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High-Energy Excimer Laser Mirrors

High-Energy Excimer Laser Mirrors
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O p t i c s 603 Email: sales@newport.com • Web: newport.com WINDOWS BEAMSPLITTERS OPTICAL FILTERS POLARIZATION OPTICS DIFFRACTION GRATINGS HIGH-ENERGY OPTICS ULTRAFAST LASER OPTICS ACCESSORIES High-Energy Excimer Laser Mirrors Designed for the most demanding UV applications, our high-energy excimer laser mirrors have low loss dielectric coatings to minimize scatter and maximize reflected energy. 25.4 or 50.8 mm diameter mirrors are available for ArF (193 nm), KrF (248 nm), XeCl (308 nm), and XeF (351–353 nm) lasers. • Low loss dielectric coatings • High damage threshold • 0° or 45° incidence angle Specifications Material UV grade fused silica Surface Flatness S1 ë/10 at 632.8 nm over the clear aperture Clear Aperture central 80% of diameter Surface Quality 10-5 scratch-dig Diameter Tolerance +0/-0.25 mm Thickness Tolerance ±0.5 mm Wedge 3 arc min Chamfers 25.4 mm: 0.25–0.76 mm face width x 45° ±15° 50.8 mm: 0.38–1.14 mm face width x 45° ±15° Durability MIL-C-675C adhesion and abrasion, MIL-C-14806 Cleaning Non-abrasive method, acetone or isopropyl alcohol on lens tissue recommended (see page 622) Damage Threshold 1 MW/cm2 CW, 1 J/cm2 with 10 nsec pulses at the center wavelength, typical 100 95 90 85 80 0.8 1.0 1.2 EM.x0 0° Normalized Wavelength Reflectance (%) Typical 100 95 90 85 80 0.8 1.0 1.2 S P EM.x5 45° Normalized Wavelength Reflectance (%) Typical EM.40 0° 100 95 90 85 80 0.8 1.0 1.2 Normalized Wavelength Reflectance (%) Typical 100 95 90 85 80 0.8 1.0 1.2 EM.45 45° Normalized Wavelength Reflectance (%) Typical Unpol. Coatings Laser Type Wavelength (nm) Angle of Incidence Reflectivity Coating Code ArF 193 0° R>98% EM.40 KrF 248 0° R>99% EM.10 XeCl 308 0° R>99% EM.20 XeF 351–353 0° R>99% EM.30 ArF 193 45° Runpol >95% EM.45 KrF 248 45° Rs, Rp >99% EM.15 XeCl 308 45° Rs, Rp >99% EM.25 XeF 351–353 45° Rs, Rp >99% EM.35 SUPREMA® Series Optical Mounts page 637 605 Series Precision Gimbal Mounts page 664

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604 O p t i c s Phone: 1-800-222-6440 • Fax: 1-949-253-1680 WINDOWS BEAMSPLITTERS OPTICAL FILTERS POLARIZATION OPTICS DIFFRACTION GRATINGS HIGH-ENERGY OPTICS ULTRAFAST LASER OPTICS ACCESSORIES Ordering Information Wavelength (nm) Diameter (mm) Thickness (mm) Model Model 0° Angle of Incidence 45° Angle of Incidence 193 25.4 6.35 10QM20EM.40 10QM20EM.45 248 25.4 6.35 10QM20EM.10 10QM20EM.15 308 25.4 6.35 10QM20EM.20 10QM20EM.25 351–353 25.4 6.35 10QM20EM.30 10QM20EM.35 193 50.8 9.53 20QM20EM.40 20QM20EM.45 248 50.8 9.53 20QM20EM.10 20QM20EM.15 308 50.8 9.53 20QM20EM.20 20QM20EM.25 351–353...

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High-Energy Excimer Laser Mirrors 2Pages

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High-Energy Excimer Laser Mirrors
2Pages