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High-Performance Precision Rotation Stages

High-Performance Precision Rotation Stages
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High-Performance Precision Rotation Stages - 1

Performance Rotation Stages The RV Series rotation stages provide high-precision angular • Precision 80-350 mm diameter rotation stages positioning accuracy combined with high load capacity. There are five stage sizes and six drive configurations available, • Monolithic design ensures high structural stiffness optimizing load capacity, torque, speed and resolution for a variety of operating conditions. •Ideal for hi9h"load aPPlication All RV stages are constructed of tool steel, with rotation accuracy ensured by ground bearing surfaces. A double row of preloaded bearings allows for high off-center loads in a reduced footprint. The single monolithic design offers improved stiffness without compromising dynamic performance. The largest RV stage can bear up to 6500 N or rotate up to 80 °/s, while maintaining less than 4 um eccentricity. • High-accuracy versions with direct reading encoder and better than 0.0001° (0.36 arcsec) resolution DESIGN DETAILS Precise rotation is ensured by a precision ground and hardened worm gear. A rotary encoder mounted on the worm gear shaft provides 0.001° position feedback resolution (0.00025° resolution with RVS80CC) on the standard configurations. For more demanding applications, the HAT and HAHLT options are available on the RV120 to RV350 models. These stages are equipped with a direct reading optical encoder attached to the moving platen for superior resolution and accuracy. The selection of the drive configuration should be based on the precision and speed requirements relative to the inertia of the payload. Motor Drive Versions Stepper motor-driven stages are available in full step BPE and mini-step PP or BPP versions. The mini-step drive version enables high angular speed motions up to 20 °/s. The larger models, RV120BPP to RV350BPP, feature a worm mounted rotary encoder for improved accuracy and repeatability. The encoder also provides a method for detecting motor stalling, an important feature for applications with high acceleration ramps and high torques or payload inertias. CVf Newport” Base Material Bearings Drive Mechanism Worm Gear Ratio Limit Switches Origin Cable Length Vacuum Compatibility Stainless Steel Double row ball bearings Ground worm gear with self compensating preload RVS80: 1:180 RV120 to RV350: 1:90_ RVS80CC: Worm mounted rotary encoder, 8,000 pts/rev, Index pulse RVS80PP: None. One full-step equals 0.01° RV120 to RV350: • except for HAT and HAHLT versions: Worm mounted rotary encoder, 4,000 pts/rev, Index pulse • HAT and HAHLT versions: Direct reading optical encoder on the rotating platen, 20 mm signal period Optical, at ±170°, can be disabled for continuous rotation (except HAT, HAHL and HAHLT versions)_ Optical 3 m cable included Vacuum compatible versions are available up to 10-6 hPa using full-step motor, in this case, max. speed and load capacity have to be divided by two RVS80: 4.0 (1.8) RV120: 14.3 (6.5) RV120HAT: 17.6 (8)

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High-Performance Precision Rotation Stages - 2

The RVS80PP does not use an encoder. Instead, position is attained by the number of commanded steps and micro-steps. The high output torque of the stepper motor, combined with extensive performance tests, ensures position accuracy as long as the recommended load, torque and payload inertia are not exceeded. The RVS80PP provides very high motion sensitivity with good linearity between commanded micro-steps and the actual motion of the stage at a very reasonable price. The full-step PE version is equipped with a reduction gear providing higher torque. This version is only available on the...

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High-Performance Precision Rotation Stages - 3

HIGH-PERFORMANCE PRECISION ROTATION STAGES 60 50 40 30 a 20 10 0 0 0.2 0.4 0.6 0.8 1 1.2 1.4 1.6 1.8 2 Uni-directional repeatability plot for RV Series stages. The typical (mean) uni-directional repeatability is 0.001°. The guaranteed value is 0.002°. RV (Different Sizes) 30 • 25 • 20 • ~ n r On-axis accuracy plot for RV Series stages. The typical (mean) on-axis accuracy is 0.001°. The guaranteed value is 0.002°. Reversal value (Hysteresis) plot for RV Series stages. The typical (mean) reversal value is 0.001°. The guaranteed value is 0.002°. LOAD...

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High-Performance Precision Rotation Stages - 4

TORQUE AND PAYLOAD INERTIA This table lists the maximum torque and the maximum payload inertia for all RV rotation stages. The maximum payload inertia equals the maximum kinetic energy that the rotation stage can absorb in the event of a sudden stop at the maximum speed. Likewise, this is the maximum inertia to accelerate from stop to the maximum stage speed in 250 ms. Some RV stages can handle higher payload inertias at reduced speed. For detailed information, please contact a Newport Applications Engineer. Model This Azimuth/Elevation gimbal system positions a 350 mm dia. mirror that...

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High-Performance Precision Rotation Stages - 5

A-A 2 x 4 HOLES M3 THD ON ø2.24 (Ø 57), DEPTH: .16 (4) TOP AND BOTTOM HOLES ARE ALIGNED A SUB-D15M CONNECTOR MODEL SHOWN: RVS80CC DIMENSIONS IN INCHES (AND MILLIMETERS)

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High-Performance Precision Rotation Stages - 6

ROTATION STAGE, FOLDED MOTOR MODEL L_M_L_ MODEL R STUVWXY Za b ca

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High-Performance Precision Rotation Stages - 7

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High-Performance Precision Rotation Stages - 8

RV SERiES HIGH-PERFORMANCE PRECISION ROTATION STAGES ORDERING INFORMATION Direct Motor Versions Models Full-step & vacuum preparation - RV120BPEV6 RV160BPEV6 RV240BPEV6 RV350BPEV6 Vacuum compatible to 10-6 hPa. In this case, max. speed and load capacity have to be divided by two. DC RVS80CC RV120CC RV160CC RV240CC RV350CC HAT: DC & integral optical encoder - RV120HAT RV160HAT RV240HAT RV350HAT CCHL: DC & gear reduction - RV120CCHL RV160CCHL RV240CCHL RV350CCHL HAHLT: CCHL version & integral optical encoder -...

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