximum Centered Load Speed Capacity IMS Series High-Performance Long-Travel Linear Stages see page 42 Newport’...

34 Precision Motion Control SPECIAL BEAM MOTORIZED CONTROLLERS HEXAPODS MOTORIZED MOTORIZED MOTORIZED MOTORIZED COLLECTIONS MANAGEMENT OPTICAL MOUNTS AND DRIVERS LINEAR ACTUATORS ROTATION STAGES VERTICAL STAGES LINEAR STAGES Ultra-Precision Linear Motor Stages • Ultra-high Performance with 1 nm Minimum Incremental Motion • Non-contact, direct-drive system for ultra-precision, high dynamics & reliability • Sub-nm, high precision glass scale encoder with 80 nm repeatability • Extra-large, ironless, high-efficiency linear motor minimizes heat generation • Ultra-quiet anti-creep crossed roller bearings...

Precision Motion Control 35 1. Maximum speed is driver dependent. Contact Newport for additional information. 2. MIM depends on driver type and environment, refer to data sheet for more information. 3. Continuous motor force is driver dependent. Contact Newport for additional information. 4. Middle 80% o travel. To obtain arcsec units, divide the prad value by 4.8. 5. Middle 80% o travel. Load CharacteristicsModel XMS50-S XMS100-S Cz, Normal centered load capacity (N) 100 Kax, Compliance in roll (mrad/Nm) 3.5 2.0 Kay, Compliance in pitch (mrad/Nm) 6.0 2.5 Cz Normal centered load capacity on bearings...

36 Precision Motion Control SPECIAL BEAM MOTORIZED CONTROLLERS HEXAPODS MOTORIZED MOTORIZED MOTORIZED MOTORIZED COLLECTIONS MANAGEMENT OPTICAL MOUNTS AND DRIVERS LINEAR ACTUATORS ROTATION STAGES VERTICAL STAGES LINEAR STAGES Ordering Information Model Description XMS50-S Ultra-Precision Linear Motor Stage, 50 mm Travel, XMS Series XMS100-S Ultra-Precision Linear Motor Stage, 100 mm Travel, XMS Series XMS160-S Ultra-Precision Linear Motor Stage, 160 mm Travel, XMS Series XML210-S Ultra-Precision Linear Motor Stage, 210 mm Travel, XML Series XML350-S Ultra-Precision Linear Motor Stage, 350 mm Travel,...

Precision Motion Control 37 • Ultra-quiet, anti-creep crossed roller bearings for outstanding straightness and flatness without cage migration • Integrated encoder with exceptional 100 nm MIM, which ensures highly repeatable and accurate motion • Low friction ball screw drive minimizes stick and slip effects • Long-term strength and stability • Plug and Play - ESP compatible The GTS Series combines the straightness and flatness of crossed-roller bearing stages with improved accuracy and repeatability of higher-end stages. Time (s) GTS stages deliver 100 nm motion sensitivity with high reliability...

38 Precision Motion Control Load Characteristics and Stiffness SPECIAL BEAM MOTORIZED CONTROLLERS HEXAPODS MOTORIZED MOTORIZED MOTORIZED MOTORIZED COLLECTIONS MANAGEMENT OPTICAL MOUNTS AND DRIVERS LINEAR ACTUATORS ROTATION STAGES VERTICAL STAGES LINEAR STAGES Cz, Normal centered load capacity 100 N -Cx, +Cx, Axial load capacity 25 N 20 N Kax, Compliance in roll 10 mrad/Nm 5 mrad/Nm Kay, Compliance in pitch 10 mrad/Nm 5 mrad/Nm Kaz, Compliance in yaw 10 mrad/Nm 5 mrad/Nm Where D = Cantilever distance in mm MODEL SHOWN: GTS150 DIMENSIONS IN INCHES IAND MILLIMETERS) See our website for CAD files...

Precision Motion Control 39 Stiff, FEM optimized extruded aluminum body prevents thermal bending effects Precision recirculating ball bearing slides provide accurate linear motion without ball cage migration 50-300mm of travel Ideal for extended use in light industrial applications Plug and Play - ESP compatible The ILS Series is a robust line of sub-micron resolution linear stages, constructed with a light, stiff aluminum body and reliable components capable of high-duty cycle applications. Dynamic Specifications (LM Models) Model Maximum Acceleration, No Load (m/s2) For the definition of specifications,...

SPECIAL BEAM MOTORIZED CONTROLLERS HEXAPODS MOTORIZED MOTORIZED MOTORIZED MOTORIZED COLLECTIONS MANAGEMENT OPTICAL MOUNTS AND DRIVERS LINEAR ACTUATORS ROTATION STAGES VERTICAL STAGES LINEAR STAGES Ordering Information Model Series Travel Drive (mm) M- Example: The ILS150HA is an ILS stage with 150 mm travel, a DC motor drive with linear encoder, in English version. 11 Only for LM drive version. 2) 100, 200 and 300 mm travels only. M-: For metric version HA: DC motor with linear encoder Recommended Motion Controllers XPS-RL see page 153 XPS-D ESP301 SMC100 see page 159 ILSCCL and ILSPP only Driver...