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Air-Bearing System

Product catalog summary

Application
This document describes an advanced air-bearing system installed in 2002, designed for the large-scale assembly and testing of optical systems. It features a multi-axis system with a rigid silicon carbide and granite structure for superior stability and flatness, 19 motorized axes for alignment and positioning, and two long-travel air-bearing stages driven by linear motors.

Special Features

Highly accurate and stable 3-axis reticle holder.
19 motorized linear and rotary axes.
Two long-travel air-bearing stages with linear motors.
High stability due to silicon carbide structure, reliable cable management, and fine-tuned variable PID.
Excellent straightness and flatness along a 2000 mm travel axis.
XY Delta table with high transverse stiffness and small inertia on each linear motor, suitable for servo-systems with very high sensitivity.

Key Features

SiC structure provides high stiffness and low mass.
Newport Corporation is ISO 9001 certified by the British Standards Institution.

Reticle Holder

SiC carriage with air-bearing.
Z, tilt Θx, Θy with 3 piezoelectric actuators.
Travel: 300 µm, Resolution: 5 nm, Repeatability: 30 nm.

Delta X, Y Stage

Controlled by interferometers and driven by linear motor.
Mechanical coupling by flexible bracket: horizontally stiff, vertically soft.
Travel X, Y: 140 mm x 15 mm, Resolution: 10 nm, Repeatability: 60 nm.

Long Travel Carriages

Aluminum carriage with air bearing.
Servo-system with optical encoder, driven by linear motor.
Travel X: 2000 mm, Resolution: 1 µm, Repeatability: 2 µm.
On-axis accuracy: 6 µm, Straightness: 5 µm, Flatness: 4 µm, Stability over 12 hours: 1 µm.

Physical Specifications

Mass: 3500 kg.
Overall dimensions: 3400 x 2000 x 1300 mm.

Catalog excerpts

S Y S T E M B U S I N E S S U N I T Advanced System Air-Bearing System iinstalllled iin 2002 Application Optical System Assembly and Testing This system was designed for large-scale assembly and testing of optics. The multi-axis system features a very rigid silicon carbide and granite structure for superior stability and flatness, 19 motorized axes for alignment and positioning and 2 long travel air-bearing stages driven by linear motors. Special Features Highly accurate and stable 3-axis reticle holder 19 motorized linear and rotary axes 2 long-travel air-bearing stages with linear motor • High stability: – Silicon carbide structure – Reliable cable management – Fine tuned variable PID • Excellent straightness and flatness along a 2000 mm travel axis • XY Delta table: – High transverse stiffness – Small inertia on each linear motor – Suitable for servo-system with very high sensitivity SiC structure (high stiffness, low mass). Key Features

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S Y S T E M B U S I N E S S U N I T Newport Corporation, Irvine, California, has been certified compliant with ISO 9001 by the British Standards Institution. Belgium France Germany/Austria Italy Newport B.V. MICRO-CONTROLE Newport GmbH Newport/Micro-Controle Italia Tel: +32-(0)1 6402927 Tel.: +33-(0)1-60-91-68-68 Tel.: +49 (0) 61 51 / 708 -0 Tel.: +39-(0)2-929-0921 Fax: +32-(0)1 6402227 Fax: +33-(0)1-60-91-68-69 Fax: +49 (0) 61 51 / 708 -954 Fax: +39-(0)2-923-2448 [email protected] [email protected] [email protected] [email protected] Netherlands Sweden/Denmark United Kingdom/Ireland...

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