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Electronic Autocollimator for Metrology and Industrial Applications

Electronic Autocollimator for Metrology and Industrial Applications
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Electronic Autocollimator for Metrology and Industrial Applications - 1

Electronic Autocollimator for Metrology and Industrial Applications CV> viewport. Family of Brands ILX Lightwave6 New Focus'" Ophir* • Oriel® Instruments • Richardson Gratings™ • Spectra-Physics® • Spiricon18

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Electronic Autocollimator

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Electronic Autocollimator Precision Measurement for Metrology and Industrial Applications HIGH RESOLUTION AUTOCOLLIMATOR Analog Outputs at 2 kHz Sampling Frequency Ideal for Vibration Measurements The CONEX-LDS is a versatile electronic autocollimator traditionally used in non-contact alignment or measurement of angular variations. Using as much commercially available, but proven, optics and electronics technologies that simplified the design, the CONEX-LDS offers a high level of reliability for demanding metrology and industrial applications. With features like the integrated eyepiece and...

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Electronic Autocollimator for Metrology and Industrial Applications - 4

Electronic Autocollimator Sensitivity (µrad) Accuracy (µrad) RAYONNEMENT LASER NE PAS REGARDER DANS LE FAISCEAU LASER RADIATION DO NOT STARE INTO BEAM ATTENTION RAYONNEMENT LASER EN CAS D'OUVERTURE, EXPOSITION DANGEREUSE AU FAISCEAU APPAREIL A LASER DE CLASSE 2 CLASS II LASER PRODUCT P <1 mW; λ = 670 nm IEC60825 DANGER. LASER RADIATION WHEN OPEN, AVOID DIRECT EXPOSURE TO BEAM Complies with CFR 21 Subchapter J 0.01 ±5 ±(0.02 x measurement) (±5 µrad around 0: [-250 µrad; +250 µrad]) (i.e. 2%) Beam Diameter (mm) 22.5 Beam Divergence (µrad) 100 Beam Direction (µrad) 500 Equivalent Focal Length...

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Electronic Autocollimator for Metrology and Industrial Applications - 5

Electronic Autocollimator BEARING WOBBLE OR ECCENTRICITY MEASUREMENT Wobble Measurement Reflector: λ/10 flat mirror Filter setting: 10 Hz Dynamic acquisition at 10 Hz for 2 turns of the stage Wobble of Stage 10 5 0 In manufacturing environments or metrology applications that utilize dividing heads or rotation stages with mechanical or air bearings, the CONEX-LDS is a -5 very useful tool to verify the wobble of the bearings. In the manufacture of ball, thrust or air bearings, particularly those with large diameters, in-process -10 or final verification of wobble specifications can be...

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Electronic Autocollimator for Metrology and Industrial Applications - 6

Electronic Autocollimator SETTLING TIME AND STAGE DAMPING Measurement During Displacement Reflector: λ/4 flat mirror Filter setting: 2000 Hz Dynamic acquisition at 2000 Hz during displacement Settling Time: Yaw Angle vs Time The time required for settling into a position is an important parameter in high-accuracy, highthroughput applications like semiconductor inspection. Fast settling times result in processes to be performed very quickly, thus increasing productivity. In this case the CONEX-LDS autocollimator is used to measure the angular displacement at all stage positions, according to...

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Electronic Autocollimator for Metrology and Industrial Applications - 7

Electronic Autocollimator Principle of Operation AUTOCOLLIMATION PRINCIPLES ELECTRONIC AUTOCOLLIMATOR A standard autocollimator uses a back illuminated cross light reticle A, located behind the focal plane of a collimating lens B. The advantage of the electronic autocollimator is the automation of angular measurements. In the CONEX-LDS autocollimator, the basic principles are the same, but use different components: The resulting image is projected to infinity and reflected back to the instrument from a plane reflecting mirror C. • The source reticle is a Laser diode (1 mW; l = 670 nm). •...

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Electronic Autocollimator for Metrology and Industrial Applications - 8

Electronic Autocollimator Advantages positioning the reflected visible beam in the integrated eyepiece of the CONEX-LDS. Precise measurements can be read immediately from the dedicated NStruct Applet or analog outputs. Compared to interferometers, the position sensing device provides absolute values, which are not lost if the beam is blocked during the measurement. WITHIN EVERYONE'S REACH You do not need to be an expert in instrumentation to obtain accurate measurements with the CONEXLDS autocollimator, nor do you need to spend a fortune. Most operators can quickly learn how to use the...

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Electronic Autocollimator for Metrology and Industrial Applications - 9

Electronic Autocollimator Models & Accessories ORDERING REFERENCES Model CONEX-LDS CONEX-LDS-VER (1) CONEX-LDS-USB-422 CONEX-LDS-CABLE20 CONEX-LDS-PS The CONEX-LDS-VER verification kit includes a calibrated optical wedge fitted into a mechanical mount and all associated clamps and rods. The slide is delivered with a calibration certificate which provides the value of the angle of deviation which it produces on the autocollimator's beam. Description Electronic Autocollimator Verification Kit USB/RS-422 Adapter 20 m Cable Power Supply The verification kit is a stand alone kit which includes a...

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Electronic Autocollimator for Metrology and Industrial Applications - 10

Electronic Autocollimator HOLE M3 THD USABLE DEPTH: .12 (3) FOR GROUNDING DIMENSIONS IN INCHES (AND MILLIMETERS)

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Electronic Autocollimator for Metrology and Industrial Applications - 11

Electronic Autocollimator DIMENSIONS IN INCHES (AND MILLIMETERS) RANGE: ±2° (Optical Wedge Shown)

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Electronic Autocollimator for Metrology and Industrial Applications - 12

Electronic Autocollimator ItX t^a]G^GwHK7^• [J^JNBWFOCUET OPHIR" msnw/MEwrs Richardson Gratings- @ SpeCtra-PhysiCS. ^)^**»0«' Newport Corporation, Global Headquarters 1791 Deere Avenue, Irvine, CA 92606, USA PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: sales@newport.com Complete listings for all global office locations are available online atwww.newport.com/contact Germany /Austria /Switzerland Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the...

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