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GTS Series High-precision linear stages

GTS Series High-precision linear stages
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GTS Series High-precision linear stages - 1

782 M o t o r i z e d P o s i t i o n i n g MOTORIZED ROTATION MOTORIZED LINEAR STAGES TECHNICAL REFERENCE STAGES SYSTEMS CONTROLLERS AND AMPLIFIERS MOTORIZED ACTUATORS MOTORIZED OPTICAL MOUNTS ––––– Target Position ––––– Interferometer Position Time (s) 0 0 1 -0.2 0.2 0.4 Position (ìm) 0.6 0.8 1.2 5 10 15 20 GTS stages deliver 100 nm motion sensitivity with high reliability and stability. • Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion and outstanding trajectory accuracy without cage migration • Integrated linear encoder with 50 nm resolution provides high sensitivity and ensures highly repeatable and accurate motion • Very low friction ball screw drive avoids stick-slip effects and ensures 100 nm incremental motion capability The GTS high-precision linear stages provide high sensitivity and outstanding trajectory accuracy in a compact, robust and cost effective package. They are an excellent, high-performance solution for applications such as surface scanning, test and calibration, optical component alignment and attachment, and high-precision optical delays lines. GTS stages are machined from stress-relieved 7075 aluminum for long-term strength and stability. All critical stage surfaces undergo multiple machining processes and precision grinding under stringent temperature control and undergo rigorous quality inspection. The GTS’s advanced asymmetric body design with an engineered flexible preload provides consistent results over varying temperatures and is insensitive to non-ideal mounting surfaces. The extra thin and compliant carriage has been optimized for different load conditions including XY configurations and for high vertical load capacity. To ensure the most accurate trajectory control, GTS stages feature matched pairs of best-in-class anti-creep crossed roller bearings. The absence of recirculating elements in these bearings leads to outstanding ripple-free motion adequate for the most demanding scanning and inspection systems. Moreover, the geared retainers prevent bearing cage migration, which can occur with other linear bearing products. A high-torque DC motor with a precision ground and preloaded, low friction ball screw eliminates stick-slip effects and delivers ultra-smooth motion with 100 nm incremental motion capability. Because GTS stages have been designed to meet all Need Accuracy to 1 ìm? Contact Newport to learn about our micropositioning calibration services needed for critical positioning applications. Upon request, we will create, implement and verify an electronic compensation routine to improve the absolute position accuracy of GTS70 stages to 1 ìm and GTS150 stages to 1.5 ìm when used with our XPS advanced motion control system. A certificate of calibration along with measured error maps is included. A typical assembly with a GTS150, a GTS70 linear stage and a URS100 rotation stage. stage performance without a tachometer feedback loop, they are compatible with a wide array of motion controllers including the popular ESP300, SMC100CC and XPS controllers. Compared to alternative direct-drive technologies, GTS stages can be used in vertical applications with loads up to 25 N without complex counter-balance equipment. Manual adjustments can be made using a knob at the end of the motor. Precision position feedback is provided by an optical scale with 50 nm resolution that is mounted in the center of the stage to eliminate all drive-train induced motion errors. The spacesaving, fixed read head design avoids any moving cables inside the stage and underscores the robustness and reliability of the GTS stages, exemplified by an MTBF of 20,000 hours. GTS stages are compatible with the GTS30V vertical stage, XM series ultra-precision linear stages, URS and RGV100BL rotation stages, VP-25X precision compact linear stages and VP-5ZA vertical lift stages. For applications requiring a vertical mounting bracket, please contact Newport's Applications Engineers. Phone: 1-800-222-6440 • Fax: 1-949-253-1680 NEW High-Precision Linear Stages GTS Series

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GTS Series High-precision linear stages - 2

783 Email: sales@newport.com • Web: newport.com M o t o r i z e d P o s i t i o n i n g TECHNICAL REFERENCE MOTORIZED LINEAR STAGES MOTORIZED ROTATION STAGES MOTORIZED OPTICAL MOUNTS MOTORIZED ACTUATORS CONTROLLERS AND AMPLIFIERS SYSTEMS Design Details Base Material High-strength 7075 Aluminum Bearings Anti-creep crossed roller bearings Drive Mechanism 8 mm diameter, backlash-free, ground ball screw Drive Screw Pitch (mm) 2 Feedback Linear steel scale, 20 ìm signal period, 0.05 ìm resolution, RS422 differential output Limit Switches Optical Origin Optical, at center of travel, including...

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