218 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 L i g h t S o u r c e s TECHNICAL REFERENCE MONOCHROMATOR AND INCANDESCENT SOURCES ARC SOURCES DEUTERIUM SOURCES CALIBRATION SOURCES FIBER ILLUMINATORS PHOTOLITHOGRAPHY SOLAR SIMULATORS INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES Oriel Flood Exposure Sources 97436 500 W Oriel Flood Exposure Source, 6 x 6 inch Beam Size (9.5 inch high pedestal not shown). We offer 500 and 1000 W Flood Exposure Sources for the near UV (350 - 450 nm), mid UV (260 - 320 nm) and deep UV (220 - 260 nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm). Three Spectral Ranges The spectral output of the illuminator is determined by three factors: • The type of lamp • The dichroic mirror • The collimating lens NUV sources run an Hg lamp, use a BK 7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. MUV and DUV sources run an HgXe lamp, use a UV grade fused silica lens (which transmits down to 200 nm), and have the appropriate dichroics. If you need the flexibility to work in all regions, select a DUV source and purchase additional dichroic mirrors for the respective regions. ABSORPTIVE HEAT SINK 45° MIRROR 45° DICHROIC MIRROR ELLIPSOIDAL REFLECTOR LAMP PROPRIETARY BEAM HOMOGENIZER SHUTTER COLLIMATING LENS Fig. 1 Optical configuration of 97436 500 W Oriel Flood Exposure Source 6 x 6 Beam Size. What Makes Up an Oriel Flood Exposure System? Illuminator Housing Fig. 1 shows the beam path of the housing. An efficient ellipsoidal reflector, coated with AlSiO for the NUV or enhanced Rhodium for MUV and DUV systems, collects up to 70% of the arc lamp output. A 45° primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. A shutter may be opened and closed manually with a switch on the housing side panel or via the 68955 Hand-Held Switch. For automated exposure control, we offer the 68951 Digital Exposure Controller or 68945 Digital Timer (see page 207). Upon request, the housing may also be wired to operate the shutter via a computer logic level. Each housing contains three interlock systems. Opening the housing door will trigger an electronic interlock switch to automatically interrupt power to the system. This prevents inadvertent operator exposure to the lamp. A thermal interlock shuts down the system if the temperature exceeds the level for safe operation. A third interlock shuts down the system if the lamp's cooling fan fails. See page 207 for dimensional diagrams of all the illuminator housings. • High intensity outputs • Highly uniform, large collimated beams • Efficient out of band rejection • Timed exposures

Lamp The NUV sources run Hg short arc lamps; these contain a precise amount of mercury and either xenon or argon, which act as a starter gas. Strong mercury lines through the ultraviolet and visible wavelengths dominate their output spectrum. The 365 nm line makes it ideal for use in the NUV. The MUV and DUV sources operate Hg(Xe) short arc lamps, which are similar to Hg lamps but contain more xenon gas than just the starter gas. The additional xenon enhances the short wave UV making it ideal for use below 350 nm. We supply ozone free Hg(Xe) lamps with the NUV and MUV sources, and UV enhanced...

220 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 L i g h t S o u r c e s TECHNICAL REFERENCE MONOCHROMATOR AND INCANDESCENT SOURCES ARC SOURCES DEUTERIUM SOURCES CALIBRATION SOURCES FIBER ILLUMINATORS PHOTOLITHOGRAPHY SOLAR SIMULATORS INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES Ordering Information Flood Exposure Sources Note: These figures are nominal. They are based on integrated spectral radiometric measurements of similar sources. These do not necessarily correspond with measurements by various broadband instruments with varying spectral response. Beam Uniformity: ± 5% over the specified...

Oriel Flood Exposure Sources Drawings LAMP RESET LAMP HOURS REPLACE LAMP SHUTTER OPEN SHUTTER OPEN/CLOSE LAMP ON/OFF LAMP ON Thisilluminator emits HIGH INTENSITY INVISIBLE ULTRAVIOLET LIGHT. Exposure maycause DELAYED SEVERE EYE AND SKIN BURNS. Use protective eye and skin covering. ULTRAVIOLET LIGHT Operate in well ventilated area. OZONE Lampsrun at veryhigh temperatures. Allow adequate time for lamp to cool before opening door. TEMPERATURE HIGHVOLTAGE LAMP EXPLOSION HAZARD WARNING! Thisilluminator emits HIGH INTENSITY INVISIBLE ULTRAVIOLET LIGHT. Exposure maycause DELAYED SEVERE EYE AND SKIN...

222 Phone: 1-800-222-6440 • Fax: 1-949-253-1680 L i g h t S o u r c e s TECHNICAL REFERENCE MONOCHROMATOR AND INCANDESCENT SOURCES ARC SOURCES DEUTERIUM SOURCES CALIBRATION SOURCES FIBER ILLUMINATORS PHOTOLITHOGRAPHY SOLAR SIMULATORS INSTRUMENTS ACCESSORIES FOR ORIEL LIGHT SOURCES This illuminator emits HIGH INTENSITY INVISIBLE ULTRAVIOLET LIGHT. Exposure may cause DELAYED SEVERE EYE AND SKIN BURNS. Use protective eye and skin covering. WARNING! This illuminator emits HIGH INTENSITY INVISIBLE ULTRAVIOLET LIGHT. Exposure may cause DELAYED SEVERE EYE AND SKIN BURNS. Use protective eye and skin...

This illuminator emits HIGH INTENSITY INVISIBLE ULTRAVIOLET LIGHT. Exposure may cause DELAYED SEVERE EYE AND SKIN BURNS. Use protective eye and skin covering. ULTRAVIOLET LIGHT Operate in well ventilated area. OZONE Lamps run at very high temperatures. Allow adequate time for lamp to cool before opening door. TEMPERATURE HIGHVOLTAGE LAMP EXPLOSION HAZARD WARNING! LAMP RESET LAMP HOURS REPLACE LAMP SHUTTER OPEN SHUTTER OPEN/CLOSE LAMP ON/OFF LAMP ON This illuminator emits HIGH INTENSITY INVISIBLE ULTRAVIOLET LIGHT. Exposure may cause DELAYED SEVERE EYE AND SKIN BURNS. Use protective eye and skin...