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Electronic Autocollimator for Metrology and Industrial Applications

Electronic Autocollimator for Metrology and Industrial Applications
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Electronic Autocollimator for Metrology and Industrial Applications

Product catalog summary
Overview
The CONEX-LDS is a high-resolution electronic autocollimator designed for precise, non-contact alignment and measurement of angular variations in metrology and industrial applications. Its compact and portable design makes it ideal for on-site and production floor use.
Key Specifications
  • Sensitivity: 0.01 µrad
  • Accuracy: ±5 µrad
  • Beam Diameter: 22.5 mm
  • Measuring Range: 5 m
  • Communication Interface: RS-422 via USB converter
  • Operating Temperature: +15 to +25°C
Features
  • High sensitivity with a signal-to-noise ratio of 0.003 µrad/√Hz
  • Fast acquisition with a sampling frequency of 2000 Hz
  • Analog outputs for vibration measurements
  • Integrated eyepiece for easy alignment
  • Class II laser safety compliance
Applications
  • Flatness Measurement: Uses a mirror to reflect the autocollimator beam for determining vertical displacement.
  • Pitch and Yaw Measurement: Identifies errors due to the Abbe effect and calculates true position.
  • Bearing Wobble Measurement: Verifies wobble in bearings using a mirror setup.
  • Rotation Stage Accuracy: Measures angular differences using a calibrated multifaceted mirror.
Principles of Operation
The CONEX-LDS employs a laser diode as the source reticle and a position sensing device to measure angular deviations, automating angular measurements for precise alignment and quality checks.
Safety and Compliance
The device is a Class II laser product, requiring no safety goggles, and complies with European directives, accompanied by a CE Certificate of Conformity.
Ordering Information
  • CONEX-LDS: Electronic Autocollimator
  • CONEX-LDS-VER: Verification Kit
  • CONEX-LDS-USB-422: USB/RS-422 Adapter
  • CONEX-LDS-CABLE20: 20 m Cable
  • CONEX-LDS-PS: Power Supply
Specifications and Recommendations
The document advises using high-quality Newport optics for optimal performance, recommending 50.8 mm (2") λ/10 mirrors with the SL51BD mirror mount for stability and precision in metrology applications.
Ordering References
Highlighted models include the CONEX-LDS-SLXY, a precision adjustable four-axis mount with a 100 mm axis height and ±2° angular range, and the CONEX-LDS-SL, a two-axis mount with a 75 mm axis height.
Set-Up
Various mounts for setting up the CONEX-LDS autocollimator are described, with the CONEX-LDS-SLXY offering flexibility with two angular and two linear axes, and the CONEX-LDS-SL providing two angular adjustments.
Verification Kit
The CONEX-LDS-VER verification kit includes a calibrated optical wedge and necessary components for calibration verification, ensuring measurements with a 0.5% uncertainty level.
Dimensions and Models
Detailed dimensions for the CONEX-LDS-SLXY and CONEX-LDS-SL models are provided, along with specifications for various components like the mirror mount and rail carriers.
Contact Information
Contact details for Newport Corporation's global offices are listed, including phone numbers and email addresses for locations in the USA, Belgium, China, France, Japan, Taiwan, Netherlands, UK, and Germany.
Certifications
Newport Corporation's facilities in various locations are ISO 9001 certified by the British Standards Institution, with Santa Clara, California, being DNV certified.
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Catalog excerpts

Electronic Autocollimator for Metrology and Industrial Applications-1

Electronic Autocollimator for Metrology and Industrial Applications CV> viewport. Family of Brands ILX Lightwave6 New Focus'" Ophir* • Oriel® Instruments • Richardson Gratings™ • Spectra-Physics® • Spiricon18

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Electronic Autocollimator for Metrology and Industrial Applications-2

Electronic Autocollimator

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Electronic Autocollimator for Metrology and Industrial Applications-3

Electronic Autocollimator Precision Measurement for Metrology and Industrial Applications HIGH RESOLUTION AUTOCOLLIMATOR Analog Outputs at 2 kHz Sampling Frequency Ideal for Vibration Measurements The CONEX-LDS is a versatile electronic autocollimator traditionally used in non-contact alignment or measurement of angular variations. Using as much commercially available, but proven, optics and electronics technologies that simplified the design, the CONEX-LDS offers a high level of reliability for demanding metrology and industrial applications. With features like the integrated eyepiece and mounting...

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Electronic Autocollimator for Metrology and Industrial Applications-4

Electronic Autocollimator Sensitivity (µrad) Accuracy (µrad) RAYONNEMENT LASER NE PAS REGARDER DANS LE FAISCEAU LASER RADIATION DO NOT STARE INTO BEAM ATTENTION RAYONNEMENT LASER EN CAS D'OUVERTURE, EXPOSITION DANGEREUSE AU FAISCEAU APPAREIL A LASER DE CLASSE 2 CLASS II LASER PRODUCT P <1 mW; λ = 670 nm IEC60825 DANGER. LASER RADIATION WHEN OPEN, AVOID DIRECT EXPOSURE TO BEAM Complies with CFR 21 Subchapter J 0.01 ±5 ±(0.02 x measurement) (±5 µrad around 0: [-250 µrad; +250 µrad]) (i.e. 2%) Beam Diameter (mm) 22.5 Beam Divergence (µrad) 100 Beam Direction (µrad) 500 Equivalent Focal Length (mm)...

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Electronic Autocollimator for Metrology and Industrial Applications-5

Electronic Autocollimator BEARING WOBBLE OR ECCENTRICITY MEASUREMENT Wobble Measurement Reflector: λ/10 flat mirror Filter setting: 10 Hz Dynamic acquisition at 10 Hz for 2 turns of the stage Wobble of Stage 10 5 0 In manufacturing environments or metrology applications that utilize dividing heads or rotation stages with mechanical or air bearings, the CONEX-LDS is a -5 very useful tool to verify the wobble of the bearings. In the manufacture of ball, thrust or air bearings, particularly those with large diameters, in-process -10 or final verification of wobble specifications can be accomplished...

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Electronic Autocollimator for Metrology and Industrial Applications-6

Electronic Autocollimator SETTLING TIME AND STAGE DAMPING Measurement During Displacement Reflector: λ/4 flat mirror Filter setting: 2000 Hz Dynamic acquisition at 2000 Hz during displacement Settling Time: Yaw Angle vs Time The time required for settling into a position is an important parameter in high-accuracy, highthroughput applications like semiconductor inspection. Fast settling times result in processes to be performed very quickly, thus increasing productivity. In this case the CONEX-LDS autocollimator is used to measure the angular displacement at all stage positions, according to the...

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Electronic Autocollimator for Metrology and Industrial Applications-7

Electronic Autocollimator Principle of Operation AUTOCOLLIMATION PRINCIPLES ELECTRONIC AUTOCOLLIMATOR A standard autocollimator uses a back illuminated cross light reticle A, located behind the focal plane of a collimating lens B. The advantage of the electronic autocollimator is the automation of angular measurements. In the CONEX-LDS autocollimator, the basic principles are the same, but use different components: The resulting image is projected to infinity and reflected back to the instrument from a plane reflecting mirror C. • The source reticle is a Laser diode (1 mW; l = 670 nm). • The...

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Electronic Autocollimator for Metrology and Industrial Applications-8

Electronic Autocollimator Advantages positioning the reflected visible beam in the integrated eyepiece of the CONEX-LDS. Precise measurements can be read immediately from the dedicated NStruct Applet or analog outputs. Compared to interferometers, the position sensing device provides absolute values, which are not lost if the beam is blocked during the measurement. WITHIN EVERYONE'S REACH You do not need to be an expert in instrumentation to obtain accurate measurements with the CONEXLDS autocollimator, nor do you need to spend a fortune. Most operators can quickly learn how to use the CONEX-LDS...

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Electronic Autocollimator for Metrology and Industrial Applications-9

Electronic Autocollimator Models & Accessories ORDERING REFERENCES Model CONEX-LDS CONEX-LDS-VER (1) CONEX-LDS-USB-422 CONEX-LDS-CABLE20 CONEX-LDS-PS The CONEX-LDS-VER verification kit includes a calibrated optical wedge fitted into a mechanical mount and all associated clamps and rods. The slide is delivered with a calibration certificate which provides the value of the angle of deviation which it produces on the autocollimator's beam. Description Electronic Autocollimator Verification Kit USB/RS-422 Adapter 20 m Cable Power Supply The verification kit is a stand alone kit which includes a calibrated...

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Electronic Autocollimator for Metrology and Industrial Applications-10

Electronic Autocollimator HOLE M3 THD USABLE DEPTH: .12 (3) FOR GROUNDING DIMENSIONS IN INCHES (AND MILLIMETERS)

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Electronic Autocollimator for Metrology and Industrial Applications-11

Electronic Autocollimator DIMENSIONS IN INCHES (AND MILLIMETERS) RANGE: ±2° (Optical Wedge Shown)

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Electronic Autocollimator for Metrology and Industrial Applications-12

Electronic Autocollimator ItX t^a]G^GwHK7^• [J^JNBWFOCUET OPHIR" msnw/MEwrs Richardson Gratings- @ SpeCtra-PhysiCS. ^)^**»0«' Newport Corporation, Global Headquarters 1791 Deere Avenue, Irvine, CA 92606, USA PHONE: 1-800-222-6440 1-949-863-3144 FAX: 1-949-253-1680 EMAIL: [email protected] Complete listings for all global office locations are available online atwww.newport.com/contact Germany /Austria /Switzerland Newport Corporation, Irvine, California and Franklin, Massachusetts; Evry and Beaune-La-Rolande, France and Wuxi, China have all been certified compliant with ISO 9001 by the British...

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