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Metrology Positioning System
Metrology Positioning System
The document describes the Advanced System Metrology Positioning System, highlighting its key features, applications, and specifications. The system is designed for precise measurement and characterization of sensors and visual arrays, offering a 6-axis absolute accuracy of 50 µm.
Key Features
- 6-Axis absolute accuracy: 50 µm
- Specialized repeatable mechanical interface for testing different products without recalibration
- Verified accuracy through proprietary tooling, processes, and metrology software
Application
The system serves as a motion engine for a 6D Metrology Sub-System, used to measure and characterize specific areas and points on various sensors and visual arrays.
Specifications
- Translations X & Y:
- Travel range: 200 mm
- Max. speed: 40 mm/s
- Resolution: 0.1 µm
- Accuracy: 6 µm
- Kappa Goniometer (Omega / kappa / phi) (N-3020K):
- Travel range: ±170° (360° with phi)
- Max. speed: 16 °/s
- Resolution: 0.001 °
- Sphere of confusion: 20 µm
- Load: 1 kg at 50 mm
- Translation Z:
- Travel range: 300 mm
- Max. speed: 8 mm/s
- Resolution: 1 µm
- Accuracy: 8 µm
- Load: 30 kg
- Overall System:
- Mass: 1,000 kg
- Dimensions: 1340 x 1000 x 1840 mm
Compliance and Certification
Newport Corporation, located in Irvine, California, is certified compliant with ISO 9001 by the British Standards Institution.
Contact Information
Contact details for Newport Corporation's offices in various countries including Belgium, France, Germany/Austria, Italy, Netherlands, Sweden/Denmark, United Kingdom/Ireland, and the USA are provided for further inquiries.
Catalog excerpts
S Y S T E M B U S I N E S S U N I T Advanced System Metrology Positioning System Key Features • 6-Axis absolute accuracy: 50 ìm Application 6D Metrology Sub-System The system is used as the motion engine for a system that measures and characterizes specific areas and points on various sensors and visual arrays. A specialized repeatable mechanical interface allows users to test different products without recalibrating the system references between tests. Absolute system accuracy of 50 ìm is verified through the use of proprietary tooling, processes and metrology software. iinstalllled iin 2002
Open the catalog to page 1
S Y S T E M B U S I N E S S U N I T Newport Corporation, Irvine, California, has been certified compliant with ISO 9001 by the British Standards Institution. Belgium France Germany/Austria Italy Newport B.V. MICRO-CONTROLE Newport GmbH Newport/Micro-Controle Italia Tel: +32-(0)1 6402927 Tel.: +33-(0)1-60-91-68-68 Tel.: +49 (0) 61 51 / 708 -0 Tel.: +39-(0)2-929-0921 Fax: +32-(0)1 6402227 Fax: +33-(0)1-60-91-68-69 Fax: +49 (0) 61 51 / 708 -954 Fax: +39-(0)2-923-2448 [email protected] [email protected] [email protected] [email protected] Netherlands Sweden/Denmark United Kingdom/Ireland...
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