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ILS Series High-Performance Mid-Range Travel Linear Stages

ILS Series High-Performance Mid-Range Travel Linear Stages
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ILS Series High-Performance Mid-Range Travel Linear Stages - 1

798 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS Specifications ILS (M-ILS) PP CC,CCL(2) CCHA Typical Guaranteed Typical Guaranteed Typical Guaranteed Travel Range (mm) 50, 100, 150, 200, 250 Resolution (ìm) 0.5 0.1 Uni-directional Repeatability (ìm) 0.7 1.5 0.7 1.5 0.2 0.4 Reversal Value (Hysteresis) (ìm) 0.4 1 0.4 1 0.1 0.3 On-Axis Accuracy(1) (ìm) 2.5 5 2.5 5 2 4 Maximum Speed (mm/s) 50 100(3) 100 Pitch(1) (ìrad) 40 100 40 100 40 100 Yaw(1) (ìrad) 55 100 55 100 55 100 MTBF (h) 20,000 Weight [lb (kg)] ILS50CC (M-ILS50CC) : 9.3 (4.2), ILS100CC (M-ILS100CC) : 9.9 (4.5), ILS150CC (M-ILS150CC) : 10.6 (4.8), ILS200CC (M-ILS200CC) : 11.2 (5.1), ILS250CC (M-ILS250CC) : 11.9 (5.4) 1) For 100 mm travel 2) Select ILSCCL only for use with the SMC100CC controller. 3) 50mm/s with ILSCCL See the Motion Control Metrology Primer section (see page 775) for more information on typical and guaranteed specifications ILS Series High-Performance Mid-Range Travel Linear Stages • High stiffness, FEM optimized extruded aluminum body avoids thermal bending effects • Preloaded, backlash-free ballscrew drive allows rapid movements with short step and settling time • Precision recirculating ball bearing slides provide accurate linear motion without ball cage migration The ILS Series linear stage offers 50–250 mm travel range and combines fast, sub-micron resolution motion in a highly stiff and robust package. Its extruded aluminum body has been optimized to avoid bending effects caused by the different thermal expansion coefficients of the aluminum body and steel rails. The special U-profile also provides stiffness to the structure while keeping the mass low. A preloaded, backlash-free ballscrew provides rapid movements with fast step and settling times. The screw is accurately profiled to reduce heating to a minimum and extend the life of the stage. Recirculating ball bearing slides ensure accurate linear motion and eliminate ball cage migration found on typical linear ball bearings or crossed roller bearings. Accessories Use EQ120 bracket to mount ILS or RV stages in a vertical configuration. Two IMS stages (see page 793), one ILS stage, and one EQ120 bracket in an XYZ configuration. An RVS80 (see page 814) mounted in a vertical configuration with an EQ120 bracket to an ILS stage. Design Details Base Material Extruded Aluminum Bearings Double-row recirculating ball bearings Drive Mechanism Backlash-free ball screw Drive Screw Pitch (mm) 2 Feedback CC, CCL, PP: Screw mounted rotary encoder, 4,000 pts/rev, index pulse CCHA: Linear steel scale, 20 ìm signal period, 0.1 ìm resolution Limit Switches Optical Origin Optical, at center of travel, including mechanical zero signal Motor CC, CCL: DC servo motor UE404S2 CCHA: DC servo motor with tachometer UE404S2-T PP: 2-phase stepper motor UE41UP, 1 Full step = 20 Encoder pulses Cable 3 m long cable included Position measurements are read with a 4000 pts/rev. encoder located directly on the screw, avoiding screw/motor coupling errors. For more demanding precision positioning requirements, the CCHA version features an integrated linear scale providing 0.1 ìm resolution feedback. An added tachometer provides superior speed stability for slow speed scanning applications and also prevents unwanted sub-micron position errors which may be caused by imperfect brush DC motor commutation. An upper rigid cover prevents damage to the drive train and protects it from dust, debris and other pollutants. ILS Series stages also feature an origin located at the center of travel for repeatable initialization, limit switches to prevent over travel, and elastomeric end-of-run dampers for smooth emergency braking.

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ILS Series High-Performance Mid-Range Travel Linear Stages - 2

M o t o r i z e d P o s i t i o n i n g 799 Email: sales@newport.com • Web: newport.com TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS Load Characteristics Cz, Normal center load capacity on bearings 250 N +Cx/-Cx, Direct/Inverse load capacity on X axis <40 N káx, Compliance in roll 15 ìrad/N.m káy, Compliance in pitch 10 ìrad/N.m káz, Compliance in yaw 10 ìrad/N.m Q, Off-center load QCz/(1 + D/60) D, Cantilever distance in mm káy káx Z Q D Y Cz X – Cx + Cx Model Description ILS100CC...

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ILS Series High-Performance Mid-Range Travel Linear Stages - 3

800 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS ILS (M-ILS) Stages Top Plate Interface ILS (M-ILS) interfaces with Mounting holes on stage Interface & Screws MFA 4 holes Ø 7.5 on 75.8 x 25.4 Base Plate— 1/4-20 x 12 (M6 x 12) M-UZS80 4 holes Ø 7.5 on 101 x 50.4 Base Plate— 1/4-20 x 12 (M6 x 12) M-BGS80 4 holes Ø 7.5 on 101 x 50.4 Base Plate— 1/4-20 x 12 (M6 x 12) M-BGS50 4 holes Ø 7.5 on 75.8 x 25.4 Base...

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