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GTS30V High-Precision Vertical Linear Stage

GTS30V High-Precision Vertical Linear Stage
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GTS30V High-Precision Vertical Linear Stage - 1

GTS30V Advantages The GTS30V is the ideal foundation for applications that require long travel vertical motion of horizontally oriented samples. Its low profile and high-precision motion capabilities make this stage an excellent choice for applications such as semiconductor wafer inspection, nanotechnology, automated device alignment, metrology, and quality control processes. When combined with our XM, GTS, VP, ILS, or IMS series of linear stages, the GTS30V is a space-saving alternative to traditional XYZ stacks of stages, and provides unobstructed access to the payload from any side. Furthermore, centering the payload over the bearings, ensures less cantilevering load effects and Abbe induced motion errors. High-precision vertical motion is achieved using a direct vertical guiding system composed of matched pairs of anticreep crossed roller bearings. Compared to alternative wedged designs, this direct guiding method provides consistently lower and more repeatable runout errors. In addition, the lack of any re-circulating elements in the bearings leads to outstanding ripple-free motion required in high-sensitivity focus adjustments. Lastly, the geared retainers prevent bearing cage migration, a problem often found with other linear bearings, especially in vertical arrangements. • 30 mm of precision vertical travel in a compact unit • Ideal for horizontal samples, the GTS30V offers unobstructed access to the payload from any side • Direct vertical guiding system minimizes runout errors • Anti-creep crossed roller bearings ensure ripple-free motion without cage migration • Integrated linear encoder with 50 nm resolution provides high sensitivity and ensures highly repeatable and accurate motion GTS30V High-Precision Vertical Linear Stage

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GTS30V High-Precision Vertical Linear Stage - 2

Design Details Specifications A folded DC motor with a precision ground, low friction lead screw arrangement delivers ultrasmooth motion and does not back drive even at high loads. A reduction belt between the motor and the lead screw increases the available output torque, reduces the servo sensitivity and ensures 100 nm minimum incremental motion with all Newport motion controllers and drivers. Precision position feedback is provided by an optical scale with 50 nm resolution. Compared to alternative designs featuring a screw mounted rotary encoder, this direct position feedback avoids...

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GTS30V High-Precision Vertical Linear Stage - 3

A typical assembly with an ILS250 linear stage, a GTS30V vertical stage and a URS100 rotation stage. A typical XYZ assembly with a GTS30V vertical stage and two VP-25XA stages. Ordering Information Model Description GTS30V High-Precision Vertical Linear Stage Motion Controller Options Load Characteristics and Stiffness káz káx .51 (13) káy .75 (19) X Y Z Q D Cz Cz, Normal centered load capacity 40 N káx, Compliance in roll 40 ìrad/N.m káy, Compliance in pitch 40 ìrad/N.m káz, Compliance in yaw 25 ìrad/N.m Qx, Qy, Off-center load Q Cz/(1 + D/30) D max., Cantilever distance 100 mm For optimum...

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GTS30V High-Precision Vertical Linear Stage - 4

(130 +25) .97 (24.75) .39 (10) -5 5.12 +.98 -.20 SQ 4.53 (115) SQ 4.57 (116) 4.63 (117.5) SQR 3.97 MANUAL KNOB (100.8) 4 HOLES M6 THD ON SQR 3.97 (100.8) DEPTH: .39 (10) 4 HOLES M4 THD ON 75 x 100 DEPTH: .31 (8) 5 HOLES M4 THD ON ø3.62 (Ø 92) DEPTH: .31 (8) SUB-D25 MALE CONNECTOR 120° 5° 4 HOLES M6 THD ON SQR 75 DEPTH: .39 (10) 4 HOLES M4 THD ON 100 x 75 DEPTH: .31 (8) GTS30V_DSE (01/07) Newport Corporation, Irvine, California, has been certified compliant with ISO 9001 by the British Standards Institution. Newport & Spectra-Physics sales offices Belgium Newport Spectra-Physics B.V. Phone:...

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