High Performance Air Bearing Stage Capabilities & Solutions 50 years of proven performance, expertise and experience For Motion, Think Newport Experience | Solutions

Advancing Life & Health Sciences Table of Contents About Us … … … … … … … … … … … … … … … 2 Model Presentation Overview of Air Bearing Products … … … … … … … 4 SinguLYS™ - Dedicated single axis air bearing stage and bridge designs for scanning applications … … … 15 DynamYX® - Family of Stages for Semiconductor Wafer Processing and Inspection … … … … … … … … … 5 Model Presentation ZT3 z tip tilt theta with active plane technology … … 18 Open Frame Capability Newport’s Differentiating Design Philosophy … … … 19 HybrYX – High-Performance Solutions for Semiconductor Wafer inspection, Flat Panel,...

High Performance Air Bearing Stage Capabilities & Solutions OEM – Developing for the Future Our dedicated OEM group focuses solely on the unique requirements of OEM customers. This experienced, professional department was developed as a small worldwide group within a large company – hence, you get the best of both worlds. Draw upon the resources that a large company offers and get the individualized service and rapid response of a small company. Your Project Matters Our OEM strategy is to offer our customers a competitive advantage in their marketplace by providing direct access to our expert...

High Performance Air Bearing Stage Capabilities & Solutions Overview of Air Bearing Products Newport’s reputation for being the premier supplier of high-precision motorized stages is exemplified by our full line of Air Bearing Positioning Systems. Whether you select the DynamYX® Datum™ capable of 5 G acceleration and nanometer accuracy, the evolutionary HybrYX® air and mechanical bearing “hybrid” stage or the newly released SinguLYS® that combined a lot of the advanced features of the previous models into a single axis solution, Newport has the knowledge and expertise needed to address the most...

High Performance Air Bearing Stage Capabilities & Solutions DynamYX® Family of Stages for Semiconductor Wafer Processing and Inspection With the launch of the 300mm wafer initiative more than a decade ago, DynamYX was designed to provide equipment manufacturers in the semiconductor industry with a tool capable of achieving the highest levels of precision and throughput. DynamYX provides high resolution dynamic positioning of a wafer chuck or other similar substrate in two orthogonal translation axes from a singleplane carriage. A Vertical (Z) axis with Tip Tilt function and a rotary axis for...

High Performance Air Bearing Stage Capabilities & Solutions single X-axis control signal is split and fed into two amplifier channels where the output force is biased according to the linear motor ratings and total payload. Most linear motors on the market were designed without focusing on the real needs of precision motion control applications where mass limits and efficiency are most critical. Newport air bearing stages benefit from our commitment to providing the highest possible performance by incorporating motors developed in-house that are optimized for the products and applications they...

High Performance Air Bearing Stage Capabilities & Solutions DynamYX® Datum™ Ultra-High Performance Stage Full throughput performance of the DynamYX Datum stage is realized when configured with a ceramic chuck. Ceramic chucks offer lower mass and improved flatness compared with metallic designs. An added benefit of using a ceramic chuck on a DynamYX stage is that the thermal expansion coefficients of the chuck and stage are matched which allows for the chuck to be directly mounted to the XY carriage. This direct mounting provides for the flattest and most thermally stable wafer surface possible...

High Performance Air Bearing Stage Capabilities & Solutions DynamYX® GT High-Throughput Stage Key Features • Similar in design to the DynamYX 300 model, this GT stage is intended for high-throughput applications with aggressive duty-cycles • Acceleration: 1.2G X-Axis, 2.0G Y-Axis • Extremely rigid structure and high load capacity air bearings provides up to 2G acceleration • Velocity: 800mm/sec • Repeatability: ±50nm (long term) Travel Range: 520mm by 350mm • High-efficiency X and Y linear motors with integrated cooling drive moving masses through respective center of gravity locations Please...

High Performance Air Bearing Stage Capabilities & Solutions 9 DynamYX® 300, GT, & DATUM Specification Summary Email: [email protected] • Web: newport.com/motion

High Performance Air Bearing Stage Capabilities & Solutions Open Frame Capability Newport's Air Bearing stages may be configured to support applications requiring an open-frame or transmitted light architecture. Examples of such applications include reticle inspection & repair, LED scribing, precision pick-and-place assembly. All open-frame air bearing solutions are based on the same single plane architecture found in the DynamYX or HybrYX stages. When configured to allow simultaneous top and bottom viewing of the substrate/payload a cantilevered SiC Ceramic frame is mounted to the XY air bearing...

High Performance Air Bearing Stage Capabilities & Solutions HybrYX® – High-Performance Solutions for Semiconductor Wafer Inspection, Flat Panel, PCB and Photovoltaic Applications The HybrYX® single plane XY hybrid stages offers the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovoltaic panel) inspection and processing tools. Innovative Architecture HybrYX stages blend the cost-effectiveness...