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IMS-LM Series High-Performance Long-Travel Linear Motor Stages

IMS-LM Series High-Performance Long-Travel Linear Motor Stages
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IMS-LM Series High-Performance Long-Travel Linear Motor Stages - 1

M o t o r i z e d P o s i t i o n i n g 791 Email: sales@newport.com • Web: newport.com TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS IMS-LM Series High-Performance Long-Travel Linear Motor Stages • Stiff body design allows for rigid XY assemblies up to 600 mm x 600 mm travel • Non-contact direct-drive system provides high dynamic response and high reliability in a small footprint • High-efficiency ironcore linear motor minimizes heat generation for rapid and repeatable point-to-point positioning • Recirculating bearings with caged balls assure ultraquiet motion • High resolution linear encoder feedback provides accurate positioning with sub-ìm repeatability The IMS-LM series linear stages are designed for self-supporting applications with travel ranges from 300 mm to 600 mm. The stages feature a robust design with high performance but with low cost, making them cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, pick and place, DNA sequencing, or laser machining. Based on the industry proven technology of the ILS and IMS, the IMS-LM series utilizes a FEM optimized aluminum extruded body that is extremely stiff, while minimizing the bending effect caused by different thermal expansion coefficients of the aluminum body and the steel rails. Unlike screw driven stages, the IMS-LM employs a centrally-located linear motor as the driving element. This drive system is absolutely noise-free and has the advantage of higher speed, acceleration and system responsiveness without the wear associated with motor brushes or drive screws. With the fully integrated linear motor, the IMS-LM is more than 100 mm shorter than a comparable screw driven stage. Thus, the IMS-LM is the optimum solution for space constrained applications that require high-throughput, high reliability, and ultra-quiet operation. The IMS-LM uses a high efficiency 3-phase synchronous ironcore linear motor. While ironcore linear motors are often known for cogging and high attractive forces, their efficiency is almost twice as high as those of ironless linear motors. This results in higher acceleration and significantly less heat generation which is often limiting the performance of rapid point-to-point positioning. Recirculating ball bearing slides with caged balls provide excellent payload capabilities and long life. The ball separators in the recirculating elements ensure superior smooth movement, lower noise, and longer service life compared to uncaged ball bearing slides. Precision position feedback is supplied by a highly repeatable linear scale mounted inside the stage. The encoder signals are interpolated by Newport’s XPS motion controller with sub-nm resolution for outstanding position sensitivity, repeatability, and stability. Absolute home position and limit signals are incorporated on the same scale avoiding the use of additional electronics or mechanics for improved reliability and accuracy. Contact Newport to learn about our micropositioning calibration services needed for critical positioning applications. Upon request, we will create, implement and verify an electronic compensation routine to improve the absolute position accuracy of IMS-LM stages to 1 ìm/100mm when used with our XPS advanced motion control system. A certificate of calibration along with measured error maps is included. Time (s) -40 0 40 80 120 160 200 0 5 10 15 20 25 Position (nm) Interferometer position Setpoint position IMS-LM stages are capable of performing very small incremental motions with high accuracy and reliability. Position (mm) -2.0 -1.5 -1.0 -0.5 0.0 0.5 1.0 1.5 2.0 -80 -60 -40 -20 0 20 40 60 80 Error (ìm) Accuracy of an IMS300LM stage after compensating for linear errors. The data was taken dynamically at a rate of 10 kHz while the stage was moving at a speed of 50 mm/s. Both, the encoder and the interferometer position were acquired by a XPS motion controller with a latency of less an 50 ns between the different signals. Position (mm) IMS300LM, 500 mm/s, 1 kHz data rate 499.0 499.2 499.4 499.6 499.8 500.0 500.2 500.4 500.6 500.8 501.0 -50 -40 -30 -20 -10 0 10 20 30 40 50 Speed (mm/s) IMS-LM stages provide outstanding speed stability for continuous scanning and laser machining applications.

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IMS-LM Series High-Performance Long-Travel Linear Motor Stages - 2

792 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS Dimensions Dimension (mm) Model (Metric) A n1 B n2 Travel L1 IMS300LM (M-IMS300LM) 150 4 5 in. 4 300 555 IMS400LM (M-IMS400LM) 150 4 5 in. 4 400 655 IMS500LM (M-IMS500LM) 150 4 5 in. 6 500 755 IMS600LM (M-IMS600LM) 150 6 5 in. 6 600 855 L 7.05 (179) .83 (21) 3.54 (90) 1.10 (28) .83 (21) 7.09 (180) B B B A A A n1 x 2 HOLES CLR FOR M6 SCREWS n2 x 2 HOLES CLR...

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