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- MICRO-CONTROLE / Spectra-Physics
- Air-Bearing System
Air-Bearing System
1 /2Pages
Air-Bearing System
1 /2Pages
Catalog excerpts
S Y S T E M B U S I N E S S U N I T Advanced System Air-Bearing System iinstalllled iin 2002 Application Optical System Assembly and Testing This system was designed for large-scale assembly and testing of optics. The multi-axis system features a very rigid silicon carbide and granite structure for superior stability and flatness, 19 motorized axes for alignment and positioning and 2 long travel air-bearing stages driven by linear motors. Special Features Highly accurate and stable 3-axis reticle holder 19 motorized linear and rotary axes 2 long-travel air-bearing stages with linear motor • High stability: – Silicon carbide structure – Reliable cable management – Fine tuned variable PID • Excellent straightness and flatness along a 2000 mm travel axis • XY Delta table: – High transverse stiffness – Small inertia on each linear motor – Suitable for servo-system with very high sensitivity SiC structure (high stiffness, low mass). Key Features
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S Y S T E M B U S I N E S S U N I T Newport Corporation, Irvine, California, has been certified compliant with ISO 9001 by the British Standards Institution. Belgium France Germany/Austria Italy Newport B.V. MICRO-CONTROLE Newport GmbH Newport/Micro-Controle Italia Tel: +32-(0)1 6402927 Tel.: +33-(0)1-60-91-68-68 Tel.: +49 (0) 61 51 / 708 -0 Tel.: +39-(0)2-929-0921 Fax: +32-(0)1 6402227 Fax: +33-(0)1-60-91-68-69 Fax: +49 (0) 61 51 / 708 -954 Fax: +39-(0)2-923-2448 [email protected] [email protected] [email protected] [email protected] Netherlands Sweden/Denmark United Kingdom/Ireland...
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