USER’S MANUAL High-Speed Belt-Driven Rotation Stage URB100CC

EDH0242En1010 — 03/10 ii URB100CC High-Speed Belt-Driven Rotation Stage Warranty Newport Corporation warrants this product to be free from defects in material and workmanship for a period of 1 year from the date of shipment. If found to be defective during the warranty period, the product will either be repaired or replaced at Newport’s discretion. To exercise this warranty, write or call your local Newport representative, or contact Newport headquarters in Irvine, California. You will be given prompt assistance and return instructions. Send the instrument, transportation prepaid, to the indicated...

v EDH0242En1010 — 03/10 URB100CC High-Speed Belt-Driven Rotation Stage EU Declaration of Conformity URB100CC High-Speed Belt-Driven Rotation Stage Year mark affixed: 2010 EC Declaration of Conformity We declare that the accompanying product, identified with the “ ” mark, complies with requirements of the Electromagnetic Compatibility Directive, 2004/108/EC. TYPE OF EQUIPMENT: Electrical equipment for measurement, control and laboratory use. STANDARDS APPLIED: Compliance was demonstrated to the following standards to the extent applicable: NF EN 61326-1: 2006 “Electrical equipment for measurement,...

EDH0242En1010 — 03/10 vi URB100CC High-Speed Belt-Driven Rotation Stage Definitions and Symbols The following terms and symbols are used in this documentation and also appear on the product where safety-related issues occur. General Warning or Caution The exclamation symbol may appear in warning and caution tables in this document. This symbol designates an area where personal injury or damage to the equipment is possible. European Union CE Mark The presence of the CE Mark on Newport Corporation equipment means that it has been designed, tested and certified as complying with all applicable European...

vii EDH0242En1010 — 03/10 URB100CC High-Speed Belt-Driven Rotation Stage Warnings WARNING The rotation of objects of all types carries potential risks for operators. Ensure the protection of operators by prohibiting access to the dangerous area spotted with the opposite symbol, and by informing the personnel of the potential risks involved. WARNING Do not use this stage when struts are emitting smoke or is unusually hot to the touch or are emitting any unusual odor or noise or is in any other abnormal state. Stop using the stage immediately, switch off the motor power and then disconnect the...

EDH0242En1010 — 03/10 viii URB100CC High-Speed Belt-Driven Rotation Stage Cautions CAUTION Do not place this stage in a hostile environment such as X-Rays, hard UV,… or in a vacuum environment. CAUTION Do not place this stage in a location affected by dust, oil fumes or steam. This may cause an electric shock. CAUTION Do not leave this stage in places subject to extremely high temperatures or low temperatures. This may cause an electric shock. • Operating temperature: +10 to +35 °C. • Storage temperature: -10 to +40 °C (in its original packaging). CAUTION Do not move this stage if struts power...

1 EDH0242En1010 — 03/10 URB100CC High-Speed Belt-Driven Rotation Stage High-Speed Belt-Driven Rotation Stage URB100CC 1.0 Introduction This manual provides operating instructions for the URB100CC rotation stage. RECOMMENDATION We recommend you read carefully the chapter “Connection to electronics” before using the URB100CC rotation stage.

EDH0242En1010 — 03/10 2 URB100CC High-Speed Belt-Driven Rotation Stage 2.0 Description The URB100CC rotation stage is based on our popular URS series, but features a belt drive instead of a worm gear. The belt drive offers significantly higher rotation speeds of up to 720 °/s without sacrificing life time expectancies. Typical applications are LIDAR, 3D imaging, or film thickness measurements of semiconductor wafers. Common to these applications are fast rotations over larger angles or continuous spinning at very high duty cycles and with high precision requirements with regards to wobble, angular...

3 EDH0242En1010 — 03/10 URB100CC High-Speed Belt-Driven Rotation Stage 3.0 Characteristics 3.1 Definitions Specifications of our products are established in reference to ISO 230 standard part II “Determination of the position, precision and repeatability of the machine tools with CNC”. This standard gives the definition of position uncertainty which depends on the 3 following quantities: (Absolute) Accuracy Difference between ideal position and real position. On-Axis Accuracy Difference between ideal position and real position after the compensation of linear error sources. Linear errors include:...

EDH0242En1010 — 03/10 4 URB100CC High-Speed Belt-Driven Rotation Stage 3.2 Mechanical Specifications 3.3 Load Specification Definitions Normal Load Capacity (Cz) Maximum load a rotation stage can move while maintaining specifications. This value is given with speed and acceleration specified for each rotation stage, and with a load perpendicular to bearings. Off-Centered Load (Q) Maximum cantilever-load a rotation stage can move: Q Cz / (1 + D/a) D: Cantilever distance. a: Construction parameter. 3.4 Load Characteristics and Stiffness 3.5 Stage Weight The weight indicated into the below table...

5 EDH0242En1010 — 03/10 URB100CC High-Speed Belt-Driven Rotation Stage 5.0 Motor 5.1 Motor Characteristics Motor Nominal Nominal Voltage Current Resistance Inductance (V) (A) (Ù) (mH) UE34CC 48 1.5 2.58 0.52 5.2 Command Signals for the DC-Motor In the above drawings, + Motor signal is referred to – Motor signal. When the stage moves in + Direction, the + Motor voltage is higher than – Motor voltage. When the stage moves in – Direction, the + Motor voltage is lower than – Motor voltage. 5.3 Sensor Position Use of the Index Pulse provides a repeatable Home Position at ±1 step. CAUTION “End-of-Run”...